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研究生: 孫介芝
Sun, Chieh-Tze
論文名稱: 利用散射層以及表面改質製程增加有機光電元件出光率
The improvement of the extraction efficiency in organic light emitting diodes via surface-modification and volumetric light scattering
指導教授: 朱聖緣
Chu, Shen-yuan
學位類別: 碩士
Master
系所名稱: 工學院 - 奈米科技暨微系統工程研究所
Institute of Nanotechnology and Microsystems Engineering
論文出版年: 2007
畢業學年度: 95
語文別: 中文
論文頁數: 97
中文關鍵詞: 有機電激發光二極體外部量子效率
外文關鍵詞: OLED, extraction efficiency
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  • 在本研究中,我們利用表面粗化以及貼覆散射膜等方法提高一平面型發光的有機發光元件(OLED)其出光率以及外部量子效率。
    在表面蝕刻製程中我們的調變參數包含蝕刻液種類、蝕刻時間,而粗化後的表面參數則包含表面粗糙度、結構深度、表面輪廓等等;藉由適當地控制體蝕刻製程參數,將可製作具有不同表面特性的基板出光面。
    另外在透明散射膜製程中,我們首先測量不同膜厚對於穿透率的影響,進一步排除小範圍膜厚差異對穿透率的影響,再利用摻雜不同濃度的白色二氧化矽粉末控制散射層中散射點的分佈。其次,我們將這些微結構貼附在平面型OLED發光元件玻璃表面上,評估微結構對於促進平面型發光元件輝度效率之成效。並藉由不同視角之輝度測量,討論表面改質對於元件可視角的增益,以及利用積分球量測其對整體光通量的增益。
    實驗結果顯示具有最大粗糙度的玻璃表面所製作的發光元件其整體光通量最大;而在散射層部分高濃度散射點摻雜能有效的改善發光元件的視角,並提升整體出光率。

    In this thesis,two means to increase the extraction efficiency of the organic light devices via roughening and volumetric light scattering have been presented.
    During the etching process we varied the parameters including the etching acid and the etching duration. The structural parameters include surface roughness, the height of microstructures, and the surface morphology of microstructures. Using suitable process parameters of bulk micromachining, a desired pattern could be made on the surface of glass.
    In addition, during the process of making the scattering films, we investigated the influence of the film-thickness on the transmittance. To eliminate the differences between the thickness of films that affect the transmittance. Doped with different concentrations SiO2 powders were used to control the distribution of scattering point in the scattering layer.
    Eventually, by combining the microstructure with the plane emission OLEDs, we can comment the improvement of luminous efficiency by the microstructure. By changing the viewing angles and measuring the emission of the OLED, the improvement of view angle was discussed.
    The experimental results show that the device with the most rough glass surface has the biggest improvement of total output. And the scattering film which has high concentration scattering spot can improve the view angle most.

    摘要 III Abstract V 誌謝 VII 一、緒論 1 1-1前言 1 1-2研究動機 5 二、理論基礎與文獻回顧 6 2.1有機發光二極體(OLED) 6 2-1.1 OLED基本發光原理 6 2-1.2 OLED的光化學理論背景 8 2-1.3發光效率的定義與量測方法 11 2-1.4影響出光率的參數 13 2-1.5改善發光效率的方法 17 2-2表面粗化理論分析 24 2-3散射層理論分析 27 2-3.1 瑞利散射(Rayleigh scattering) 27 2-3.2 米氏散射(Mie scattering) 28 三、微結構設計與製造 30 3-1 OLED製程 30 3-1.1 真空熱蒸鍍系統設備 30 3-1.2 實驗材料 31 3-1.3 OLED元件製程步驟 32 3-1.4 OLED元件光電特性曲線量測 36 3-2基版表面粗化製程 37 3-2.1實驗材料 37 3-2.2濕蝕刻步驟 37 3-2.3表面圖樣特性量測 38 3-3透明散射層製程 40 3-3.1實驗材料 40 3-3.2透明散射層製程步驟 41 四、結果與討論 43 4-1表面粗糙 43 4-1.1蝕刻時間的影響 43 4-1.2不同蝕刻液的比較 44 4-1.3表面粗糙對於發光元件之影響 46 4-1.4促進輝度效率的比較 47 4-1.5不同視角輝度效率的比較 47 4-2 散射層 49 4-2.1膜厚對於穿透率的影響 49 4-2.2散射層對於發光元件之影響 50 4-2.3散射球摻雜濃度對輝度的影響 50 4-2.4不同視角輝度效率的比較 52 五、結論與未來展望 53

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