在過去電子光斑干涉術使用相位移法量測試件時，必需要利用步進馬達(Stepping Motor)或是壓電致動器(Piezoelectric Transducer)來推動試件或是參考面，或是利用轉動偏極板以得到不同相位值的干涉條紋圖像，因所花費的時間較長，容易受到環境振動或空氣擾動等影響產生誤差，造成量測之不穩定性及誤差。在本文中利用極化分光鏡(Polarized Beam-Splitter, PBS)，偏極板(Polarizer)，四分之一波板(Quarter-Wave Plate, QWP)搭配直角反射鏡(Right Angle Prisms)、分光鏡(Beam-Splitter)和CCD(Charge Couple Device)相機建立單一CCD瞬間相移電子光斑干涉儀；利用相位移法，在試件位移前、後可同時擷取多張不同相位之光斑圖像，再經過計算得到相位值，接下來經由相位展開法及相位值與位移轉換後，可得試件不同時間下的位移量。在模擬分析方面，利用已知之位移場，模擬出光斑圖及干涉條紋圖，將相位值做轉換後可得模擬位移場。在實驗部份分別做靜態量測及動態量測，靜態量測則是先利用單一CCD實驗架設擷取位移前光斑圖，接下來再擷取位移後光斑圖並經計算得到干涉條紋圖；再運用數位影像相關法(Digital Image Correlation, DIC)校正其取像位置，經計算後得到試件之面外位移；動態量測則是在一個時間下給予連續位移，並經計算後得到各時間下試件之面外位移。

In the past, when the Electronics Speckle Pattern Interferometry uses phase shift method to measure test specimen, stepping motor or piezoelectric transducers are normally used to move reference surface or test specimen or rotate the polarizer to get different interference fringe images. This practice takes a long time and is susceptible to environmental effects such as ambient vibration or air turbulence errors which results in measurement error.
In this paper, the polarized beam-splitter (PBS), polarizers, quarter-wave plates coupled with right angle prisms, bema-splitter and a Charge Couple Device (CCD) are used to setup a single-CCD instantaneous phase-shifting electronic speckle pattern interferometry (IPS-ESPI) to capture different phase-shifting speckle pattern images before and after the displacement of the specimen. Afterward the phase shifting and phase unwrapping method is used to determine the displacement of specimen.
In the simulation analysis, known displacement can be used to simulate speckle pattern images and fringe pattern whereas the displacement value are converted in order to obtain displacement. After converting the phase value to displacement value, the displacement errors relative to the known displacement can then be calculated. The speckle pattern images before and after the displacement of specimen are captured using a single CCD experimental setup in the static measurement, and then the position mismatch of these images can be corrected using digital image correlation method (DIC). It can then obtain the displacement of the specimen; Dynamic measurements are performed in the continuous displacement in a time interval, and displacements of the specimen outside reference surface at different moments are calculated.

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