| 研究生: |
陳彥志 Chen, Yen-Chih |
|---|---|
| 論文名稱: |
氧化鎵奈米線及氧化銦顆粒成長及分析 Growth and charactization of gallium oxide and indium oxide crystals |
| 指導教授: |
劉全璞
Liu, Chuan-Pu |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 材料科學及工程學系 Department of Materials Science and Engineering |
| 論文出版年: | 2004 |
| 畢業學年度: | 92 |
| 語文別: | 中文 |
| 論文頁數: | 81 |
| 中文關鍵詞: | 奈米線 |
| 外文關鍵詞: | nanowires |
| 相關次數: | 點閱:93 下載:3 |
| 分享至: |
| 查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
本研究是去探討氧化鎵的一維奈米結構及氧化銦顆粒,實驗中藉由簡單的加熱式管狀爐(Thermal CVD)來成長氧化鎵奈米線和氧化銦顆粒,針對不同的實驗參數的改變,可以得到許多不同的一維奈米結構,例如:奈米針、奈米柱、奈米帶,並且從奈米線的頂端未含催化劑可知成長機制不是一般用於成長奈米線的VLS 方法,而是屬於VS 的成長模式,並且在奈米線和奈米柱的成長中,由顆粒和VS 成長模式共同控制其成核及成長,另外由實驗中改變氧分壓及真
空度的多寡會造成由奈米線改變成奈米帶,奈米線的結構我們藉由TEM 的電子繞射圖可知其為單斜晶的β相氧化鎵所組成,從電性的量測中我們可以得到有關於氧化鎵奈米線的field emission 性質;在另外一方面,我們同時利用金屬銦反應形成氧化銦的顆粒,實驗中可以獲得許多不同的型態的顆粒,但是並無氧化銦奈米線的生成,因此在本研究中我們對於氧化鎵及氧化銦所造成的不同結構做比較及探討。
This research uses thermal chemical vapor deposition (CVD) to grow gallium oxide one dimensional nanostructures and indium oxide crystals.For the former,we studied various morphologies of the gallium oxide one dimensional nanostructures such like nano-wires, nano-rods, nano-belts by changing experimental parameters.Due to no catalysts on the Ga2O3 nano-wires and nano-wires only nucleate on crystals,so it can be proposed that Ga2O3 nano-wires followed the complex growth mechanisms composed by vapor-solid(VS) models and crystals nucleation and growth.But we can observe nano-belts only followed by VS growth methods.While changing oxygen partial pressure and working pressure,the shapes of gallium oxide one dimensional nanostructures can be transformed from nano-wires to nano-belts. We can obtain TEM electron diffraction pattern indicates that as-synthesized products are monoclinic β-gallium oxide nanowires. Finally we can obtain Ga2O3 nano-wires had good field emission property
For the indium oxide crystals,we also studied various morphologies of the indium oxide crystals.We tried to use the same experimental parameters on Ga2O3 nano-wires to grow indium oxide nanowires but we can find as-synthesized products were indium oxide crystals by TEM and XRD measurements.
第六章參考文獻
[1]奈米材料和奈米結構張立德﹑牟季美著滄海書局出版
[2]Xiangfeng Duan and Charles M. Lieber J. Am. Chem. Soc., 122
(2000),188-189
[3]Chen CC et al. J.Am.Chem.Soc. ,123 (2001),2791-2798
[4]C. H. Liang and L. C. Chen Appl. Phys. Lett., 81 (2002), 23
[5]Jun Zhang, Lide Zhang,Xinsheng Peng and Xiangfeng Wang J.
Mater. Chem., 12 (2002), 802–804
[6]J. Y. Lao, J. Y. Huang, D. Z. Wang, and Z. F. Ren Nano Lett., 3
(2003), 235
[7]D Banerjee, J Y Lao, D ZWang, J Y Huang, D Steeves,B Kimball and
Z F Ren Nanotechnology 15 (2004) 404–409
[8]Zhong Lin Wang Adv.Mater. ,15 (2003), 432
[9]Yu et al. Solid State Communication ,109 (1999),677-682
[10]Han W.Q. et al. Solid State Communication ,115 (2000),527-529
[11]Jun Zhang and Lide Zhang Solid State Communication ,122
(2002),493-496
[12]Gautam Gundiah,A.Govindarj and ,C.N.R.Rao Chemical Physics
Letters ,351 (2002),189-194
[13]J.Y.Li et al. Journal of Alloys and Compounds ,306 (2000),300-302
[14]C.H.Liang et al. Appl.Phys.Lett. ,78 (2001),3202
[15]Xu Xiang et al. Chemical Physics Letters ,378 (2003),660-664
[16]Jun Zhang et al. Physics Letters A ,322 (2004),363-368
[17]Zheng Wei,Zu Rong Dai,and Zhong Lin Wang Science ,291
(2001),1947
[18]Jianye Li et al. J.Phys.Condens.Mater ,13 (2001),L937-L941
[19]Z.R.Dai,Z.W.Pan, and Z.L.Wang J.Phys.Chem.B ,106
(2002),902-904
[20]H.P.Ho et al. Chemical Physics Letters ,382 (2003),573-577
[21]Shashank Sharma and Mahendra K.Sunkara J.Am.Chem.Soc. ,124
(2002),12288
[22]Yu et al. Appl.Phys.Lett. ,82 (2003), 4146
[23]”VLSI製造技術”,莊達人編著,第六、九章,高立圖書有限公司
(2000)
[24]R.S.Wanger,W.C.Ellis,Appl.Phys.Letters ,4 (1964),89
[25]E.I.Givargizov J.Crys.Growth ,31 (1975),20
[26]Alfredo M.Morales and Charles M.Lieber ,Science ,279 (1998),208
[27]Chen CC and Yeh CC Adv.Materials. ,12 (2000),738
[28]J. Zhang et al. Journal of Chemical Physics ,115 (2001),5714
[29]Jiangao Hu,Teri Wang Odom,and Charles M.Lieber
Acc.Chem.Res. ,32 (1999),435
[30]Zhou CW et al. Journal of Materials Research ,18 (2003),245-249
[31]Ren ZF et al. Appl.Phys.Lett. ,83 (2003),4821-4823
[32]Yiying Wu and Peidong Yang ,J.Am.Chem.Soc. ,123 (2001),3165
[33]T.J.Trentler,K.M.Hickman,S.C.Geol,A.M.Viano,P.C.Gibbons,W.E.Bu
hro Science ,270 (1995),1791
[34]Younan Xia,Peidong Yang ,Adv.Mater. ,15 (2003),353
[35]Heng Wu and William E.Buhro ,Adv.Mater. ,15 (2003),416
[36]Peidong Yang and Charles M.Lieber ,J.Mater.Res. ,12 (1997),2981
[37]L.X.Zhao,G..W.Meng,X.S.Peng,X.Y.Zhang,L.D.Zhang ,Appl.Phys.A
,74 (2002),587
[38]Rui Qin Zhang,Yeshayahu Lifshitz,and Shuit Tong Lee
Adv.Mater. ,15 (2003),635
[39]R.Q.Zhang,T.S.Chu,H.F.Cheung,N.Wang,and S.T.Lee Phys.Rev.B ,64
(2001),113304
[40]H.Y.Peng,Z.W.Pan,L.Xu,X.H.Fan,N.Wang,C.S.Lee,S.T.Lee ,Adv.Mat
er.,(13),317 2001
[41]D.D.D.Ma,C.S.Lee,F.C.K.Au,S.Y.Tong,S.T.Lee ,Science ,299
(2003),1874
[42]W.Seo,K.Koumoto,J.Am.Ceram. ,79 (1996),1777
[43]G.F.Jiang et al. J.Mater.Sci. ,35 (2000),63
[44]Wang ZL et al. J.Phys.Chem.B. ,104 (2000),1153