本文依據Tang等人所探討微柱與剛性平面之黏著界面間的拉拔力大小之數值模擬結果，得知當柱寬夠小時，平均拉拔應力就等於黏著強度，以此模擬結果為基礎，試圖透過試驗方式得知聚二甲基矽氧烷（PDMS）黏著強度。因此以微製造技術利用負型光阻SU-8透過曝光顯影製程製作不同直徑的微圓柱，以此母模翻製出聚二甲基矽氧烷（PDMS）微圓柱陣列，透過奈米壓痕試驗儀並使用平頭探針與聚二甲基矽氧烷（PDMS）微圓柱進行拉拔試驗，藉由卸載過程量測聚二甲基矽氧烷(PDMS)之拉拔力後，並計算表面微結構材料之平均拉拔應力，進而得知聚二甲基矽氧烷(PDMS)之黏著強度。

According to the simulation of the pull-off force on the interface between cylindrical and rigid plane issued by Tang et al. (2005), the average pull-off stress is equal to the adhesion strength while the cylindrical diameter is small enough. We try to know the adhesion strength of polydimethyl siloxane (PDMS) through the experiments based on the simulation. Therefore, micro fabrication technology, which uses negative photoresist SU-8 through UV light exposure and developing process, had been applied to produce cylinder molds with different diameter. Then, PDMS samples were fabricated by SU-8 molds. Finally, nanoindentation and flat tip were used during the unloading process to measure the pull-off force of PDMS cylinder which can be used to calculate the average pull-off stress, by which the adhesion strength of PDMS can be obtained.

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