本論文主要是利用微機電製程技術，製作出微懸臂樑的微結構，在表面旋塗一層BCB光阻，藉由加熱BCB光阻使其產生再流動現象，量測懸臂樑結構撓曲的變化，來反推計算BCB光阻再流動時所產生的表面張力；同時利用BCB光阻流動的張力，來自動組裝直立式光學微鏡片。
　　為了簡化製程的步驟，避免沉積後懸臂樑會因為殘餘應力影響而嚴重捲曲的問題，實驗中選用SOI（Silicon On Insulator）晶片作為材料，只需要兩道光罩就可以完成。實驗中設計了不同尺寸大小的懸臂樑，觀察在不同尺寸下BCB光阻材料再流動的性質；同時也改變BCB光阻的厚度，比較不同膜厚下光阻再流動時表面張力的大小。
　　應用的部份，是將BCB光阻當作鉸鏈，進行直立式為光學鏡片的自動組裝測試。這個部份的實驗重點放在BCB光阻再流動自動組裝微光學鏡片成功率的評估，以及自動組裝後微鏡片旋轉角度的測試。

關鍵字：BCB光阻、再流動、微鏡片、自動組裝

　In this study, we try to produce the micro structure of the cantilever beam by the technology of MEMS. We coat the surface with a BCB photo-resist layer, and make it flowing by heating. We then measure the change of the structure’s bending in order to calculate the surface tension generated in the flowing. At the same time, we assemble the standing optical micro-mirror automatically by the tension.
　To simplify the manufacture, and avoid the bending of cantilever beam generated by remainder stress after deposition, we select the SOI (Silicon On Insulator) as the material. Only two mask are needed. In the experiment, different size of cantilever beam are designed to observed the flowing properties of silicon and BCB. The thickness of the BCB is also changed to compare the generated tension respectively.
　For the application, the BCB is regarded as a gemel to test the automatic assembling of standing optical micro-mirror. This part of experiment cares about the evaluation of success rate and test of rotating angle after assembling.

Key word：BCB photo-resist,reflow,micro-mirror,self-assembly

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