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研究生: 何家安
Ho, Chia-Ann
論文名稱: 使用快速類絕熱動態優化絕緣層覆矽亞波長光柵波導 3-dB 分光器
2x2 fast quasi-adiabatic 3dB coupler using silicon-on-insulator sub-wavelength grating waveguides
指導教授: 曾碩彥
Tseng, Shuo-Yen
學位類別: 碩士
Master
系所名稱: 理學院 - 光電科學與工程學系
Department of Photonics
論文出版年: 2021
畢業學年度: 109
語文別: 中文
論文頁數: 61
中文關鍵詞: 亞波長光柵波導有效介質近似理論快速類絕熱動態優化法
外文關鍵詞: SWG waveguide, Effective medium theory, Fast Quasiadiabatic
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本研究探討過去文獻上利用商用軟體 Lumerical 裡的套件—bandstructure tool 計算亞波長光柵波導折射率的方法,並將快速準絕熱動態(Fast Quasiadiabatic Dynamics, FAQUAD)運用在亞波長光柵波導分光器的設計上。研究發現用有效介質近似理論(Effective medium theory, EMT)計算電磁場和折射率,再利用時域有限差分法(Finite-Difference Time-Domain, FDTD)驗證 FAQUAD 可以縮短元件長度,使線性結構 20 μm 縮短到 9 μm,約莫是縮短了 55%,在 1.3μm~1.7 μm 最大 imbalance 為 1.2 dB。如果對頻寬要求不高,亦可以縮短至 5.76um,約莫是縮短了 71%,仍然有 50/50 的分光效果,在波長 1.3 μm~1.7 μm 最大 imbalance 為 1.77 dB。縱向寬度製程容忍度(-20 nm~20 nm)則在 0.23 dB 以下,光傳播方向的 fill factor 製程容忍度則在 1.53 dB 以下;在整體光學元件的 Excess loss 方面,非線性結構元件總長 39μm 的損失為 0.18 dB。
我們的研究驗證了利用 EMT 法等效光柵的電磁場、折射率,再做 FAQUAD 可以縮短 SWG adiabatic coupler 的長度。此外,EMT 法可以用來設計 FAQAUD 的結構,只是 MODE 模擬 EMT 波導元件和 FDTD 模擬亞波常光柵波導的結果差很多,因此不具參考性。

This thesis explores the calculation of effective refractive indices of sub-wavelength grating waveguides using methods in the literature, and applied the Fast Quasiadiabatic (FAQUAD) algorithm to sub-wavelength grating couplers. We find that using Effective Medium Theory (EMT) to calculate the electromagnetic field and refractive index; and then apply the FAQUAD can shorten the length of the component.
The linear coupling region is shortened from 20 μm to 9 μm, a 55% reduction.If the bandwidth requirement is relaxed, it can also be shortened to 5.76 μm which is about 71% shorter and still has a 50/50 splitting effect.
In the bandwidth part, the imbalance of the sub-wavelength grating waveguide after FAQUAD (1.3 μm~1.7 μm) is about 1.77 dB; the vertical width fabrication tolerance (-20 nm~20 nm) is below 0.23 dB; the fill factor fabrication tolerance in the light propagation direction is below 1.53 dB. In terms of the excess loss of the overall structure, the loss of the total length of the non-linear structural element of 39 μm is 0.18 dB.
Therefore, choosing the EMT method can reduce simulation time, and it is also much more convenient in calculation.

中英文摘要 i 誌謝 xii 目錄 xiii 圖目錄 xv 表目錄 xix Chapter 1 簡介 1 1.1 Subwavelength grating 1 1.2 SWG 耦合器 6 1.3 SWG 絕熱耦合器 11 1.4 Fast Quasiadiabatic Dynamics (FAQUAD) 14 Chapter 2 理論分析 19 2.1 FDTD & Lumerical bandstructure tool 19 2.2 Lumerical bandstructure tool & Bloch mode 21 2.3 FDE-EMT 24 2.4 FDTD- SWG & FDE-EMT折射率、電場比較 26 Chapter3 設計與模擬 31 3.1 FDTD計算折射率準確性驗證 31 3.2 FDTD- FAQUAD SWG adiabatic coupler 38 3.3 MODE- EMT adiabatic coupler 39 3.4 SWG adiabatic coupler vs. EMT adiabatic coupler分光率頻寬比較 45 3.5製程容忍度 51 3.6 損耗(Excess loss)分析 57 Chapter4 結論 58 4.1結論 58 Reference 59

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