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研究生: 羅浩恩
Luo, Hau-En
論文名稱: 濃度極化現象的微流體海水淡化裝置
Microfluidic Seawater Desalination Device Using Ion Concentration Polarization
指導教授: 楊瑞珍
Yang, Ruey-Jen
學位類別: 碩士
Master
系所名稱: 工學院 - 工程科學系
Department of Engineering Science
論文出版年: 2014
畢業學年度: 102
語文別: 英文
論文頁數: 60
中文關鍵詞: 海水淡化微流體晶片電動學濃度極化現象電雙層重疊
外文關鍵詞: Seawater desalination, Microfluidic chip, Electrokinetics, Ion concentration polarization, Overlapped electric double layers
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  • 當今淡水資源的短缺已經是一個嚴重的問題。氣候變化導致冰川消失和降雨減少,威脅了全球超過六分之一人口的供水。我們的海水淡化裝置具有以下幾個優點,面積小、便於攜帶、可擴展、功率消耗低,並具有極佳效能。
    在這研究中,我們利用微機電系統(MEMS)製造技術和自行密封Nafion的方法製造微流體海水淡化裝置。
    當電場被施加穿過一個微米管道和離子選擇性納米管道的交界處,就會在這交界處發生離子濃度極化(ICP)效應。陽離子和陰離子均會被聚集在陰極端的奈、微米交界處,且消散於陽極端的奈、微米交界處。在消散區內的離子濃度相當的低,所以消散區會排斥帶電粒子使得離子無法穿越。這就是ICP海水淡化的基本原理,也是我們的實驗原理。
    在海水淡化實驗中,我們施加100V電壓在有著一條Nafion膜的微流體晶片上,並輸入0.5M的NaCl和10-5M 熒光素溶液進入晶片(Q = 5 µl/min)。海水淡化現象被觀察到在施加電壓後的第八分鐘。
    我們討論了幾種不同類型的海水淡化裝置及其淡化效果。這些裝置具有不同的Nafion納米管道設計。但最終我們無法產生穩定的海水淡化現象。我們發現實驗裝置的缺陷來自於奈米管道的製作,實驗中使用自行密封Nafion方法,在我們的裝置中製造奈、微米交界,但由於Nafion膜沉積不均勻,導致無法將隙縫完全密封。我們將在第5章詳細討論這些問題。

    The shortage of fresh water is a serious problem in the world today. Climate change is leading to vanishing glaciers and reduced precipitation, which threatens the water supply of more than one-sixth of the Earth’s population. Our device is advantageous because it has a small footprint, is portable, scalable, consumes little power, and is highly energy efficient.
    In this study, we manufactured a microfluidic seawater desalination device using microelectromechanical systems (MEMS) fabrication techniques and the self-sealed Nafion junction method.
    The ion concentration polarization (ICP) effect occurs at the junction of the micrometer and ion-selective nanometer channels when an electric field is applied across the channels. Both cations and anions are enriched at the cathode end and depleted at the anode end of a micro/nanojunction. The ion concentration is very low in the depletion zone; thus, the depletion zone repels charged particles, and no ions can pass through this region. This phenomenon is the principle underlying the ICP seawater desalination method used in this experiment.
    In seawater desalination experiments we applied 100 V to the microfluidic chip with One Nafion Junction and introduced a (Q = 5 µl/min) solution of 0.5 M NaCl and 10–5 M fluorescein into the chip. Seawater desalination was observed at the eighth minute after the voltage was applied.
    We discuss the desalination effect of several types of seawater desalination devices. These devices exhibit a different design of Nafion nanochannels.
    We could not produce a steady seawater desalination phenomenon. The major defect in this experiment lies in the fabrication of the nanochannel. We used the self-sealing method to produce micro/nanojunctions in our device; however, nonuniform Nafion sediment resulted in unsealed gaps. We will discuss these problems in more detail in chapter 5.

    Table of contents 中文摘要 I Abstract III 致謝 V Table of contents VIII List of Figure XI Abbreviation XIV Nomenclature XV Greek symbols XVI Chapter 1 Introduction 1 1-1 Introduction 1 1-2 Microelectromechanical Systems 3 1-3 Reverse Osmosis 4 1-4 Electrodialysis 6 1-5 Microfluidic Chip 7 1-6 Literature Survey 8 1-6.1 Ion Concentration Polarization 8 1-6.2 Self-Sealed Vertical Polymeric Nanoporous Junctions for High-Throughput Nanofluidic Applications 11 1-6.3 Direct Seawater Desalination by Ion Concentration Polarization 12 1-6.4 Out-of-Plane Ion Concentration Polarization for Scalable Water Desalination 14 1-7 Motivation 16 Chapter 2 Electrokinetic Effect 17 2-1 Electrokinetics 17 2-2 Electrical Double Layer (EDL) 17 2-3 Electrical Double-Layer Overlap 20 2-4 Electroosmotic Flow 21 2-5 Electrophoresis 23 2-6 Ion Concentration Polarization Phenomena 24 Chaprer 3 Material and methods 28 3-1 Photomask 28 3-2 Fabrication of Microchip 29 3-2.1 Silicon Wafer Pretreatment 29 3-2.2 Photoresist Coating 30 3-2.3 Exposure 31 3-2.4 Development 31 3-2.5 PDMS Casting 33 3-2.6 Oxygen Plasma Bonding 35 3-2.7 Fabrication of Self-Sealed Polymeric Nanoporous Structures 36 3-3 Fabrication of Microfluidic Conductivity Meter 37 3-3.1 Evaporation Deposition 38 3-3.2 Lift-off Process 39 3-4 Instrument 40 3-4.1 Microscope 41 3-4.2 Image Capture Unit 41 3-4.3 DC Measurements 41 3-5 Microfluidic Seawater Desalination Device Design 42 3-6 Experimental Setup 45 Chapter 4 Result and Discussion 47 4-1 Seawater Desalination Using theIon Concentration Polarization Process 47 4-2 I–V Curves and Ion Depletion 49 4-3 Seawater Desalination Experiments 51 4-3.1 Seawater Desalination Device with One Nafion Junction 51 4-3.2 Using the Seawater Desalination Device with Two Nafion Junctions to Observe the ICP phenomenon 52 Chapter 5 Conclusion 54 5.1 Why was the ICP phenomenon not rapidly induced in the experiment described in section 4-3.1? 54 5.2 Why was the ICP phenomenon rapidly induced in experiment 4-3.2? 56 5.3 Why was the nanochannel (Nafion) damaged in seawater desalination experiments? 57 References 58 List of Figure Figure 1.1 Reverse osmosis principle schematic diagram 5 Figure 1.2 Electrodialysis principle schematic diagram 6 Figure 1.3 ICP experiment device [11] 9 Figure 1.4 ICP phenomenon [11] 10 Figure 1.5 Effect of buffer concentration on ICP experiment [11] 11 Figure 1.6 Fabrication of Self-Sealed polymeric nanoporous structures [21] 12 Figure 1.7 Seawater desalination by ICP phenomenon [8] 13 Figure 1.8 Out-of-Plane ICP for scalable water desalination device [10] 14 Figure 1.9 Out-of-Plane ICP for water desalination schematic diagram [10] 15 Figure 1.10 Out-of-Plane ICP phenomenon for water desalination [10] 15 Figure 2.1 Schematic of electric double layer and its potential distribution. 19 Figure 2.2 Electrical double layers in nano/microchannels. 20 Figure 2.3 Electroosmotic flow velocity distribution. 22 Figure 2.4 Schematic of electrophoresis phenomenon. 23 Figure 2.5 Schematic illustrating concentration polarization at nano/microchannel interfaces. 25 Figure 3.1 Negative photoresist mold fabrication process. 32 Figure 3.2 Positive photoresist mold fabrication process. 32 Figure 3.3 Microchannel molds on silicon wafer substrate. 33 Figure 3.4 Schematic of PDMS casting process. 34 Figure 3.5 Oxygen plasma machine. 35 Figure 3.6 Schematic of self-sealed polymeric nanoporous structures fabrication process. 37 Figure 3.7 Evaporation and lift-off processes 39 Figure 3.8 Microfluidic conductivity meter 40 Figure 3.9 Microscope, CCD, and source meter 42 Figure 3.10 Seawater desalination device schematic diagram 43 Figure 3.11 Seawater desalination device schematic diagram 43 Figure 3.12 Seawater desalination device schematic diagram 44 Figure 3.13 Seawater desalination device schematic diagram 44 Figure 3.14 Microfluidic seawater desalination device 45 Figure 3.15 Experimental Setup diagram 46 Figure 3.16 Seawater desalination phenomenon using ion concentration polarization 46 Figure 4.1 Schematic of the seawater desalination process based on ion concentration polarization. 47 Figure 4.2 I–V curve showing the ohmic region, limiting current region, and over-limiting current region. 50 Figure 4.3 Photograph of a nanochannel damaged in the seawater desalination experiment 50 Figure 4.4 Photograph of the seawater desalination phenomenon 51 Figure 4.5 Photograph of the ICP phenomenon in a seawater desalination device with two Nafion junctions. 52 Figure 4.6 Photograph showing the expansion of the depletion zone. 53 Figure 5.1 Schematic of nonuniform Nafion sediment resulting in an unsealed gap. 55 Figure 5.2 Fluorescein transport from the cathode side to the anode side under the influence of an electric field. 55 Figure 5.3 Fluorescein transport from the cathode side to the anode side under the influence of an electric field. 56

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