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研究生： 連律豪
Lien, Lu-Hao
論文名稱： 以水熱法成長氧化鎢奈米柱感測膜之一氧化氮氣體感測器特性研究
Investigated performance of NO gas sensors using WO3 nanorod sensing membranes grown by hydrothermal synthesis
指導教授： 李欣縈
Lee, Hsin-Ying
學位類別： 碩士
Master
系所名稱： 理學院 - 光電科學與工程學系
Department of Photonics
論文出版年： 2023
畢業學年度： 111
語文別： 中文
論文頁數： 82
中文關鍵詞： 黑金 、異質接面結構 、水熱法 、一氧化氮氣體感測器 、氧化鎢奈米柱
外文關鍵詞： Gold-black, Heterojunction, Hydrothermal synthesis method, NO gas sensor, WO3 nanorods
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    • 摘要 I Abstract III 致謝 XI 目錄 XIII 表目錄 XVII 圖目錄 XVIII 第一章 序論 1 1.1 前言 1 1.2 一氧化氮氣體感測器介紹 1 1.3 研究動機 2 第二章 基本原理介紹與文獻回顧 5 2.1 氣體感測器簡介 5 2.1.1 氣體感測器種類介紹 5 2.1.2 半導體式氣體感測器原理及應用 7 2.1.3 氣體感測器之響應與回復 8 2.2 氧化鎢特性介紹及製備 9 2.2.1 氧化鎢特性及應用 9 2.2.2 氧化鎢晶種層之製備 10 2.2.3 水熱法合成氧化鎢奈米柱 11 2.2.4 氧化鎢奈米柱形貌對於氣體感測器之影響 12 2.2.5 熱處理奈米柱之特性 13 2.2.6 同質接面與異質接面對於氣體感測器之影響 13 2.3 黑金特性介紹及應用 14 第三章 實驗步驟與元件製作 17 3.1 實驗藥品 17 3.2 製程設備 17 3.2.1 磁控式射頻濺鍍系統 17 3.2.2 電子束蒸鍍系統 18 3.2.3 高溫爐管 19 3.2.4 低溫氣相冷凝系統 19 3.3 元件製作步驟 19 3.3.1 基板清洗 19 3.3.2 晶種層製備 20 3.3.3 水熱法合成氧化鎢奈米柱結構 21 3.3.4 高溫熱處理 21 3.3.5 元件金屬電極製備 22 3.3.6 黑金異質接面製作 22 3.4 特性分析與量測機台 22 3.4.1 X光繞射儀 22 3.4.2 X光光電子能譜儀 23 3.4.3 掃描式電子顯微鏡 24 3.4.4 穿透式電子顯微鏡 24 3.4.5 半導體元件氣體感測特性分析 25 第四章 研究成果與討論 32 4.1 氧化鎢晶種層分析 32 4.2 不同水熱法溫度合成氧化鎢奈米柱之形貌分析 33 4.3 不同草酸添加量對於氧化鎢奈米柱形貌之影響 34 4.4 不同鎢酸鈉濃度合成氧化鎢奈米柱之形貌與特性分析 35 4.4.1 鎢酸鈉濃度對於氧化鎢奈米柱形貌之影響 35 4.4.2 氣體感測器響應特性分析 36 4.5 不同前驅物酸鹼值合成氧化鎢奈米柱之形貌與特性分析 37 4.5.1 前驅物酸鹼值對於氧化鎢奈米柱形貌之影響 37 4.5.2 氣體感測器響應特性分析 38 4.6 不同氯化鈉添加量合成氧化鎢奈米柱之形貌與特性分析 38 4.6.1 氯化鈉添加對於氧化鎢奈米柱形貌之影響 39 4.6.2 氣體感測器響應特性分析 39 4.7 不同水熱法時間成長氧化鎢奈米柱之形貌與特性分析 40 4.7.1 水熱法成長時間對於氧化鎢奈米柱形貌之影響 41 4.7.2 氣體感測器響應特性分析 41 4.8 晶種層厚度對於氧化鎢奈米柱形貌之影響及特性分析 41 4.8.1 晶種層厚度變化對於氧化鎢奈米柱形貌之影響 42 4.8.2 氣體感測器響應特性分析 43 4.9 不同熱處理之氣體感測器響應特性分析 43 4.9.1 X光光電子能譜儀分析 44 4.9.2 氣體感測器響應特性分析 45 4.10 異質接面對於氣體感測器響應特性分析 48 4.10.1 沉積黑金於氧化鎢奈米柱表面之形貌分析 49 4.10.2 具黑金之氧化鎢奈米柱氣體感測器響應特性分析 50 第五章 結論 69 參考文獻 71

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