於本論文中，我們以奈米球鏡微影術製作金奈米網陣列結構，並以分光光譜儀分析金奈米網陣列結構的光學特性，藉著改變金奈米網陣列的參數如週期性、奈米洞直徑及金屬厚度等研究對金奈米網陣列的影響，而同時我們也對金奈米網陣列的感測能力做分析，所達到的最高感測能力值(figure-of-merit)為8.69。
此外，我們將金奈米網陣列結構的研究再延伸，於金奈米網陣列結構裡加入金屬圓盤陣列結構，研究此兩種結構之間所產生交互作用耦合的現象並探討該結構的光學特性，我們試圖改變金屬圓盤的尺寸及金屬種類以得到更好的感測能力，經實驗參數的調整目前我們所得到最高感測能力值(figure-of-merit)為12.97。
期望這些具有高感測能力的研究成果將來能有更多的應用。

Fabrication of Au nanohole array is demonstrated using Nanospherical-Lens Lithography. Surface plasmon resonance (SPR) of the Au nanohole arrays in water is analyzed using transmission spectroscopy. We investigated how the SPR spectra changes when we change the structural parameters, such as periodicity, diameters, and thickness of the nanohole arrays. The refractive sensing capabilities of these nanohole arrays are also investigated and the maximum refractive sensing figure-of-merit (FoM) is around 8.69. In addition, we also incorporated nanodisk arrays inside the nanohole arrays and studied the coupling effects in their transmission spectra. The maximum obtained FoM is around 12.97 after optimizing the diameters and thickness of the nanodisks. We believe the results in this thesis can be applied for sensitive biosensing application.

[1]N. D. Denkov, O. D. Velev, P. A. Kralchevsky, I. B. Ivanov, H. Yoshimura, and K. Nagayamat, “Mechanism of Formation of Two-Dimensional Crystals from Latex Particles on Substrates” Langmuir, vol. 8, no. 12, pp. 3183–3190, 1992.

[2]Anjeanette D. Ormonde, Erin C. M. Hicks, Jimmy Castillo, and Richard P. Van Duyne, “Nanosphere Lithography : Fabrication of Large-Area Ag Nanoparticle Arrays by Convective Self-Assembly and Their Characterization by Scanning UV-Visible Extinction Spectroscopy” Langmuir, vol. 20, no. 16, pp. 6927–6931, 2004.

[3]Christy L. Haynes and Richard P. Van Duyne, “Nanosphere Lithography: A Versatile Nanofabrication Tool for Studies of Size-Dependent Nanoparticle Optics”, J. Phys. Chem. B 2001, 105, 5599-5611

[4]Si Hoon Lee, Kyle C. Bantz, Nathan C. Lindquist, Sang-Hyun Oh, Christy L. Haynes, “Self-Assembled Plasmonic Nanohole Arrays” Langmuir, 13685–13693, Sep, 2009

[5]Yeonho Choi, Soongweon Hong, and Luke P. Lee, “Shadow overlap ion-beam lithography for nanoarchitectures.,” Nano letters, vol. 9, no. 11, pp. 3726–31, Nov. 2009.

[6]Zhipeng Huang, Adv. Mater. 2007,19,744-748

[7]O. J. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. Obrien, P. D. Dapkus, and I. Kim, Science, 284, 1819 (1999).

[8]E. Chow, S. Y. Lin, S. G. Johnson, P. R. Cilleneuve, J. D. Joannapoulos, J. R. Wendt, G. A. Vawter, W. Zubrzycki, H. Hou, and A. Alleman, Nature, 407, 983 (2000).

[9]W. Wu, D. Dey, O. G. Memis, A. Katsnelson, and H. Mohseni, “A novel lithography technique for formation of large areas of uniform nanostructures” Proc. of SPIE Vol. 7039 70390P-1, 2008.

[10]Wei Wu, Dibyendu Dey, Omer G. Memis, Alex Katsnelson, and Hooman Mohseni, “A Novel Self-aligned and Maskless Process for Formation of Highly Uniform Arrays of Nanoholes and Nanopillars.,” Nanoscale Research Letters, vol. 3, no. 3, pp. 123–127, Mar. 2008.

[11]Yun-Chorng Chang, Hsin-Chan Chung, Sih.-Chen Lu, and Tzung-Fang Guo, “A large-scale sub-100 nm Au nanodisk array fabricated using nanospherical-lens lithography: a low-cost localized surface plasmon resonance sensor.,” Nanotechnology, vol. 24, no. 9, p. 095302, Mar. 2013.

[12]吳民耀、劉威志,“表面電漿子理論與模擬,”物理雙月刊, vol. 二十八卷二期, pp. 486–496, 2006.

[13]邱國斌、蔡定平,“金屬表面電漿簡介,”物理雙月刊, vol. 二十八卷二期, pp. 472–485, 2006.

[14]Peter Offermans, Martijn C. Schaafsma, Said R. K. Rodriguez, Yichen Zhang, Mercedes Crego-Calama, Sywert H. Brongersma, and Jaime Gomez Rivas, “Universal Scaling of the Figure of Merit of Plasmonic Sensors.” ACS Nano, Vol. 5 , no. 6, 5151–5157 , 2011

[15]Ahmet A. Yanik, Min Huang, Osami Kamohara, Alp Artar, Thomas W. Geisbert, John H. Connor, and Hatice Altug, “An Optofluidic Nanoplasmonic Biosensor for Direct Detection of Live Viruses from
Biological Media” Nano Letters, 10, 4962–4969, 2010

[16]曾重賓,“氧電漿輔助奈米球微影術之研究與應用, ” 國立成功大學, 2010