簡易檢索 / 詳目顯示

研究生: 施和成
Shi, Ho-Cheng
論文名稱: 上發光有機發光元件之開發
The development of top-emission organic light emitting devices.
指導教授: 洪昭南
Hong, Chan-Nan
學位類別: 碩士
Master
系所名稱: 工學院 - 微機電系統工程研究所
Institute of Micro-Electro-Mechancial-System Engineering
論文出版年: 2006
畢業學年度: 94
語文別: 中文
論文頁數: 108
中文關鍵詞: 有機發光二極體上發光有機發光元件有機發光元件
外文關鍵詞: organic light emitting device, top-emission organic light emitting devices
相關次數: 點閱:64下載:3
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 中文摘要
    本論文主要分為兩部份,第一部份為我們使用射頻濺鍍的方式來沉積氧化銦鋅透明導電膜,在實驗中發現,若將透明導電膜沉積在玻璃上的最佳條件運用於上發光有機發光元件上將是不適用的,且明顯的可以看到壓縮應力所造成的龜裂現象,因此氧化銦鋅緩衝層的沉積是必要的。此外,由於上陽極發光有機發光元件之陽極,不像傳統元件可以直接對陽極部進行表面處理,因此F4-TCNQ掺雜於CuPc以提升電洞注入是必須的。而氧化銦鋅透明導電膜應用於上發光有機發光元件,在電流密度為168mA/cm2操作下有最大亮度2130cd/m2,且電流效率與功率效率分別為1.72cd/A和0.29lm/W。

    第二部份為進行上陰極有機發光元件的製作,使用半透明金屬Al及光學匹配材料ZnS當頂部電極,能有效的使光耦合至外部,且元件在13V時,有最高亮度19300cd/m2,最高電流效率3.28cd/A,為無使用光學匹配層的1.7倍。另一方面,上陰極有機發光元件中,光學匹配層的厚度為40nm時,發出的光色很接近純綠光520nm,也就是說具有較最佳的顏色飽和度。

    Abstract
    This subject was divided into two parts. The first was fabrication of top anode organic light emitting device for sputtering process. In the experiment, we found that the film of IZO was deposited on glass which was good. However, the same condition was deposited on the organic layer which was not suitable. Because we would find that the stress was resulted from compress stress. Therefore, it was important that the buffer layer was deposited on the organic layer .Besides, due to the anode of the top anode organic light emitting device could not treat for surface. Therefore, it was necessary that the F4-TCNQ was dopped in the CuPc. It could enhance the hole injection effectively. When the device structure was Al(80nm)/LiF(1.5nm)/Alq(50nm)/NPB(15nm)/CuPc:F4-TCNQ(15nm)/IZO, the maximum brightness was 2130cd/m2. And the current efficiency was 1.72cd/A.
    The second was fabrication of top cathode organic light emitting device. We would use the half transparent metal which was the Al and the optical matching material which was the ZnS. When the device structure was Ag(80nm)/CuPc:F4-TCNQ(15nm)/NPB(30nm)/Alq(70nm)/BCP(10nm)/Cs2CO3(1.5nm)/Al(15nm)/ZnS(40nm), it had the maximum brightness which was 19300cd/m2. It had the color saturation better than the device structure was Ag(80nm)/CuPc:F4-TCNQ(15nm)/NPB(30nm)/Alq(70nm)/BCP(10nm)/Cs2CO3(1.5nm)/Al(15nm), too.

    目錄 中文摘要………………………………………………………………..Ⅰ 英文摘要………………………………………………………………..Ⅱ 致謝……………………………………………………………………..Ⅲ 目錄……………………………………………………………………..Ⅴ 表目錄…………………………………………………………………..Ⅹ 圖目錄…………………………………………………………………..XI 第一章 緒論……………………………………………….......1 1-1前言…………………………………………………………...1 1-1-1有機發光元件的歷史簡介………………………………...1 1-1-2有機發光元件的優點…………………………..………….2 1-2有機發光元件顯示器的最新發展……………………….....2 1-3研究動機與目的………………………………………….....4 第二章 理論基礎與文獻回顧………………….……….….....7 2-1有機發光二極體元件理論…………………...………………7 2-1-1有機發光元件結構………………..………………...……7 2-1-2載子的注入、傳導與複合………………………………….9 2-1-2~1載子的注入………………………………………....….9 2-1-2~2載子的傳輸……………..…………………………....10 2-1-2~3載子的複合…………………………..……………....12 2-2有機發光元件劣化原因與機制……………….………...…13 2-3上發光有機發光元件……………………………..…………16 2-3-1上發光元件簡介……………………………………..…..16 2-3-2上發光元件的結構……………………………………....17 2-4 透明導電膜製作原理……………………………………….22 2-4-1濺鍍原理……………………………….………………...22 2-4-2磁控濺鍍…………………………………………………..23 2-4-3射頻濺鍍………………………………………………..…24 2-4-4電漿原理…………………………………………….…….25 2-4-5薄膜沉積現象……………………………………….…….28 2-4-6IZO透明導電膜之電學基本原理……….…………..……29 2-4-7薄膜應力現象……………………………………….…….30 第三章 實驗方法與步驟……………………….……….…....39 3-1 實驗流程…………………..…………………..………….39 3-2 實驗系統設計…………………………………..……….…40 3-2-1高真空熱蒸鍍系統…………………………..……………40 3-2-1-1抽氣系統……………………..……………………....40 3-2-1-2壓力監控系統…………………………….….……....40 3-2-1-3薄膜厚度監控系統……………………………..…....40 3-2-1-4系統加熱裝置…………………….…………..……...41 3-2-2氧電漿處理系統………………..…………………….….41 3-2-2-1抽氣系統……………………………………...……...41 3-2-1-2壓力監控系統………………………………..……....41 3-2-2-3流量控制系統…………………………………..…....42 3-2-2-4電漿產生的電源供應器……………………..……....42 3-2-3有機發光元件糧測系統………………………….……….42 3-2-4射頻電源系統……………..……………………………..43 3-2-4-1流量控制系統………………………………………....43 3-3實驗材料……………………………………...…………...43 3-3-1基板材料……………………………………………………43 3-3-2有機材料…………………………..………………………43 3-3-3無機材料..…………………………………………………44 3-3-4金屬材料…………...………………………………..….44 3-3-5基板清洗溶劑及實驗氣體…..…………………….…….44 3-3-6靶材材料……….………………………………………….44 3-3-7工作氣體………………………...……………………….45 3-4實驗步驟……………..……………………………………..45 3-4-1傳統發光元件………………………………..…………..45 3-4-1-1ITO、IZO陽極圖案定義……………………...……...45 3-4-1-2ITO、IZO基板濕式前處理之實驗步驟………..…....45 3-4-1-3ITO、IZO基板之低壓電漿處理……………..……....46 3-4-1-4有機與無機薄膜蒸鍍………………………..……....46 3-4-2上發光元件的製作…………………………………..…..47 3-4-2-1玻璃基板濕式前處理的實驗步驟……………….…….47 3-4-2-2有機與無機薄膜蒸鍍……………………………………47 3-5元件特性分析與光譜量測……………….………………….48 第四章上發光有機發光元件的製作…………………….......51 4-1IZO薄膜的製備與應用………………………….…….…….51 4-1前言………………………………………………..………..51 4-2 以射頻濺鍍系統成長IZO薄膜製作於有機膜上……....…52 4-3 IZO透明導電膜電性上的分析……………………...…...54 4-4 IZO薄膜於OLED元件的應用………………...…………...55 第五章 TCO-free之上發光有機發光元件……...……….…..68 5-1 前言……………………………………….…………………68 5-2 上陰極發光有機發光元件之陽極材料選擇………...…..68 5-3上陰極發光有機發光元件之陰極材料選擇………………..69 5-4上陰極發光有機發光元件之電子注入層的選擇………....70 5-5上陰極發光有機發光元件的製作………………...……….71 5-6 ZnS對上發光有機發光元件壽命的影響………….……….73 第六章 總結論……………………………..………………....84 第七章 參考文獻………………………………...…………...87 自述與著作……………………………………………………...92 .

    參考文獻

    [1] J. R. Sheats, H. Antoniadis, M. Hueschen, W. Leonard, J. Miller, R. Moon,
    D. Roitman, and A. Stocking, Science, 273, 884, (1996).
    [2] P. Pope, H. P. Kallmann ,and P. J. Magnante, J. Chem. Phys., 38, 2042,
    (1963).
    [3] W. Helfrich, and W. G. Schneider, Phys.Rev. Lett.,14 ,229, (1965).
    [4] D. F. Williams, and M. Schadt, Proc. IEEE, 58, 476, (1970).
    [5] C. W. Tang, and S. A. VanSlyke, Appl. Phys. Lett., 51, 913, (1987).
    [6] J. H. Burroughes, D. D. C. Bradley, A. R. Brown, R. N. Marks, K. Mackay,
    R. H. Friend, P. L. Burns, and A. B. Holmes, Nature, 347, 539, (1990).
    [7] M. J. Flynn, J. Kanicki, A. Badano, and W. R. Eyler, Imaging & Therapeutic
    Technology ,19, 1653, (1999).
    [8] G. Mueller, Electroluminescence I-Semiconductor and Semimetals Vol. 64,
    Academic Press, San Diego, CA USA, 209, (2000).
    [9]R. G. Kepler, P. M. Beeson, S. J. Jacobs, R. A. Anderson, M. B. Sinclair,
    V. S. Valencia, and P. A. Cahill, Appl. Phys. Lett., 66, 3618 , (1995).
    [10]P. W. M. Blom, M. J. M. de Jong, and M. G. van Munster, Phys. Rev. B, 55,
    R656, (1997).
    [11]P. R. L. Malenfant, C. D. Dimitrakopoulos, J. D. Gelorme, L. L. Kosbar,
    and T. O. Graham, Appl. Phys. Lett., 80, 2517, (2002).
    [12]H. Murata1, G. G. Malliaras, M. Uchida, Y. Shen, and Z. H. Kafafi1, Mat.
    Res. Soc. Symp. Proc., 665, C6.3.1, (2001).
    [13]M. Matsumura, T. Akai, and M. Saito, Jpn. J. Appl. Phys., 35, 3468 ,
    (1996).
    [14]D. Troadec, G. Veriot, R. Antony, and A. Moliton, Synth. Met., 124, 49,
    (2001).
    [15]D. Ammermann, A. Böhler, and W. Kowalsky, Annual report, Institut für
    Hochfrequenztechnik, TU Braunschweig, 48, (1995).
    [16]A. L. Burin, and M. A. Ratner, J. Phys. Chem. A, 4704, (2000).
    [17]C. Adachi, S. Tokito, T. Tsutsui, and S. Saito, Jpn. J. Appl. Phys. Part
    2, 27, L269, (1988).
    [18]C. Adachi, S. Tokito, T. Tsutsui, and S. Saito, Jpn. J. Appl. Phys. Part
    2, 27, L713 , (1988).
    [19]W. B. Im, H. K. Hwang, J. G. Lee, K. Han, and Y. Kim, Appl. Phys. Lett.,
    79, 1387, (2001).
    [20]M. Ikaia, S. Tokitob, Y. Sakamoto, T. Suzuki, and Y. Taga, Appl. Phys.
    Lett., 79, 156, (2001).
    [21]M. Pfeiffer, A. Beyer, T. Fritz, and K. Leo, Appl. Phys. Lett., 73, 3202,
    (1998).
    [22]J. Blochwitz, M. Pfeiffer, T. Fritz, and K. Leo, Appl. Phys. Lett., 73,
    729, (1998).
    [23]X. Zhou, M. Pfeiffer, J. Blochwitz, A. Werner, A. Nollau, T. Fritz,
    and K. Leo, Appl. Phys. Lett., 78, 410, (2001).
    [24]A. Nollau, M. Pfeiffer, T. Fritz, and K. Leo, J. Appl. Phys., 87, 4340 ,
    (2000).
    [25]A. G. Werner, F. Li, K. Harada, M. Pfeiffer, T. Fritz, and K. Leo, Appl.
    Phys. Lett., 82, 4495, (2003).
    [26]J. Kido, and T. Matsumoto, Appl. Phys. Lett., 73, 2866, (1998).
    [27]J. Huang, M. Pfeiffer, A. Werner, J. Blochwitz, K. Leo, S. Liu, Appl.
    Phys. Lett., 80, 139, (2002).
    [28]X. Zhou, M. Pfeiffer, J. S. Huang, J. B. Nimoth, D. S. Qin, A. Werner, J.
    Drechsel, B. Maennig, and K. Leo, Appl. Phys. Lett., 81, 922, (2002).
    [29]http://www.cam.ac.uk
    [30]J. Kalinowski, J. Phys. D: Appl. Phys., 32, R179, (1999).
    [31]U. Wolf, V. I. Arkhipov, and H. Bässler, Phys. Rev. B, 59, 7507 , (1999).
    [32]S. Barth, P. Müller, H. Riel, P.F. Seidler, W. Rieß, H. Vestweber, U.
    Wolf , and H. Bässler, Synth. Met., 111-112, 327, (2000).
    [33]M. Pope, and C. E. Swenberg, Electronic Processes in Organic Crystals and
    Polymers, Oxford University Press, New York, 379 , (1999).
    [34]S. Miyata, and H. S. Nalwa, Organic Electroluminescence Materials and
    Devices, Golden and Breach Science Publishers, Netherlands, 415, (1997)
    [35]L. S. Hung , Appl. Phys. Lett., 75, P1404, (1999)
    [36]J. Shen, Synth. Met.,111, P233, (2000)
    [37]Hany Aziz, Appl. Phys. Lett., 72, P756, (1998)
    [38]Nicholas A . Kotov, Adv. Funct. Mater., 12, P265, (2001)
    [39]D. R. Baigent, R. N. Marks, N. C. Greenham, R. H. Friend, S. C. Moratti,
    and A. B. Holmes, Appl. Phys. Lett. 65, 2636, (1994)
    [40]V. Bulovic´, P. Tian, P. E. Burrows, M. R. Gokhale, and S. R. Forrest,
    Appl. Phys. Lett. 70, 2954, (1997)
    [41]T. Dobbertin, M. Kroeger, D. Heithecker, D. Schneider, D. Metzdorf,
    H.Neuner, E. Becker, H. H. Johannes, and W. Kowalskya,
    Appl. Phys. Lett. 82, 284, (2003)
    [42]T. Dobbertin, O. Werner, J. Meyer, A. Kammoun, D. Schneider, T. RiedlE.
    Becker, H. H. Johannes, and W. Kowalsky, Appl. Phys. Lett. 83, 5071, (2003)
    [43]S.R.Forrest, and M.E.Thomposon ,Appl. Phys.Lett. 68, 2606, (1996)
    [44]Han-Ki Kim and Kyu-sung Lee, Appl. Phys.Lett . 88, 012103, (2006)
    [45]L.S.Hung,C. W.Tang, Appl. Phys.Lett. 78 ,544, (2001)
    [46]C. W. Chen, P. Y. Hsieh, H. H. Chiang, C. L. Lin, H. M. Wu, and C. C.Wu,
    Appl.Phys. Lett. 83, 5127, (2003)
    [47]H. Riel, S. Karg, T. Beierlein, B. Ruhstaller, and W. Rieß, Appl.
    Phys. .Lett. 82, 466, (2003)
    [48]A.Dodabalapur,L.J.Rothberg,J.Appl.Phys.,80 ,6954, (1996)
    [49]J. R. Roth, "Industrial plasma engineering-Volume1:Principles
    Institute of Physics", Publishing in London, (1995).
    [50]J. G. Ryan and S. Robers, Thin Solid Films 153, p 329, (1987).
    [51]Hiroshi Hara,Takashi Shiro,Japanese J. Appl. Phys. ,43, p745, (2004)
    [52]Yongge Cao, Lei Miao J. Appl. Phys. ,45, p 1623,(2006)
    [53]S Tamulevicius, Vaccum,51,pp127, (1998)
    [54]G. B. Palmer, Chem. Mater, 9 , p3121, (1997)
    [55]Z.C. Jin, J. Appl. Phys, 64, p5117, (1988)
    [56]D.D. Edwards, Appl. Phys. Lett. 70, p1706 , (1997)
    [57]Kaiyang Zeng, Furong Zhu, Thin solid film. 443, p60, (2003)
    [58]T. Moriga, J. Am. Ceram. Soc. 81, p1310, (1998)
    [59]施敏著, 半導體元件物理
    [60]A. Kahn, Appl. Phys. Lett. 70,1348, (1997)
    [61]Karl Leo, Appl. Phys. Lett .73,3202, (1998)
    [62]Han-Ki Kim, Appl. Phys. Lett. 88, 012103, (2006)
    [63]L. S. Liao, Appl. Phys. Lett. 75, p1619, (1999)
    [64]C. W. Chen, P. Y. Hsieh, H. H. Chiang, C. L. Lin, H. M. Wu, and C. C.Wu,
    Appl. Phys. Lett. 83, 5127, (2003)
    [65]L.S. Hung , Appl .Phys. Lett. 78, 544, (2001)
    [66] T.Hasegawa,SID 2004 Digest,p.154
    [67]H.Riel, S.Karg, J. Appl. Phys., 94, 5290, (2003)
    [68] Frank Nuesch, Adv. Funct. Mater., 11 ,116, (2001)

    下載圖示 校內:2011-07-27公開
    校外:2011-07-27公開
    QR CODE