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研究生: 陳雅玲
Chen, Ya-Ling
論文名稱: 圖像識別在設計驗證中的應用
An Integrated Application of Image Recognition in Design Verification
指導教授: 王明習
Wang, Ming-Shi
學位類別: 碩士
Master
系所名稱: 工學院 - 工程科學系碩士在職專班
Department of Engineering Science (on the job class)
論文出版年: 2023
畢業學年度: 111
語文別: 中文
論文頁數: 53
中文關鍵詞: 檢驗系統圖像識別裂紋阻擋結構
外文關鍵詞: inspection system, image recognition, Crackstop
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  • 在產品的生產過程中,進料品質保證(Incoming Quality Assurance,IQA)和出廠品質保證(Outgoing Quality Assurance ,OQA)是兩個相關但獨立的概念。它們在品質控制的不同階段擔負著不同的作用。 以半導體產業為例,通過進行IQA,半導體代工廠可以在材料進入產品生產流程之前檢查和測試材料的品質,確保材料滿足所需的品質和規格要求。生產資料通常包括文字生產資訊和電路設計檔,通過結合文字生產資訊和電路設計檔,半導體製造商可以檢驗IQA資料的正確性。本研究中,我們以積體電路設計中常見的元件-裂紋阻擋結構(Crackstop)為例,基於其特定特徵來建立圖像識別過程。通過開發一個檢驗系統並生成相關的檢驗報告,我們可以驗證資料的正確性,這種方法可確保生產過程的品質和可靠性,最終可提高產品的整體品質。

    In the production process of a product, Incoming Quality Assurance (IQA) and Outgoing Quality Assurance (OQA) are two related yet independent concepts that fulfill distinct roles at different stages of the quality control process. Within the semiconductor industry, IQA enables semiconductor foundries to inspect and test the quality of materials before their incorporation into the production process. This verification ensures that the materials conform to the required quality and specification standards. Production data generally encompasses textual production details and circuit design files. By amalgamating textual production information with circuit design files, semiconductor manufacturers can corroborate the accuracy of IQA data. In this research, our focus is on a component in integrated circuit design known as the Crackstop structure. We establish an image recognition process grounded in its specific attributes. This involves the development of an inspection system and the generation of pertinent inspection reports. Through an analysis of these generated reports, we can validate the accuracy of the data.This approach guarantees the quality and dependability of the production process, ultimately leading to an enhancement in the overall product quality.

    第一章 緒論 1 1.1 研究動機 1 1.2 研究目的 2 1.3 論文架構 3 第二章 文獻探討 5 2.1 GDSII (GRAPHICAL DESIGN SYSTEM/GRAPHIC DATA SYSTEM) 5 2.2 IC的裂紋阻擋結構 6 2.3 影像辨識 10 2.3.1 相關研究 10 2.3.2 骨架化(Skeletonization) 10 2.3.3 卷積運算 12 第三章 系統架構與實現 15 3.1 目標元件特徵 15 3.2 影像辨識流程 16 3.3 系統檢測報告 31 第四章 系統實作與結果 34 4.1 系統架構與實作 34 4.2 系統有效性評估 35 4.2.1 實驗一: 不同類型的連接案例 35 4.2.2 實驗二: 不同角落設計的案例 44 第五章 結論與未來展望 48 5.1 結論 48 5.2 未來研究方向 48 參考文獻 50

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