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研究生: 鍾承諴
Chung, Cheng-Shian
論文名稱: 雷射製程中光壓效應作用於微粒之研究
Study of the radiation pressure effects on micro-particles in laser process
指導教授: 林震銘
Lin, Jehn-ming
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年: 2007
畢業學年度: 95
語文別: 中文
論文頁數: 105
中文關鍵詞: 幾何光學模型光壓效應光鉗效應
外文關鍵詞: optical radiation pressure, optical trapping, ray optics model
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  • 本研究主要討論雷射製程中雷射光壓作用於微粒之影響,利用雷射光壓施加於微粒之作用力將物體定位、排列或堆積,可成為雷射製程中一種新的應用。由於光壓現象是雷射光與微粒之間複雜的交互作用,目前並沒有一種可廣泛適用於所有狀況的理論模型,常用的模型分為「幾何光學模型」及「電磁波模型」。本文將對「幾何光學模型」進行修正,討論如何降低在計算微粒較小的粒子時的誤差,使此模型能準確預估微粒所受的光壓作用力,達到準確控制微粒的目的。
    文中提出修正高斯光束模式,考慮光束經由曲線聚焦後為一個面而非一個點,並由文獻及實驗中分別比較不同參數條件下,使用一般幾何光學模型及修正模式分別得到的理論計算值,與實驗量測值互相比較的結果。
    從研究中可以發現幾何光學模型在配合使用高倍率物鏡及較大微粒粒徑的情形下,理論值與實驗值相當接近;但是在使用低倍率物鏡或小粒徑微粒時,誤差會增大。而經過修正後之模型,在高倍率物鏡、微粒粒徑足夠大的情形下得到的結果與幾何光學模型之結果相當接近;且在使用低倍率物鏡或小粒徑微粒時,與實驗值相較仍具有相當的準確度,因此修正後的模型適用的情形更廣泛,可用來準確估算光壓作用力。

    The aim of this thesis is to study the radiation pressure of laser beam distributed on the spherical particle. The particles in laser processes can be located and concentrated by the radiation pressure. Since the phenomenon of radiation pressure is complicated and there is no existing model that can fit all situations. The prediction of radiation pressure mainly involves two approaches - ray optics model and electromagnetics model. This study has modified the ray optics model to reduce the deviations in the calculation for smaller particles.
    Considering the Gaussian beam mode, it was assumed that the beam focus is on a plane but not on a point as treated in most cases of literature. From the results of the modified ray optic model, the computation results have been compared with the experiments with various parameters from the literature.
    It can be found that the errors between the calculation results based on the ray optics model and the experiment results increase with low numerical aperture lenses or small particles. And there is a good agreement between the calculation results based on the modified ray optics model and the experiment results. However the modified ray optics model provides an accurate prediction in most situations, and it shows the possibilities of the new model in the applications for the laser material processes.

    中文摘要…………………………………………………………… Ⅰ 英文摘要…………………………………………………………… Ⅱ 誌謝………………………………………………………………… Ⅲ 目錄………………………………………………………………… Ⅳ 表目錄……………………………………………………………… Ⅶ 圖目錄……………………………………………………………… Ⅷ 符號說明…………………………………………………………… ⅩⅠ 第一章 緒論…………………………………………………… 1 1-1 研究目的…………………………………………………… 1 1-2 文獻回顧…………………………………………………… 3 1-3 本文架構…………………………………………………… 9 第二章 雷射光壓之原理及計算方法…………………………… 10 2-1雷射光壓之基本原理………………………………………… 10 2-2幾何光學模型推導…………………………………………… 11 2-2.1單一細光束的作用力…………………………… 12 2-2.2微粒位於光軸上之光壓作用力計算…………… 17 2-3 微粒在任意位置之光壓作用力計算推導…………………… 19 2-3.1判斷細光束是否會與微粒相交………………… 21 2-3.2各道細光束入射角的計算……………………… 22 2-3.3將ζ軸及Ψ軸之作用力,解析至x、y、z各軸……… 23 2-4 幾何光學模型之計算結果…………………………………… 26 2-4.1微粒在光軸上之計算結果……………………… 28 2-4.2微粒不在光軸上之計算結果判………………… 33 第三章 幾何光學模型計算方法之修正…………………………… 35 3-1雷射光束之特性……………………………………………… 37 3-2幾何光學模型之修正方法…………………………………… 40 3-2.1微粒位在光軸上之計算………………………… 40 3-2.2微粒位在任意位置之計算……………………… 47 3-3修正後模型之計算結果及驗證……………………………… 56 3-3.1模型計算流程及說明…………………………… 56 3-3.2微粒在光軸上,使用不同NA?物鏡之計算結果 58 3-3.3微粒在光軸上,使用不同粒徑之計算結果…… 59 3-3.4計算結果與文獻數據之比較…………………… 60 第四章 雷射光壓作用力實驗…………………………………… 65 4-1實驗方法……………………………………………………… 65 4-2實驗配置與步驟……………………………………………… 67 4-2.1實驗配置………………………………………… 67 4-2.2實驗步驟………………………………………… 68 4-3實驗結果……………………………………………………… 70 4-3.1雷射功率量測…………………………………… 70 4-3.2不同功率下之實驗結果………………………… 72 4-3.2.1雷射功率=1.5W ………………………… 72 4-3.2.2雷射功率=3.0W.………………………… 75 4-3.2.3雷射功率=5.0W. ………………………… 78 4-3.3使用不同倍率物鏡之實驗結果………………… 80 4-3.3.1物鏡倍率=5X …………………………… 80 4-3.3.2物鏡倍率=40X ………………………… 81 4-4實驗結果與模型計算結果之比較…………………………… 85 4-4.1重力、浮力及黏滯力之計算…………………… 85 4-4.2實驗與計算結果之比較與討論………………… 85 第五章 綜合討論與建議………………………………………… 89 5-1 綜合討論……………………………………………………… 89 5-2 相關建議與未來發展………………………………………… 90 參考文獻…………………………………………………………… 92 附錄A……………………………………………………………… 96 附錄B……………………………………………………………… 102

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