本論文之主要目的是探討具生物材料之薄膜電晶體。元件結構以閘極電極/ 絕緣層/ 通道層/ 源和汲極電極為基礎。絕緣層材料以蜂蜜材料為主。主要探討研究蜂蜜之固化條件以及於不同固化條件中所獲得之蜂蜜薄膜對薄膜電晶體特性之影響。最後尋找元件之最佳條件。
蜂蜜薄膜之固化狀態可由烘烤溫度、烘烤時間來決定。另外，因為蜂蜜的主要成分為碳水化合物，所以蜂蜜薄膜之保存環境是非常重要。我們藉由電荷耦合元件相機照片、漏電流量測和電容-電壓特性曲線量測發現到在90 ℃30分鐘烘烤之蜂蜜薄膜展現出較佳的狀態。蜂蜜薄膜的漏電流和阻抗分別為4.43 μA/cm2和1.86×〖10〗^4 MΩ /cm2。介電係數約為22，而在薄膜電晶體的研究裡，底部閘極薄膜電晶體結構被採用。元件皆製作於銦錫氧化物玻璃基板上。300奈米厚的銦錫氧化物薄膜作為閘極電極。蜂蜜介電層、五環苯通道層以及源極和汲極金電極之厚度分別被控制於1500奈米、60奈米和150奈米。通道長寬分別為100微米和500微米。在這研究裡能可發現薄膜電晶體之性能能藉由水和蜂蜜的混和來改善。使用1:2的蜂蜜對水之體積比時，薄膜電晶體有較好的電特性。以蜂蜜為基礎的薄膜電晶體展現出傳統P通道電晶體之電特性。元件具有場效遷移率為0.01 cm2 /V× s、電流開關比為5.75 × 103、臨界電壓為1伏特以及次臨界斜率為10 V/decade。根據原子力顯微鏡量測的結果，五環苯薄膜展現較好的晶格特性，其表面粗糙度均方根值為30奈米同時顆粒大小為450奈米。元件於充滿氮氣之手套箱內保存2個月之後仍然可以展現出較好的電特性。在最後的研究裡，傅里葉轉換紅外光譜儀顯示在1060和3400 cm-1的最強振動分別為碳氧基和氫氧基。

The main purpose of this thesis is to investigate the thin film transistors (TFTs) with biomaterial. The structure of gate electrode/ insulating layer/ channel layer/ source and drain electrodes is applied in this study. The honey is used as the insulator layer. Moreover, the solidification condition of honey and the influence of honey film formed by different solidification conditions on the characteristics of TFTs are investigated. Finally, the optimizing fabrication condition of the devices is found.
The solidifying states of honey film are determined by the baking temperature, and baking time. Because of the main component of honey to be carbohydrate, the storage environment is very important. It can be observed by charge-coupled device (CCD) camera pictures, leakage current measurement and capacitance-voltage (C-V) measurement that the honey film baked at 90 ℃ for 30 mins shows the better quality. The leakage current and resistance are 4.43 μA/cm2 and 1.86×〖10〗^4 MΩ /cm2, respectively. The dielectric constant is about 22. In the study of TFTs, the bottom gate TFTs is adopted. The devices are fabricated on indium tin oxide (ITO) glass substrate. The 300 nm-thick ITO thin film is used as gate electrode. The thickness of honey dielectric, pentacene channel and source and drain gold electrodes are controlled at 1500, 60 and 150 nm, respectively. It is also clearly observed that the performance of TFTs is improved by mixing water and honey. The TFTs using the solution of mixing honey and water in the volume ratio of 1:2 have better the electrical characteristics. The honey-based TFTs perform the electrical characteristics of conventional p-channel transistors. The properties of the devices had the field effect mobility of 0.01 cm2 /V× s, on / off current ratio (Ion/off) of 5.75 × 103, threshold voltage (VTH) of 1 V, and sub-threshold slope (S. S.)of 10 V/decade. According to the results of atomic force microscopy (AFM) measurement, the pentacene film on honey dielectric layer display good crystal quality. Its root mean square roughness (Rrms) and grain size are about 30 nm and 450 nm, respectively. Good electrical characteristics can also be observed after the fabricated devices stored in nitrogen-filled glove box for 2 months. At last of this study, the chemical functional group of honey is also investigated by Fourier Transform infrared (FTIR) spectroscopy. The strongest vibration happened at 1060 and 3400 cm-1 that indicates the existence of C-O group and –OH group, respectively.

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