本論文以近場式靜電紡絲製程 (Near-field Electrospinning , NFES)，搭配高分子材料聚偏二氟乙烯 (polyvinylidene difluoride , PVDF)，並開發創新的製程製作出3D堆疊壓電纖維。3D堆疊壓電纖維的技術以製程參數的分析和纖維線徑的預測為核心。透過近場式靜電紡絲實驗整理出製程的臨界電壓以及各製程參數對線徑大小的影響。利用NFES的數學模組，本研究推導出預測纖維線徑的公式，理論值與實驗值的誤差為15.22%，證實了預測纖維線徑的可行性。透過SEM觀測出成功堆疊的3D壓電纖維，驗證壓電纖維確實可藉由本論文之技術堆疊出具有一定高度的微結構。本研究利用紙基板、銅電極、3D堆疊壓電纖維製作出壓電纖維感測元件，並設計一系列實驗量測3D壓電纖維之壓電特性。透過量測結果歸納出纖維的輸出電壓正比於堆疊層數，堆疊7層的纖維較無堆疊的纖維高出116% 的電壓輸出，驗證了透過纖維的堆疊可以提升感測元件之輸出電壓。而感測元件的電壓輸出則與電極間距成反比，利用不同的堆疊層數或不同的電極間距，可以成功分隔出不同區間的電壓值。最後本論文成功將此壓電纖維感測元件應用於人體生理訊號之量測，將感測元件結合LabVIEW以及訊號擷取裝置，並撰寫人機介面，作為生理訊號的監控與紀錄。未來可望將該研究之製程技術拓展於壓電式微機電系統(Microelectromechanical Systems, MEMS)的製造與應用。

The purpose of present study is using near-field electrospinning (NFES) combined with polymer material polyvinylidene difluoride (PVDF) and designing the novel technology to fabricate 3D stacking piezoelectric fibers (3DSPF). Through the mathematical module of NFES, the study derives the formula of predicting fibers width and velocity of jet. Besides, analyze the relation between process parameters and fibers width completely, and conclude the effect of each parameter. After that, design a process to fabricate 3DSPF with paper substrate, and observe the result of 3DSPF by SEM. The result of SEM holds that paper substrate and prediction of fibers width can make process successfully. The study designs the experiments and diverse sensor to verify the piezoelectricity of 3DSPF. The result of experiments shows that the voltage of sensor is proportional to stacking layer, and voltage of 7 layers stacking fibers is higher than normal fibers 116 %, and the voltage of fibers is inversely proportional to electrodes gap. Finally, the study shows the application to produce the flexible sensor combined with paper substrate, copper electrodes, 3DSPF, and tendency of voltage to measure the physiological data of human. Making use of data acquisition (DAQ) and human machine interface (HMI) to design a system that can monitor users’ physiological signal effectively.

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