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研究生： 洪品
Hung, Pin-Kun
論文名稱： 利用氧化鋅奈米柱提升發光二極體之光輸出
Improvement on light output of light emitting diodes with ZnO nanorods
指導教授： 洪茂峰
Houng, Mau-Phon
學位類別： 碩士
Master
系所名稱： 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
論文出版年： 2009
畢業學年度： 97
語文別： 中文
論文頁數： 114
中文關鍵詞： 氧化鋅奈米柱 、磷化鋁鎵銦發光二極體
外文關鍵詞： ZnO nanorods, GaAlInP LED
相關次數： 點閱：104  下載：2 
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    • 近年來氧化鋅奈米材料引起相當大的注視，由於它具有許多特別的特性，如寬能隙、高的激子結合能以及出色的化學與熱穩定性，這些優勢使得ZnO在光電元件上有較高的效率表現。因此，ZnO在近年來被廣泛應用在發光二極體、雷射二極體、紫外光檢測器以及太陽能電池。利用各種化學及物理的沉積技術可以合成出一維的氧化鋅奈米結構，這些方法包含了分子束磊晶、金屬-有機化學氣相沉積、模板法、脈衝雷射沉積和水溶液法。比較上述提到的合成方法，由於水溶液法具有大尺寸製造、低成本及低溫等優點。因此，本論文利用水溶液法合成氧化鋅奈米柱。
    本論文主要分成兩部分，第一部分介紹氧化鋅奈米柱的製備以及其特性；以水溶液法在鍍有氧化鋅摻鋁的玻璃基板上合成出高品質之一維氧化鋅奈米柱陣列，使用的反應物是硝酸鋅與HMT(1：1莫耳比)，我們可以藉由改變製程參數去調整奈米柱的高寬比，並討論其成長機制，再利用X光繞射儀(XRD)及光激發光光譜儀(PL)分析氧化鋅的晶體結構與光特性。第二部分則是直接在磷化鋁鎵銦發光二極體上合成氧化鋅奈米柱，並在LED製程後量測其電性以及光性，藉由上述方法，我們使磷化鋁鎵銦發光二極體的亮度提升了60.9%。

    Zinc oxide nano-material has attracted considerable attention over the last few years due to its many especially properties, such as wide bandage, large exciton binding energy, excellent chemical and thermal stability, these benefits confirm the opto-electronic devices fabricated by ZnO material should have highly efficient performance at room temperature. Therefore the ZnO-based devices such as lighting-emitting diodes (LEDs), laser diodes (LDs), UV photodetectors, and solar cells have been recently proposed. A variety of chemical and physical deposition techniques can be used to synthesize one-dimensional of ZnO nanostructure. The methods include molecular beam epitaxy (MBE), metal-organic chemical vapor deposition (MOCVD), template-based growth, pulsed laser deposition and aqueous solution method. Comparing with above-mentioned various synthetic methods, owing to advantages of aqueous solution method such as large-scale fabrication, low-cost and low temperatures. Therefore, we employ aqueous solution method to synthesize the ZnO nanorods in the paper.
    There are two parts in this study. One is the introduction of the properties and fabrication of nanorods. To manufacture an one-dimensional ZnO nanorods array with high quality on the AZO-deposited glass by aqueous solution method , both reactants ratio are of equal concentration used in this experiment were Zn(NO3)2 and HMT(1：1 molar ratio). By controlling parameters in the fabrication which mainly adjust the aspect ratio of nanorods, growth mechanism is discussed. Finally, structural and optical properties were analyzed by measurement of X-ray diffraction (XRD) and PL. In the other part of this thesis, the zinc oxide nanorods formed on the upper surface of red-light LEDs. The optical and electrical measurement can be obtaind after we complete all process. We have demonstrated that there was additional 60.9% improvement in the luminous intensity of GaAlInP LED by employing the above method.

    第一章 緒論 1 1-1 研究背景 1 1-2 研究動機 2 第二章 理論基礎與文獻回顧 4 2-1 氧化鋅薄膜 4 2-1-1 氧化鋅薄膜之電特性 4 2-1-2 氧化鋅薄膜之光特性 5 2-2 AZO薄膜之特性 6 2-3 LED發光效率與表面粗化 6 2-3-1 LED發光效率 7 2-3-2 Fresnel反射 8 2-3-3 司乃耳定律(Snell,s Law)與表面粗化 11 2-4 氧化鋅奈米柱之合成方法 13 2-4-1 水溶液法合成氧化鋅奈米柱 13 2-4-2 水溶液法合成一維氧化鋅奈米結構之理論架構 17 2-4-3 一維奈米柱成長機制 17 第三章 實驗方法與步驟 33 3-1 實驗架構 33 3-2 實驗耗材 34 3-2-1 藥品 34 3-2-2 基材 34 3-3 實驗設備 34 3-3-1 射頻濺鍍機 34 3-3-2 蒸鍍機 36 3-4 量測儀器 36 3-4-1 霍爾量測儀 36 3-4-2 掃描式電子顯微鏡 37 3-4-3 X光繞射分析儀 38 3-4-4 光激發光光譜儀 38 3-4-5 原子力顯微鏡 39 3-4-6 發光二極體測試儀 39 3-5 實驗步驟 39 3-5-1 基板清洗步驟 39 3-5-2 種晶層之製程 41 3-5-3 水溶液法實驗流程 41 3-6 將氧化鋅奈米柱應用於紅光LED上 42 3-6-1 紅光LED晶片的準備 42 3-6-2 晶片清洗 42 3-6-3 種晶層之成長 43 3-6-4 水溶液法實驗流程 44 3-6-5 定義電極區 44 3-6-6 n型與P型電極的沉積 44 第四章 結果與討論 54 4-1 氧化鋅摻鋁薄膜之分析 54 4-1-1表面形貌分析 54 4-1-2微結構分析 54 4-1-3 光激發光特性分析 55 4-1-4 電性分析 56 4-2 氧化鋅奈米柱之分析 56 4-2-1 表面形貌分析 56 4-2-1-1 反應物濃度對奈米柱的影響 56 4-2-1-2 成長溫度對奈米柱的影響 59 4-2-1-3 成長時間對奈米柱的影響 61 4-2-2 微結構分析 63 4-2-2-1 反應物濃度對奈米柱的影響 63 4-2-2-2 成長溫度對奈米柱的影響 63 4-2-2-3 成長時間對奈米柱的影響 63 4-2-3 光激發特性分析 64 4-2-3-1 反應物濃度對奈米柱的影響 64 4-2-3-2 成長溫度對奈米柱的影響 65 4-2-3-3 成長時間對奈米柱的影響 66 4-3 氧化鋅奈米柱應用於紅光LED上 67 4-3-1 在紅光LED上成長氧化鋅奈米柱 67 4-3-2 粗化對LED效率之影響 68 第五章 結論 102 第六章 未來研究方向 104 參考文獻 105

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