摘要
本實驗使用ITO奈米粉末，及偶聯劑型分散劑(TODS)進行分散，再利用甲基纖維素進行增稠，配製成金屬氧化物漿料，並利用網版印刷進行薄膜網印，完成後的薄膜經過第一階段預燒以及第二階段熱處理完成具有導電性與透光性的ITO薄膜。ITO薄膜大量應用在光電產業，目前大多使用真空製程進行製備，為了開發低成本方式製備ITO薄膜，本研究嘗試利用網版印刷技術進行薄膜之製備。
本研究分成三個部分，第一部分為ITO漿料之製備；第二部分為ITO薄膜其電特性探討，藉由不同氣氛與燒結時間進行測試；第三部分則是把ITO薄膜應用在太陽能電池，針對其電流特性進行實驗與探討分析，並進行不同燒結方式與不同基版結構等測試，其效率可達0.87％；藉由晶種層的輔助更可使效率提高至3.6％。

Traditional ITO thin film was manufactured by vacuum method, but the process cost intensively. Although the non-vacuum technique’s resistivity is still high, this way provides a cost-down direction to develop. In this study, we used coupling-agent and ball-milling to disperse ITO nanopowder, and completed the thin film by screen-printing. After pre-curing step and annealing step, we got the best conductivity and transparency. We used the thin film on the p type silicon to be the n layer or carrier transforming layer. The first structure was ITO(n)/p type silicon, and the efficiency was almost 0％. By the annealing step, some organic matters became COx and made pores on the film’s surface. The bad surface situation would increase resistivity and decrease the transparency, so we cannot get enough right current. According to this situation, we sputtered a 10nm ITO on the silicon to be seed layer and then printing our ITO film. This way helped the non-vacuum manufactured ITO film become more compact and decrease the pores. The best efficiency was 3.6％.

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