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研究生: 陳延昌
Chan, Yan-chang
論文名稱: 應用幾何校正於條紋反射法作物體外貌量測
Application of Geometric Correction to the Fringe Reflection Method for Object Profile Measurement
指導教授: 陳元方
Chen, Yuan-Fang
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年: 2008
畢業學年度: 96
語文別: 中文
論文頁數: 106
中文關鍵詞: 外貌量測條紋反射法形狀函數幾何校正有限元素法
外文關鍵詞: Geometric Correction, Finite-Element Theory, Shape Function, Fringe Reflection Method, Profile Measurement
相關次數: 點閱:190下載:32
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  • 本研究主要目的是利用影像幾何校正於條紋反射法,透過幾何校正將受扭曲之影像修正近似與實際幾何形狀相同,以降低因幾何形狀不同所造成量測上誤差。
    首先以有限元素法中形狀函數之特性,建立失真影像幾何形狀之數學模型。再由校正板透過影像處理,計算出黑點面積形心之位置,接著透過虛擬反矩陣(pseudo-inverse)獲得幾何轉換因子,並利用牛頓迭代法及影像灰階填補以重建校正後影像。本文應用四種幾何形狀誤差分析,在準確度考量下二次項轉換可達到所有誤差在0.5 個像素以內。
    應用於條紋反射法上,實驗結果與形貌量測儀進行驗證比對以驗證正確性。比較影像校正前後之實驗量測值,可知經影像幾何校正法後可降低量測上誤差。

    The main purpose of this thesis is to apply image correction to fringe reflection method. Geometric correction could both modify distortion images closely back to the original geometric shape and reduce the measure error cause by geometric differences.
    First, we establish the mathematic model of the distortion geometric shape according to the characteristics of the shape function in finite-element theory. Then the position of black spot center is calculated through the image process of correction plate. At last, we can obtain geometric transfer factor with pseudo-inverse, and reconstruct the modified image with Newton’ iteration method and gray level image in-paint. Four geometric shape error analysis are introduced in this thesis. In the consideration of accuracy, quadratic
    transformation can reach the total error within 0.5 pixel.
    Applying to fringe reflection method, we compare the experiment result with surface roughness measuring instrument to testify the accuracy. Contrast the experiment data of the image before and after the correction, we can realize that the image geometric correction can reduce the measurement error.

    中文摘要.......................................I 英文摘要......................................II 致謝.........................................III 目錄..........................................IV 圖目錄.......................................VII 表目錄.......................................XII 符號說明.....................................XIV 第一章 緒論....................................1 1-1 研究背景..................................1 1-2 研究目的..................................2 1-3 文獻回顧..................................2 1-3-1 有限元素法之影像幾何校正................2 1-3-2 條紋反射法..............................3 1-4 本文架構..................................5 第二章 影像平面上幾何校正......................7 2-1影像平面之幾何轉換.........................7 2-1-1 建立失真影像之數學模型..................7 2-1-2 雙線性轉換.............................13 2-1-3 二次項轉換.............................15 2-2 校正板上黑點影像前處理及計算其面積形心...20 2-2-1 校正板上黑點影像前處理.................20 2-2-2 計算校正板上黑點面積形心...............23 2-3 求取影像幾何轉換因子及影像灰階填補.......28 2-3-1求取影像幾何轉換因子....................28 2-3-2 影像空格灰階填補.......................33 2-3-3 以牛頓法求解影像幾何校正之非線性方程組.34 2-4 影像幾何校正之幾何誤差分析及比較評估.....39 第三章 條紋反射法及分析條紋影像...............53 3-1 條紋反射法之原理概述.....................53 3-2 條紋反射法...............................56 3-2-1 縱向條紋偏移公式.......................56 3-2-2 橫向條紋偏移公式.......................60 3-3 相位移法.................................64 3-4 相位展開法...............................65 3-5 相位遮罩法...............................65 第四章 實驗裝置、試件介紹及實驗流程...........69 4-1 條紋反射法實驗裝置介紹...................69 4-2 量測試件及形貌量測儀介紹.................70 4-2-1 表面鍍上 Ti之矽晶圓試件.形貌量測儀.....71 4-3 實驗流程.................................72 第五章 實驗結果與討論.........................80 5-1 旋轉晶圓於不同方位量測其外貌評估.........80 5-2 以不同方位傾斜角量測晶圓外貌評估.........87 5-3 改變晶圓外貌高度位置之量測評估...........94 第六章 結論與建議............................101 6-1結論.....................................101 6-2建議.....................................102 參考文獻.....................................103

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