雷射的精度及穩定性不僅會受到外在環境的影響，也會受本身結構、熱源、輸入源等因素影響而產生四個自由度的擾動。為了改善雷射擾動問題以提升光源品質，本論文提出一套具四自由度的FSM主動式雷射光源補償系統，針對光學鏡組部分設計一創新的四自由度補償鏡組，除了改善市售補償系統具有元件數量較多、光路徑較長等缺點，更進一步改善了前人提出以double Porro prisms作為四自由度補償稜鏡會有對雷射之靈敏度過高的缺點。本論文設計之稜鏡在保有可調控雷射兩個平移及兩個角度共四自由度的特性下降低對雷射的靈敏度，藉此提升系統調控雷射的解析度。
本論文利用光學模擬軟體Zemax建立系統整體架構，首先評估系統特性與鏡組補償功能，並與double Porro prisms比較鏡組對雷射之靈敏度關係，接著利用歪斜光線追跡法與齊次座標轉換建立補償鏡組之數學模型，分析鏡組對雷射的靈敏度關係，最後以LabVIEW建立系統閉迴路演算法與人機介面整合，並依照模擬參數將此系統之架構完整建置於光學桌上進行實驗，觀察雷射經過鏡組補償前後的差異，其量測結果證明本系統補償雷射擾動之有效性。

The accuracy and stability of the laser are not only affected by the external environment, but also by its structure, thermal issue, and input, etc., resulting in fluctuations of four degrees of freedom (4-DOF). To solve the laser fluctuations problem to enhance light source quality, this thesis proposes a 4-DOF FSM active laser compensation system. An innovative 4-DOF compensation prism is designed against optical parts. In addition to improving the disadvantages of the commercially available compensation systems, such as a larger number of components and longer optical paths, the proposed system has further enhanced the shortcoming of high sensitivity to the laser by using double Porro prisms as 4-DOF compensation prisms proposed by the predecessor. The prism proposed in this thesis reduces the sensitivity to the laser while maintaining two translations and two rotations in 4-DOF control characteristic for laser, thereby improving the resolution of the system to control the laser.
In this thesis, we use Zemax, an optical simulation software, to build the overall system, evaluate the system characteristics and the compensation function of the prism. Compare the sensitivity of the prism to laser with double Porro prisms, and then use the skew-ray tracing method and homogeneous coordinate to build the mathematical model of the compensation prism, and analyze the sensitivity of the prism to the laser. Finally, establish the closed-loop algorithm and human-machine interface by LabVIEW. The system was completely built on the optical table according to the simulation parameters for experiments, compare the results between the laser before and after compensation by the prism. The measurement results show the effectiveness of this system for laser fluctuations compensation.

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