| 研究生: |
黃鼎倫 Huang, Ting-lun |
|---|---|
| 論文名稱: |
自組性聚合物週期結構的製程之研究 Fabrication of self-assembly periodic structure using electric field induced polymer instability |
| 指導教授: |
張允崇
Chang, Yun-Chorng |
| 學位類別: |
碩士 Master |
| 系所名稱: |
理學院 - 光電科學與工程研究所 Institute of Electro-Optical Science and Engineering |
| 論文出版年: | 2007 |
| 畢業學年度: | 95 |
| 語文別: | 中文 |
| 論文頁數: | 69 |
| 中文關鍵詞: | 奈米柱 、週期結構 |
| 外文關鍵詞: | nano-pillar, periodic structure |
| 相關次數: | 點閱:138 下載:2 |
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聚合物薄膜在外加高電場的狀況下,且溫度高於聚合物本身的玻璃轉移溫度(Tg)時,由於電流體力學的擾動現象,會自行生成奈米柱結構的二維週期結構。在本論文中,將深入研究自組性聚合物週期結構的製程技術,利用調變時間、間距膜厚比、二板間距、膜厚、溫度等不同的環境條件,使得所形成的二維週期結構能有更均勻的奈米柱柱徑、柱與柱間距,以期運用於光子晶體的應用。
研究結果顯示,奈米柱柱徑可用間距膜厚比及溫度來調變,隨著間距膜厚比越大、溫度越低(需高於Tg),柱徑會越小,而柱與柱間距與密度則可用二板間距、膜厚來調變,隨著二板間距越低或膜厚越厚,將可拉近柱與柱間距以加大密度,但二板間距若過低時,會造成結構生長空間不足而使得結構反應不完全,在膜厚過厚上,也會使得反應生成時間加大,易造成結構的不完全,經由上述的參數進行調變,在柱徑大小介於5m及800nm之間。而在最密排列上,最密可達1.6 x 109 1/cm2。除此之外,此一結構也可做為光罩來製作奈米洞陣列。同時在適當的調變實驗參數的情況下,也可以觀察到許多不同的圖案。另外一方面,由於聚合物有被拉高的現象,因此進一步希望能研究一個被拉高的平面光波導是否入射光在波導中的垂直方向上與水平方向上的光折射係數會不同,在本論文也提出一些初步成果。
High electric field induces instability of the polymer thin film when the temperature exceeds the glass transition temperature of the polymer. Two-dimensional periodic structures in the form of nano-pillar array are fabricated. A periodic structure with uniform pillar diameter and period is crucial for the photonic crystal applications. Therefore, the effects from the environment including the processing time, the film thickness, the spacing between the electrodes and the ambient temperature, are systematically analyzed in this dissertation.
Results from the experiments reveal that the diameter of the pillars can be altered by changing both the ratio between the spacer thickness to the film thickness and the ambient temperature. The diameter of pillars becomes smaller at a higher ratio value and a lower ambient temperature. The pillar density can be increased by decreasing the spacer thickness or by increasing the film thickness. However, too thin a film results in an incomplete pillar structure due to the lack of space for the process to continue. If film thickness is too thick, the time it takes to fully develop pillar structures is going to be very long. By carefully choosing the environmental parameters, periodic pillar structures with 5m to 800nm of diameters can be obtained. The density of the pillars is about 1.6 x 109 1/cm2. In addition, the periodic pillar arrays can be used as a mask to produce periodic metal hole arrays. Various interesting polymer patterns can also be observed by controlling the experimental conditions. Due to the fact that the polymer is been stretched in the vertical direction, it is interesting to study if the index of refraction is different along the vertical and horizontal directions of the polymer. Some preliminary results to fabricate planar waveguides with such stretched polymer are also presented in the context.
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