摘 要
本論文的目的在利用微機電製程技術，製作出一直立式可旋轉微光學鏡片。主要使用SOI晶片作為材料，利用控制蝕刻犧牲層時間的方式使矽結構懸浮，配合BCB光阻之再流動特性作為三維鏡片的自動組裝方式，完成直立式的微光學鏡片，再利用靜電力梳形致動器使鏡片旋轉。微光學鏡片以及致動器部分都在同一層矽結構製作完成，因此整個過程只需要兩道光罩即可，大幅減少微光學鏡片製作的複雜性。
研究的重點在於使鏡片旋轉的方式，包含了不同的旋轉彈簧以及靜電力梳形致動器的設計：一種是“吸附式”旋轉微鏡片，利用靜電力致動器直接帶動鏡片懸浮結構使其旋轉；另一種是“推壓式”旋轉微鏡片，利用靜電力致動器帶動桿件由兩側同時推擠鏡片懸浮結構使其旋轉。
最後經由測試探討不同設計之直立式微光學鏡片的旋轉情形，未來可將其實際應用於微光機電系統上。

Abstract
The purpose of this research is to fabricate a vertical tunable micro mirror by using the MEMS technology. We use SOI wafer and a two-mask process. By a timed etching process, the mirror is patterned and released. Finally the vertical micro mirror is self-assembly by reflow property of the BCB photo-resist, and then the comb-drive is DC activated to tune the vertical mirror. In order to reduce the complication of the process, all the components of the device are integrated onto the structure layer of the SOI wafer, and therefore only two masks are needed.
The key point of this research is how to rotate the mirror. There are two different rotation modes. One is “the pull-mode” that the comb-drive will move along a curved path and directly rotate the mirror; another is “the push-mode” that the comb-drive will push the mirror with a shuttle from both sides of the mirror. These two different designs defer not only the push-pull characters, but also the use of different spring design.
The rotation angle of the tunable vertical micro mirror is reported, and the application of such mirror in the micro-optic-electric-mechanical system will remain.

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