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研究生： 阮文成
Nguyen, Van Thanh
論文名稱： CVD單層石墨烯於化學電阻式pH感測器之應用
CVD single layer graphene for chemo-resistor pH sensors
指導教授： 丁志明
Ting, Jyh-Ming
學位類別： 碩士
Master
系所名稱： 工學院 - 尖端材料國際碩士學位學程
International Curriculum for Advanced Materials Program
論文出版年： 2017
畢業學年度： 105
語文別： 英文
論文頁數： 97
外文關鍵詞： graphene, chemo-resistor sensors, LPCVD, pH detection
相關次數： 點閱：90  下載：14 
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    • Graphene has been deposited using low-pressure chemical vapor deposition (LPCVD) on metallic substrates (nickel and copper foils) under different deposition times, gas mixtures, and temperatures. Optical microscopy, Raman spectroscopy, scanning electron microscopy, X-ray photoelectron spectroscopy and atomic force microscopy were used to investigate the characteristics of the obtained graphene. For chemo-resistor pH sensor fabrication, two gold electrodes were deposited on Si/SiO2 substrates using a thermal evaporation method. The different graphene films were then transferred onto the gold-deposited substrate for use as the sensor. Buffer solutions having pH values varying from 4 to 11 were used. The highest sensitivity of the sensor is 1.92 kΩ.pH-1.
    Also, two ways fabricated nitrogen-doped graphene: post growth doping on copper foils and doping after transfer with the assistance of ammonia. The crystallinity and properties of graphene were changed by the different amount of nitrogen doped. The nitrogen-doped graphene samples applied for chemo-resistor pH sensors as the sensing layers showed remarkable properties. Due to the simple structure and chemical stability, chemo-resistor sensor based on graphene and nitrogen-doped graphene is a highly promising candidate for micro and nanoscale applications.

    ACKNOWLEDGEMENTS i ABSTRACT iii LIST OF FIGURES vi LIST OF TABLES xii CHAPTER I – INTRODUCTION OF GRAPHENE 1 1.1. Briefly history of graphene 1 1.2. Structure and properties of graphene 4 1.3. Motivation of study 11 CHAPTER II – LITERATURE REVIEWS 12 2.1. Synthesis of graphene 12 2.2. Theory of CVD growth graphene and transfer process 16 2.2.1. CVD graphene 16 2.2.2. Transfer processes 21 2.3. Nitrogen-doped graphene 24 2.4. Overview and characterization techniques 26 2.4.1. Optical microscope 27 2.4.2. Raman spectroscopy 28 2.4.3. Atomic force microscopy 31 2.4.4. Scanning electron microscopy 32 2.4.5. X-ray photoelectron spectroscopy 32 2.5. pH and pH sensors 33 2.6. Graphene-based chemo-resistor sensors 35 CHAPTER III – EXPERIMENTAL SECTION 38 3.1. The experimental process and equipment 38 3.1.1. The CVD system 38 3.1.2. Experimental materials 40 3.1.3. Metallic substrates using electropolishing method 41 3.2. CVD graphene films and transferred process 43 3.2.1. CVD graphene process 43 3.2.2. Transferred process 45 3.3. Nitrogen-doped graphene procedures 46 3.3.1. Post-growth doping on Cu foils 47 3.3.2. Doping after transfer 48 3.4. Characterization of graphene 49 3.5. Fabrication of chemo-resistor pH sensors and measurements 51 CHAPTER IV – RESULT AND DISCUSSION 52 4.1. CVD single layer graphene 52 4.1.1. Graphene growth parameters 52 4.1.2. Graphene growth on Ni foils 53 4.1.3. Graphene growth on Cu foils 55 4.1.4. Chemo-resistor pH sensor based graphene films 66 4.2. Properties of N-doped graphene films 72 4.2.1. N-doped graphene by post growth doping on Cu 72 4.2.2. N-doped graphene by doping after transfer 75 4.2.3. Chemo-resistor pH sensors from N-doped graphene 85 CHAPTER V – CONCLUSION 92 REFERENCES 93

    1. Yazdi, G.R., et al., Epitaxial Graphene on SiC: A Review of Growth and Characterization. Crystals, 2016. 6(5).
    2. Wallace, P.R., The Band Theory of Graphite. Physical Review, 1947. 71(7): p. 476-476.
    3. Oshima, C., et al., Ultra-thin epitaxial films of graphite and hexagonal boron nitride on solid surfaces. Journal of Physics-Condensed Matter, 1997. 9(1): p. 1-20.
    4. Novoselov, K.S., et al., Electric field effect in atomically thin carbon films. Science, 2004. 306(5696): p. 666-669.
    5. Novoselov, K.S., et al., Two-dimensional gas of massless Dirac fermions in graphene. Nature, 2005. 438(7065): p. 197-200.
    6. Kuila, T., et al., Chemical functionalization of graphene and its applications. Progress in Materials Science, 2012. 57(7): p. 1061-1105.
    7. Geim, A.K. and K.S. Novoselov, The rise of graphene. Nature Materials, 2007. 6(3): p. 183-191.
    8. Castro Neto, A.H., et al., The electronic properties of graphene. Reviews of Modern Physics, 2009. 81(1): p. 109-162.
    9. Mayorov, A.S., et al., Micrometer-Scale Ballistic Transport in Encapsulated Graphene at Room Temperature. Nano Letters, 2011. 11(6): p. 2396-2399.
    10. Deokar, G., et al., Towards high quality CVD graphene growth and transfer. Carbon, 2015. 89: p. 82-92.
    11. Lee, S.K., et al., Graphene: an emerging material for biological tissue engineering. Carbon Letters, 2013. 14(2): p. 63-75.
    12. Nair, R.R., et al., Fine structure constant defines visual transparency of graphene. Science, 2008. 320(5881): p. 1308-1308.
    13. Bonaccorso, F., et al., Production and processing of graphene and 2d crystals. Materials Today, 2012. 15(12): p. 564-589.
    14. Lei, N., et al., Simple graphene chemiresistors as pH sensors: fabrication and characterization. Measurement Science and Technology, 2011. 22(10).
    15. Yi, M., et al., A review on mechanical exfoliation for the scalable production of graphene. Journal of Materials Chemistry A, 2015. 3(22): p. 11700-11715.
    16. Ostler, M., et al., Buffer layer free graphene on SiC(0001) via interface oxidation in water vapor. Carbon, 2014. 70: p. 258-265.
    17. Qi, Y., et al., Epitaxial Graphene on SiC(0001): More than Just Honeycombs. Physical Review Letters, 2010. 105(8).
    18. Wee, A.T.S., et al., Molecular interactions on epitaxial graphene. Physica Scripta, 2012. T146.
    19. Tu, Z.Q., et al., Controllable growth of 1-7 layers of graphene by chemical vapour deposition. Carbon, 2014. 73: p. 252-258.
    20. Zaifuddin, N.M., et al., pH Sensor Based on Chemical-Vapor-Deposition-Synthesized Graphene Transistor Array. Japanese Journal of Applied Physics, 2013. 52(6).
    21. Huang, L., et al., Synthesis of high-quality graphene films on nickel foils by rapid thermal chemical vapor deposition. Carbon, 2012. 50(2): p. 551-556.
    22. Chen, L.F., et al., Growth of Uniform Mono layer Graphene Using Iron-Group Metals via the Formation of an Antiperovskite Layer. Chemistry of Materials, 2015. 27(24): p. 8230-8236.
    23. Nam, J., et al., Chemical vapor deposition of graphene on platinum: Growth and substrate interaction. Carbon, 2017. 111: p. 733-740.
    24. Cushing, G.W., et al., Graphene Growth on Pt(111) by Ethylene Chemical Vapor Deposition at Surface Temperatures near 1000 K. Journal of Physical Chemistry C, 2015. 119(9): p. 4759-4768.
    25. Novoselov, K.S., et al., A roadmap for graphene. Nature, 2012. 490(7419): p. 192-200.
    26. Li, X.S., et al., Synthesis of Graphene Films on Copper Foils by Chemical Vapor Deposition. Advanced Materials, 2016. 28(29): p. 6247-6252.
    27. Li, X.S., et al., Evolution of Graphene Growth on Ni and Cu by Carbon Isotope Labeling. Nano Letters, 2009. 9(12): p. 4268-4272.
    28. Bae, S., et al., Roll-to-roll production of 30-inch graphene films for transparent electrodes. Nature Nanotechnology, 2010. 5(8): p. 574-578.
    29. Li, X.S., et al., Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils. Science, 2009. 324(5932): p. 1312-1314.
    30. Polat, E.O., et al., Synthesis of Large Area Graphene for High Performance in Flexible Optoelectronic Devices. Scientific Reports, 2015. 5.
    31. Wei, D.C., et al., Synthesis of N-Doped Graphene by Chemical Vapor Deposition and Its Electrical Properties. Nano Letters, 2009. 9(5): p. 1752-1758.
    32. Chen, Y., et al., Progress and Challenges in Transfer of Large-Area Graphene Films. Advanced Science, 2016. 3(8).
    33. Wang, H.B., et al., Review on Recent Progress in Nitrogen-Doped Graphene: Synthesis, Characterization, and Its Potential Applications. Acs Catalysis, 2012. 2(5): p. 781-794.
    34. Reddy, A.L.M., et al., Synthesis Of Nitrogen-Doped Graphene Films For Lithium Battery Application. Acs Nano, 2010. 4(11): p. 6337-6342.
    35. Singh, V., et al., Graphene based materials: Past, present and future. Progress in Materials Science, 2011. 56(8): p. 1178-1271.
    36. Malard, L.M., et al., Raman spectroscopy in graphene. Physics Reports-Review Section of Physics Letters, 2009. 473(5-6): p. 51-87.
    37. Hung, Y.J., et al., Characterization of graphene edge functionalization by grating enhanced Raman spectroscopy. RSC Advances, 2016. 6(15): p. 12398-12401.
    38. Liu, Y.P., et al., Temperature dependence of the electrical transport properties in few-layer graphene interconnects. Nanoscale Research Letters, 2013. 8.
    39. Surwade, S.P., et al., Thermal Oxidation and Unwrinkling of Chemical Vapor Deposition-Grown Graphene. Journal of Physical Chemistry C, 2012. 116(38): p. 20600-20606.
    40. Lee, J., et al., Scanning electron microscopy characterization of structural features in suspended and non-suspended graphene by customized CVD growth. Diamond and Related Materials, 2015. 54: p. 64-73.
    41. Papis-Polakowska, E., et al., X-Ray Photoelectron Spectroscopy - Methodology and Application. Acta Physica Polonica A, 2014. 125(4): p. 1061-1064.
    42. Qin, Y.H., et al., Microfabricated electrochemical pH and free chlorine sensors for water quality monitoring: recent advances and research challenges. RSC Advances, 2015. 5(85): p. 69086-69109.
    43. Lee, W.S., et al., Hierarchically Structured Suspended TiO2 Nanofibers for Use in UV and pH Sensor Devices. Acs Applied Materials & Interfaces, 2014. 6(15): p. 12189-12195.
    44. Lei, K.F., et al., Fabrication of carbon nanotube-based pH sensor for paper-based microfluidics. Microelectronic Engineering, 2012. 100: p. 1-5.
    45. Yang, G., et al., Electropolishing of surfaces: theory and applications. Surface Engineering, 2017. 33(2): p. 149-166.
    46. Mattevi, C., et al., A review of chemical vapour deposition of graphene on copper. Journal of Materials Chemistry, 2011. 21(10): p. 3324-3334.
    47. Yang, T., et al., A simple preparation method for large-area, wavy graphene oxide nanowalls and their application to freely switchable impedimetric DNA detection. RSC Advances, 2013. 3(44): p. 22430-22435.
    48. Ang, P.K., et al., Solution-Gated Epitaxial Graphene as pH Sensor. Journal of the American Chemical Society, 2008. 130(44): p. 14392-+.
    49. Heller, I., et al., Influence of Electrolyte Composition on Liquid-Gated Carbon Nanotube and Graphene Transistors. Journal of the American Chemical Society, 2010. 132(48): p. 17149-17156.
    50. Lee, D., et al., pH-dependent conductance behaviors of layer-by-layer self-assembled carboxylated carbon nanotube multilayer thin-film sensors. Journal of Vacuum Science & Technology B, 2009. 27(2): p. 842-848.
    51. Pirkle, A., et al., The effect of chemical residues on the physical and electrical properties of chemical vapor deposited graphene transferred to SiO2. Applied Physics Letters, 2011. 99(12).
    52. Zafar, Z., et al., Evolution of Raman spectra in nitrogen doped graphene. Carbon, 2013. 61: p. 57-62.
    53. Lv, R., et al., Nitrogen-doped graphene: beyond single substitution and enhanced molecular sensing. Scientific Reports, 2012. 2.
    54. Cui, Y., et al., Impact of Carboxyl Groups in Graphene Oxide on Chemoselective Alcohol Oxidation with Ultra-Low Carbocatalyst Loading. Scientific Reports, 2017. 7.
    55. Choi, Y.R., et al., Role of oxygen functional groups in graphene oxide for reversible room-temperature NO2 sensing. Carbon, 2015. 91: p. 178-187.
    56. Mehmood, F., et al., Journal of Physical Chemistry C, 2013. 117(20): p. 10366-10374.

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