逆物流活動漸漸在各企業產業供應鏈中扮演舉足輕重的地位，企業必須在經濟與環境考量間取得一個平衡點，其中逆物流中的回收活動更是重要的一環。過往文獻大多討論顧客使用後產品回收之逆物流；但隨著產業特性的不同，金屬與化學研磨液等相關產業其回收料不是來自回收終端顧客產品；因其產業特性使得生產後會產出殘餘的廢料，而廢料仍具有高價值元素，能作回收利用，此回收料稱作再生物料。如能有效利用此再生物料不但可降低對環境的負面影響，也可為公司帶來正面的經濟效益。

本研究以半導體製產業之研磨液供應為研究對象，站在半導體製造業者角度，探討製造商之研磨液訂購策略，納入(1)「批發型」與「預約產能型」兩種訂購模式，(2) 「原物料」與「混合物料」（原物料及再生物料）兩種物料採購機制，在期望利潤最大化下比較不同策略的優劣。

在需求必須滿足的前提下，「批發型」訂購模式為需求公布前決定訂購數量，並於需求公布後，買進訂購之物料；「預約產能」訂購模式為需求公布前決定預約產能並付出預約成本，於需求公布後，依實際需求狀況決定買進數量。在物料採購機制方面，模型一為純原物料模型，製造商使用原物料進行高、低階產品的生產；模型二為混合物料模型，低階需求可用廢料回流之再生物料進行生產，此生產良率低於原物料生產之良率。

研究結果發現，良率影響利潤的程度比回流比例高，因此建議製造商優先投入資源改善再生物料生產良率。在訂購策略方面，當批發與加購成本相對高時，建議使用預約產能型；但當預約成本相對高時，預約的負面效應大於超額訂購與缺額訂購成本，建議製造商選擇批發型訂購模式。在物料採購機制方面，採購再生物料進行低階生產，可降低需求不確定性，當良率技術水準高與再生物料採購成本低時，選擇混合物料採購機制可改善製造商利潤。

Reverse logistics has become increasingly important in supply chain management. Most of the previous studies on reverse logistics focused on products recycled from customers; however, this thesis discusses recycled materials from the waste during manufacturing processes.

This study investigates how a semiconductor manufacturer decides the optimal ordering strategy of slurry. The ordering strategies to be considered include: (1) wholesale ordering mode and capacity reservation mode, and (2) pure and mixed materials mechanisms. In the wholesale ordering mode, the manufacturer decides the order quantity of raw materials before demand is realized. In the capacity reservation mode, the manufacturer decides the reserved capacity of raw materials before demand is realized. Furthermore, with the pure materials mechanism, the manufacturer uses raw materials in both high- and low-end processes, and with the mixed materials mechanism, the manufacturer can use raw materials and recycled materials in the low-end process, but has to use raw materials in the high-end process. It should be noted that in low-end process and, recycled materials have a lower yield rate than raw materials.

The numerical analysis revealed that the yield rate has more significant impact on the manufacturer’s profit than the return rate of recycled materials does. Moreover, the capacity reservation mode is preferred when the wholesale cost and expedited ordering cost are relatively high. Furthermore, the mixed materials mechanism is preferred when the yield rate is relatively high and the recycled materials cost is relatively low.

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