本研究是利用微機電系統（MEMS）製程技術研發整合陣列式微溫度感測器及微加熱器之微薄膜冷卻晶片，並採用薄膜加熱法（Film Heating），在不同吹洩比（Blowing Ratio）下，探討微觀下之薄膜冷卻效益。
微薄膜冷卻晶片方面，採用摻雜硼離子之多晶矽作為微溫度感測器，並以所需間距分佈於量測壁面，其中微溫度感測器之線寬為10μm，且溫度感測器之解析度可達83Ω/℃，因此可用於準確量測局部壁面之溫度變化。此外微加熱器部分採用鈦金屬來製作，經由溫度校正驗後證可
得電阻－溫度特性曲線之斜率幾乎為零(TCR≒0)，可提供固定熱通量並能均勻加熱整個量測壁面。而微噴流槽口結構則是以 SU-8 負型厚膜光阻來製作，除了其具有良好之絕熱性以外，另可輕易變化各種不同高度，然而，晶片中所使用之材料，如玻璃基材、壓克力材料等，均為絕熱性良好之材料。因此，微薄膜冷卻晶片具有良好的絕熱性，能有效的控制晶片量測系統熱損失所造成之誤差，進而得到準確之量測數據。
不過實驗量測過程中卻發現，由於蓋板厚度與微噴流槽口高度比值過大，主流場流過蓋板時，有渦流產生，使得微噴流結構受破壞，導致冷卻效益極差。將實驗結果與理論值及Ko and Liu之實驗值做比較，可發現實驗量測到的冷卻效益值偏低，而在改善蓋板厚度後，冷卻效益亦有所改善。

Fabrication of micro film cooling chip which integrated with an array of micro temperature sensors and a micro heater by MEMS technology was developed. And the film heating method is used to discuss the micro-scale film cooling effectiveness at different blowing ratios.
The fabrication of film cooling chip device, poly-silicon doped with Boron ion is used as the micro temperature sensor. The micro temperature sensors have the width of 10μm and are distributed along the measured wall. The resolution of micro temperature sensor is 83Ω/℃ can be, so it can use to measure accurately the local temperature distribution of the wall. In addition, the micro heater is fabricated by the titanium metal , demonstrates the chip after temperature calibration to obtain a relative of the resistance and temperature characteristic curve ,and show the TCR is almost zero, so it can be used to provide constant heat flux and can evenly heat up the entire wall .And the structure of micro jet slot is fabricated by SU-8 negative tone

photoresist that has good adiabatic property and also can easily change the film thickness. And the materials used in the chip, for example, glass Substrate and PMMA, all are good adiabatic property material. So the film cooling chip has good adiabatic property, and it can effectively control the error which was created by the chip system heat loss to obtain the accurate data.
But during the experimental process we can find that the film jet structure destroyed by mainstream flow because the ratio of slot lip thickness and slot height is oversized, and it causes the cooling effectiveness bad. After Comparing the result to Ko and Liu’s result, it can be found that the experimental result is lower. But after improving the slot lip thickness, the cooling effectiveness has the improvement.

[1] Simoneau, R. J. and Simon, F. F., “Progress towards Understanding and Predicting Heat Transfer in the Turbine Gas Path,” Int J. Heat and Fluid Flow, Vol.14, No. 2, pp.106-128, 1993.
[2] Goldstain, R.J., “Film Cooling,”, in Advances in Heat Transfer, Vol.7 pp.321-379, Academic Press N.Y., 1971.
[3] Lefebvre, A.H., “Gas Turbine Combustion”, Hemisphere Publishing Corp. pp.286-320, 1983.
[4] Chen, S.J. and Fu-Kang Tsou, “Experimental Studies of Injection-Stream Turbulence on Film Cooling Using a Short-Duration Technique”, ASME 86-WA/HT-47, 1986.
[5] Ko, S.Y. and Liu, D.Y., “Experimental Investigations on Effectiveness, Heat Transfer Coefficient, and Turbulence of Film Cooling”, AIAA J. Vol.18, No.8 pp.907-912, 1980.
[6] Nina, M.N.R. and Whitelaw, J.H., “The Effectiveness of Film Cooling with Three-Dimensional Slot Geometries”, ASME J. of Eng. For Power, Vol.93 pp.425-430, 1971.
[7] Hartnett, J.P., Birkebak, R.C. and Eckert, E.R.G., “Velocity Distributions, Temperature Distributions, Effectiveness and Heat Transfer for Air Injected through a Tangential Slot into a Turbulent Boundary Layer”, J. of Heat Transfer, Vol.83 pp.293-306, 1961.
[8] Seban, R. A. and Back, L. H., “Effectiveness and Heat Transfer for a Turbulent Boundary Layer with Tangential Injection and Variable Free Stream Velocity”, ASME Journal of Heat Transfer, Vol.84, pp.235, 1962.
[9] Hay, N.D. Lampard and Saluja, C.L., “Effects of the Condition of the Approach Boundary Layer and Mainstream Pressure Gradients on the Heat Transfer Coefficient on Film Cooling Surface”, ASME J. of Engineering for Gas Turbines and Power Vol.170 pp.99-103, 1985.
[10] Moretti, P.M., and Kays, W.M., “Heat Transfer to a Turbulent Boundary Layer With Varying Freestream Velocity and Varying Surface Temperature – an Experimental Study”, J. Heat Mass Transfer, pp.1187-1202, 1965.
[11] Escudier, M.P., and Whitelaw, J.H., “The Influence of Strong Adverse Pressure Gradients on Effectiveness of Film Cooling”, J. Heat Mass Transfer, Vol. 11, pp. 1289-1292, 1968.
[12] Han, Z.X. and Liu, S., Liu, J.J., Zhou, S.J. and Liu, J., "Experimental Research on Film Cooling Characteristics at Different Blowing Ratios", Proceedings of the Chinese Society of Electrical Engineering, Vol.25, pp. 91-96, 2005.
[13] Foster, N.W. and Lampard, D., “Effect of Density and Velocity Ratio on Discrete Hole Film Cooling”, AIAA J., Vol. 13, pp.1112-1114, 1975.
[14] AI-Hamadi, A.K., Jubran, B.A., and Theodoridis, G., "Turbulence Intensity Effects on Film Cooling and Heat Transfer from Compound Angle Holes with Particular Application to Gas Turbine Blades", Energy Conversion and Management, pp.1449-1457, 1998.
[15] Marek, C.J. and Tacina, R. R., “Effect of Free-Stream Turbulence on Film Cooling”, NASA TN D-7958, 1975.
[16] Carlson, L.W. and Talmor, E., “Gaseous Film Cooling at Various Degrees of Hot-Gas Acceleration and Turbulence Levels”, Int. J. Heat Mass Transfer, Vol. 11, pp.1695-1713, 1968.
[17] Kacker, S.C. and Whitelaw, J.H., “An Experimental Investigation of the Influence of Slot-Lip-Thickness on the Impervious-Wall Effectiveness of the Uniform-Density, Two-Dimensional Wall Jet”, J. Heat Transfer, Vol. 12, pp. 1196-1201, 1969.
[18] Kacker, S.C. and Whitelaw, J.H., “The Effect of Slot Height and Slot Turbulence on the Effectiveness of the Uniform-Density, Two-Dimensional Wall-Jet”, J. Heat Transfer, Vol. 90, pp.469-475, 1968.
[19] Sivasegaram, S. and Whitelaw, J.H., “Film Cooling Slots: The Importance of Lip Thickness and Injection Angle”, J. Mech. Eng. Sci., Vol. 11, pp.321-379, 1969.
[20] Taslim, M.E., Spring, S.D. and Mehiman, B. P., "Experimental Investigation of Film Cooling Effectiveness for Slots of Various Exit Geometries", Journal of Thermophysics and Heat Transfer, pp.302-307, 1992.
[21] Hyams, D,G., McGovern, K.T. and Leylek, J. H., "Effects of Geometry on Slot -jet Flim Cooling Performance", ASME, 1996.
[22] Bittinger, G, Schulz, A., and Wittig, S., "Film Cooling Effectiveness and Heat transfer Coefficients for Slot Injection at High Blowing Ratios", American Society of Mechanical Engineers, pp.1-9, 1994.
[23] Thole, K.A., Gritsch, M., Schulz, A., and Wittig, S., “Flow-field Measurements for Film-Cooling Holes with Expanded Exits,” ASME J. Turbomachhinery, Vol. 120, pp.327-336, 1998.
[24] Thole, K. A., Gritsch, M., Schulz, A., and Wittig, S., 1997, “Effect of a Crossflow at the Entrance to a Film-Cooling Hole”, ASME J. Fluids Eng., 119, pp. 533–540.
[25] Rhee, D.H., Lee, Y.S., and Cho, H.H., "Film Cooling Effectiveness and Heat Transfer of Rectangular-Shaped Film Cooling Holes", ASME, International Gas Turbine Institute, Vol. 3, pp. 21-32, 2002.
[26] Ekkad, S. V., Zapata, D., and Han, J. C., "Heat Transfer Coefficients over a Flat Surface With Air and CO2 Injection through Compound Angle Holes Using a Transient Liquid Crystal Image Method", ASME J. Turbomach., 119, pp. 580–586, 1995.
[27] Ammari, H.D., Hay, N., and Lampard, D., “The Effect of Density Ratio on the Heat Transfer Coefficient from a Film-Cooled Flat Plate”, ASME J. of Turbomachinery, Vol. 112, pp.444-450, 1990.
[28] Sinha, A.K., Bogard, D.G., and Crawford, M.E., “Film-Cooling Effectiveness Downstream of a Single Row of Holes with Variable Density Ratio”, ASME J. Turbomachinery, Vol. 113, pp.442-449, 1991.
[29] Mayle, R. E., and Metzger, D. E., "Heat Transfer at the Tip of an Unshrouded Turbine Blade", Proc. Seventh Int. Heat Transfer Conf., Hemisphere Pub., pp. 87–92, 1982.
[30] Seban, R.A., “Heat Transfer and Effectiveness for a Turbulent Boundary Layer with Tangential Fluid Injection”, ASME J. Heat Transfer, 82, pp. 303–312, 1960.
[31] Seban, R. A., and Back, L. H., “Velocity and Temperature Profiles in a Wall Jet”, ASME J. Heat Transfer, Vol.3, pp. 255–265, 1961.
[32] Metzger, D. E., Baltzer, R. T., Takeuchi, D. I., and Kuenstler, P. A., “Heat Transfer to Film Cooled Combustion Chamber Liners”, ASME Paper No. 72-WA/HT-32, 1972.
[33] Gritsch, M., Schulz, A. and Wittig, S., “Film-Cooling Holes with Expanded Exits: Near-hole Heat Transfer Coefficients”, Int. J. Heat and Fluid Flow, Vol. 21, pp.146-155, 2000.
[34] Jung, I. S. and Lee, J. S., “Effects of Orientation Angles on Film Cooling over a Flat Plate: Boundary Layer Temperature Distributions and Adiabatic Film Cooling Effectiveness”, ASME J. Turbomachinery, Vol. 122, pp.153-160, 2000.
[35] Yang, J. T., Tsai, B. B., and Tsai, G. L., “Separated-Reattaching Flow 118 over a Back-step with Uniform Normal Mass Bleed”, J. Fluid Eng., Vol.116, 29-35, 1994.
[36] Cheng, Y. C., Hwang, G. J., and Ng, M. L., “Developing Laminar Flow and Heat Transfer in a Rectangular Duct with One-Walled Injection and Suction”, Int. J. Heat Mass Transfer, Vol.37, 2601-2613, 1994.
[37] Kitamura, K., and Kimura, F., “Heat Transfer and Fluid Flow of Natural
Convection Adjacent to Upward-facing Horizontal Plates”, Int. J. Heat Mass
Transfer, Vol.38, 3149-3159, 1993.
[38] Zubel, I., Kramkowska, M. “The Effect of Isopropyl Alcohol on Etching Rate and Roughness of (1 0 0) Si Surface Etched in KOH and TMAH Solutions”, Sens. Actuators A 93, pp.135-147, 2001.
[39] Obermeier, E., and Kopystynski, P., “Polysilicon as a Material for Microsensor Applications”, Sensors. Actuators A 30, pp. 149-155, 1992.
[40] Liu, C.W. and Gau, C., “Design and Fabrication Development of a Micro Flow Heated Channel with Measurements of the inside Micro-Scale Flow and Heat Transfer Process”, Biosensors and Bioelectronics, Vol. 20, No. 1, pp.91-101, 2004. (EI, SCI)
[41] Shen, C.H. and Gau, C., “Thermal Chip Fabrication with Arrays of Sensors and Heaters for Micro-Scale Impingement Cooling Heat Transfer Analysis and Measurements,” Biosensors and Bioelectronics, Vol. 20, No. 1, pp.103-114, 2004. (EI, SCI)
[42] Http:// www.microchem.com.
[43] Mayle, R. E., and Camarata, F. J., “Mutihole Cooling Film Effectiveness and Heat Transfer,” ASME J. Heat Transfer, 97(2), pp. 534–538, 1975.
[44] Sasaki, M., Takahara, K., Kumagai, T., and Hanano, M., “Film Cooling Effectiveness for Injection From Multirow Holes,” ASME J. Eng. Power, 101(1), pp. 101–108, 1979.
[45] Martiny, M., Schulz, A., and Wittig, S., “Full-Coverage Film Cooling Investigations: Adiabatic Wall Temperatures and Flow Visualization,” ASME Paper No. 95-WA/HT-4, 1995.
[46] Andrews, G. E., Khalifa, I. M., Asere, A. A., and Bazdidi-Tehrani, F., “Full Coverage Effusion Film Cooling with Inclined Holes,” ASME Paper No.95-GT-274, 1995.
[47] Lee, H-W, Park, J. J. and Lee, J. S., “Flow Visualization and Film Cooling Effectiveness Measurements around Shaped Holes with Compound Angle Orientations”, Int. J. Heat and Mass Transfer, Vol. 45, pp.145-156, 2002.
[48] Lutum, E., Wolfersdorf, J. von, Semmler, K., Dittmar, J. and Weigand, B., “An Experimental Investigation of Film Cooling on a Convex Surface Subjected to Favourable Pressure Gradient Flow”, Int. J. Heat and Mass Transfer, Vol. 44, pp.939-951, 2001.
[49] Garg, V. K. and Gaugler, R. E., “Prediction of Film Cooling on Turbine Blade Airfoils”, ASME Paper No. 94-GT-16, 1994.
[50] Garg, V. K. and Gaugler, R. E., “Leading Edge Film-Cooling Effects on Turbine Blade Heat Transfer”, Numerical Heat Transfer, Part A, Vol. 30, pp.165-187, 1996.
[51] Garg, V. K. and Gaugler, R. E., “Effect of Coolant Temperature and Mass Flow on Film Cooling of Turbine Blades”, Int. J. Heat and Mass Transfer, Vol. 40, No. 2, pp.435-445, 1997.
[52] Garg, V. K., “Heat Transfer on a Film-Cooled Rotating Blade”, Int. J. Heat and Fluid Flow, Vol. 21, pp.134-145, 2000.
[53] Garg, V. K., “Modeling Film-coolant Flow Characteristics at the Exit of Showerhead Holes”, Int. J. Heat and Fluid Flow, Vol. 22, pp.134-142, 2001.
[54] Arnone, A., Liou, M. —S. and Povinelli, L. A., “Multigrid Calcu1ation of Three-Dimensional Viscous Cascade Flows,” AIAA Paper 91-3238, 1991.