本研究主要是針對單晶矽太陽能電池在使用非等向性蝕刻後所形成的表面金字塔結構的模型建立與探討表面結構的抗反射及光能吸收的效率，並研究光在不同入射方向時對表面結構影響，計算出光子的吸收能量及反射的損失情形。本研究理論可分為二部分，一部份為建立出三維的表面金字塔結構的形貌及分佈的情形。此為利用金字塔的幾何特性，在表面上建立出兩不同方向的三角形柱相互重疊比較建構出金字塔結構的形貌，排列出金字塔散落分佈的情形。另一部分為計算在不同方向的光線照射表面後的反射率、照射後產生陰影的比率、光照射表面的比率、反射光能損失及可再吸收光能的情形。此為運用向量的基本理論計算光線行進的方向及最後的位置，瞭解光線行進的路徑後計算其反射率及其影響結果。
在實驗方面，利用非等向性蝕刻方式製作出表面金字塔結構，再與模擬的數據進行比較分析，討論本研究的模型理論的可行性。從實驗與模擬的結果進行探討，當蝕刻後形成的表面金字塔結構越大，分佈密度越密集時，其抗反射效果越好，可再吸收光能的效果也越佳。
此外，我們利用本研究的模型討論光從不同照射角度下照射於表面的反射率、抗反射的效果及可再吸收光能的效率。當光線照射於表面上的角度增加時，光照射的面積與反射率也隨之增加。在光照射的角度越接近90°角垂直時，可再吸收光能的效果是最高的，可達到75%左右。在此時表面接收照射光產生的能量是會最大的。

In the present model, the effect of surface texture in reflection to the anisotropic single crystal silicon is created. The topical subject in the present model is to create model of surface texture from anisotropic single crystal silicon and evaluate reflection effect, including loss reflectance and photonics reabsorptivity . We also evaluated angle-dependent reflection effect. This three-dimension model describe pyramids distribute on the surface texture. We create the model that stand on the geometry property of pyramid. We calculate the reflectivity, shadow occupancy fraction, illuminate occupancy fraction, twice reflection occupancy fraction and loss reflectance for the quantitative evaluation of optic. This quantitative evaluation made use of vector as light motion. By comparing experimental and theoretical values, the reliability of a simulation technique was evaluated. We discover from result that antireflection and reabsorption effect better, when pyramid large and distribute densely. In the angle-dependent reflection, the reflectivity and illuminate occupancy fraction will increase, when illumination angle increase. The reabsorptivity is best to reach 75%, when illumination angle reach 90°.

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