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研究生: 陳建中
Chen, Jian-Chun
論文名稱: 光晶高曲度波導系統之研發應用
Development of Photonic-Crystal Films for High-Curvature Wave-Guides Systems
指導教授: 賴新一
Lai, Hsin-Yi
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年: 2008
畢業學年度: 96
語文別: 中文
論文頁數: 151
中文關鍵詞: 實驗設計DLVO理論薄膜沉積光晶薄膜
外文關鍵詞: DLVO theory, film assembly, photonic films, experimental design
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  • 目前光訊號傳輸主要仍採用光纖之原理,故而光訊號傳遞有所限制,雖經放大,效率仍然不佳。且光纖原理是靠核心與殼層的折射率不同而產生全反射,但在轉角彎曲處,由於部分入射光訊號會不滿足全反射條件而造成強度的衰減,因此光訊號在彎角能量的耗損問題已成為現今光學研究的重要研究課題之一。光子晶體是泛指所有具有光子能隙的材料,因此在製備上並無尺度上的考量。在奈米科技蓬勃發展的現代,學者們將奈米技術與光子晶體作理論結合,以期大幅減少光通道體積,進而增加積體光學單位面積之通道數,以提升光通訊效率。
    本研究亦採用奈米技術、光晶波導理論及其傳遞效率之模型,但是以往光波導模型在模擬推估傳遞效率時並未考慮製程參數,模擬的條件與實際情況不相符合,因此本研究將由薄膜沉積製程參數著手,目的在建構一套完整光晶薄膜成形理論與光波導傳遞效率估算模型,以針對光晶薄膜沉積參數對光波導傳遞效率的影響作一系列的探討與研究。在建構薄膜沉積理論的過程中發現到以往薄膜沉積理論在探討表面能對薄膜沉積結構所產生的影響並不完備,因此本文在製程參數中加入表面能參數並加以調控,希望能藉由完整考慮表面能作用對薄膜沉積結構進行更加準確的預測。在進行參數調控分析時,由於之前文獻對因子間交互作用分析理論探討甚少,因此本文採用實驗設計方法對因子與因子間交互作用項進行分析,藉以達成更貼近薄膜沉積實際結構之預測。
    首先,須先確定本研究實驗對象尺度為次微米,接著探討次微米粒子在膠體溶液中所受的作用力,將之疊加後以verlet演算法進行疊代運算,計算各個時間步階下的位置與系統參數,直到系統穩定後利用IOF法則計算薄膜的結構。求得薄膜結構後,便可將此參數搭配粒子的介電常數與粒徑,進行平面波展開法求得光晶薄膜結構的能隙頻譜。將光晶波導的波源頻率設定於光晶薄膜結構的能隙中,再利用有限時域差分法進行光晶波導的電磁波模擬,以計算光晶波導的傳遞效率,並將本文模擬結果與文獻實驗值比對,證實本研究所建構之理論模型的正確性。使用實驗設計方法找出顯著參數因子並調控顯著參數因子理論模型進行模擬計算,並根據本文建構的實驗設計流程調控顯著因子,進而提升光波導的傳遞效率。
    由本研究所建構之光晶薄膜沉積模型,在模擬中考量粒徑、Hamaker常數、表面電位外,並加入表面能的影響,經由實驗設計方法建立參數調控表,並利用變異數分析找出顯著參數與顯著交互作用項,針對這些顯著因子做模擬試驗,減少調控不顯著因子的實驗次數。本文研究結果與文獻資料比對後,發現所提理論可將薄膜缺陷誤差由傳統理論預估的10%~20%減少到10%以下,高曲度光晶波導最高傳遞效率可達75.83%,並經由實例應用以證實本文所建構的系統可因不同實際情況而找出最佳光晶波導傳遞效率的薄膜製程參數範圍。本文最後提出整合完成一套完整設計流程。此流程將可提供業界在光晶及光波導在實做上之設計及測試應用。

    Traditionally, the optic signal transmission is mainly based on the optic fiber system. The efficiency is still feckless because of the limit of optic signal transport, even after the signals are amplified. The theorem of optic fiber system is dependent on the total reflection of different refraction indices between core element and shell element. However, the strength of optic signals will decrease at the curve because of a part of optic signals can not fit the condition of total reflection. Therefore, the transfer energy is decreased for optic signals at the curve become one of the major topics in modern optical research. The photon crystal describes the materials with the property of photon energy gap, and researchers try to decrease the volume of optic-channel through the employment of nanotechnology and the photonic crystals to increase the efficiency of optic transport.
    The research also uses the model of nanotechnology, photonic wave-guide, and related transport efficiency. However, in traditional approach the optic wave guide theory doesn’t consider the parameters for the film assembly. Thus, the conditions of simulation weren’t completely with the reality. This research will start from the film assembly parameters in order to build a relatively complete photonic self-assembly film theory and an optic transport efficiency computation model for photonic wave guilds. Aiming at the series of the effect of film assembly parameters to the photonic wave-guide’s transport efficiency, the film assembly model is first built. We notice that traditional film assembly theory wasn’t perfect in describing the effect of surface energy to assemble film structure, so this research has added one key component of surface energy into the film assembly film parameters, then we make a much precise forecast with the assembly film structure. When adjusting the parameter, because the previous literatures discussed unclearly of the interactions between two parameters, this research attempts to get a more precise forecast of film structure by using experimental design method on characterizing the interactions of parameters.
    The scale of this model is sub-micrometer. We consider the forces interacting among the sub-micrometer particles in gel solution due to the colloid. We sum up those forces and then using verlet integration method to solve the sub-micrometer particles’ positions and system parameters in each time step. Once the system becomes stable, by employing IOF method, we compute the film structure. Also, utilizing the film structure, dielectric constant, and the diameter of particles, we obtain the band gap of this photonic film structure by plane wave expansion method. The efficiency of the photonic wave guide can then be calculated by using finite-difference-time-domain method. We also compare the experiment results with our simulation to enhance the transport efficiency of the photonic wave guide.
    The photonic assembly films model which is built from this research contains several parameters such as particle diameter, Hamaker constant, surface potential, and the effect from surface energy. We build a table of key influential factors by experiments design method and analyze the variances to find the optimum of each parameter. Basically, this research is constructed to adjust some common factors based on optimizing the parameters and reducing the simulation times. The results imply that the method reduces the error by 10% as compared to those of the classical method. After comparing with reference data, we confirm that the system that is built by our method achieves the best optical wave guide efficiency for the film assembly parameters in different real world applications. Consequently, this research provides a feasible design process which can be used to provide a better design and application to photonic crystal and optical wave guides for industries in real world operation.

    中文摘要 I 英文摘要 II 誌謝 IV 目錄 V 圖目錄 IX 表目錄 XI 符號說明 XIV 第一章 緒論 1 1.1 研究動機 1 1.2 研究目的 6 1.3 研究方法 9 1.4 章節導覽 11 第二章 文獻回顧與基本假設 13 2.1 本研究之相關文獻回顧 13 2.1.1 奈米微粒自組裝薄膜成形理論文獻回顧 13 2.1.2 奈米微粒自組裝光子晶體相關文獻回顧 14 2.1.3 光子晶體能隙計算相關文獻回顧 15 2.1.4 光子晶體波導傳遞效率相關文獻回顧 15 2.2 本研究之基本假設 16 2.3 本研究之研究流程 17 第三章 理論模型建構 21 3.1 次微米粒子在膠體中所受之勢能探討 23 3.1.1 次微米粒子受溶液分子之布朗作用勢能 24 3.1.2 膠體溶液中次微米粒子交互作用之DLVO勢能 26 3.1.3 次微米粒子與基材平板交互作用之DLVO勢能 29 3.1.4 粒子與粒子間的JKR勢能 30 3.2 由作用勢能建構光晶薄膜成形理論 32 3.2.1 由作用勢能建構系統動態方程 32 3.2.2 由系統動態方程建構薄膜之模擬估算流程 34 3.3 以光晶薄膜成形理論推估光晶薄膜結構 37 3.3.1 由晶體型態理論定義光晶薄膜結構 37 3.3.2 由光晶薄膜結構計算薄膜結構參數 40 3.4 由光晶薄膜結構參數建構光晶能隙理論 43 3.4.1 以Maxwell理論建構平面波傳模型 43 3.4.2 由布里淵區與倒晶格建立平面波空間 44 3.4.3 以平面波展開法推估光晶薄膜能隙 47 3.5 由光晶薄膜能隙估算光晶波導傳遞效率 48 3.5.1 以二維Maxwell方程模擬電磁波傳情形 48 3.5.2 由Yee晶格建構FDTD演算法 50 3.5.3 由FDTD演算法計算光晶波導傳遞效率 54 3.5.4 由光晶薄膜能隙建立光波導效率之模擬流程 55 3.6 由光晶薄膜成型理論推導光晶波導傳遞效率 57 第四章 光晶薄膜成型理論與波導傳遞效率之印證及應用 61 4.1 調控薄膜製程參數對薄膜FCC結構之影響 62 4.1.1 薄膜沉積模擬以探討表面能對FCC結構影響 63 4.1.2 以部份因子設計找出重要實作參數 72 4.1.3 以完全要因設計探討缺陷分率之結構模型 84 4.1.4 以結構模型探討交互作用項對缺陷分率之貢獻 91 4.2 不同薄膜結構參數下對光波導傳遞效率之探討 98 4.2.1 以平面波展開法計算薄膜結構之光子能隙 98 4.2.2 光晶波導模型傳遞效率之主要參數決定與比對 107 4.2.3 以完全要因設計探討結構對傳遞效率之影響 110 4.2.4 以波導模型探討交互作用項對傳遞效率之貢獻 116 4.3 高曲度光晶波導傳遞效率提升與應用實例 120 4.3.1 SiO2高曲度光晶波導製程設計規劃流程 121 4.3.2 給定傳遞效率下光晶波導系統參數搜尋流程 125 4.3.3 給定光晶波導波頻求最高傳遞效率之設計流程 131 第五章 總結與建議 136 5.1 總結 136 5.2 建議 139 參考文獻 140 附錄A 表面電位的調控與測量 145 附錄B 二氧化矽奈米粒子的製備 148

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