本論文針對奈米壓痕實驗應用於鑽石薄膜的突離(pop-out)現象進行研究，研究內容主要分成兩個部份：第一個部份為利用拉曼光譜分析受奈米壓痕實驗作用的鑽石薄膜，分析結果為鑽石薄膜 鍵結的比例上升，意謂著鑽石薄膜發生相變化（phase transformation），部份的鑽石結晶相轉變為石墨結晶相；利用穿透式電子顯微鏡的選區繞射分析受奈米壓痕實驗作用的鑽石薄膜，分析結果為鑽石薄膜隨著奈米壓痕實驗的最大負載力愈大，石墨結晶相愈多，代表鑽石薄膜有相變化的情形發生。
第二個部份為建立一個奈米壓痕實驗的卸載過程中，壓頭與鑽石薄膜接觸行為的理論模型，並推導出一個薄膜內應力與接觸力、接觸壓深的關係式，藉由此關係式計算出鑽石薄膜發生pop-out的臨界應力值，此數值與cubic diamond相轉變為graphite相之臨界應力值相當接近，並搭配第一個部分實驗分析的結果，鑽石薄膜會因為奈米壓痕實驗施加的壓力而發生相變化，印證本研究理論模型所推估的pop-out現象臨界應力值即為鑽石薄膜發生相變化的臨界應力值，而鑽石薄膜發生相變化就是pop-out現象的原因。

The topical subject in this paper is to investigate pop-out phenomena via nanoindentation tests of diamond films. In the part of experimental analysis, the ratio of bonding of diamond films are increased by the Raman spectrum, means that nanoindentation induces the phase transformation phenomena of diamond films, some of diamond crystal phase into graphite crystal phase. Another experimental analysis is selected area diffraction(SAD), the amount of graphite crystal phase increase with the larger maximum load of nanoindentation, means that nanoindentation induces the phase transformation phenomena of diamond films.
In the part of the theoretical model of the unloading process via nanoindentation, based on the contact behavior of indenter and diamond films. These two contact parameters allow the evaluation of internal stress and strain during the unloading process. We can estimate the critical internal stress of pop-out phenomena, and it is equivalent to the critical stress of phase transformation of cubic diamond phase into graphite phase. By the experimental analysis and the critical internal stress, it shows that the theoretical model and the equation of critical internal stress are reasonable. The phenomena of phase transformation causes the pop-out phenomena of diamond films.

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