本研究探討使用非平衡磁控濺鍍方式製備含鋯之碳氮鍍膜的成份、組織結構、磨潤性質、抗腐蝕性與改善刀具磨耗表現。使用輝光放電分析化學成份及縱向分佈;X光繞射分析、拉曼光譜分析和化學分析電子能譜儀檢測鍍層之鍵結與結構;奈米硬度機量測硬度;利用 pin-on-disk 迴轉式磨耗試驗機檢測鍍膜磨潤性質和磨耗壽命。使用動電位極化測試法量測鍍膜抗腐蝕性。
實驗得到以下一系列結果：隨著鋯靶電流增加，鋯含量(0-18at%)與鍍膜厚度(1.5-2.9m)均有明顯增長，且碳含量(68-60at%)與氮含量(32-22at%)均減少，其中氮為主要減少之元素。添加鋯於碳氮鍍膜使其硬度下降。化學分析電子能譜儀分析發現，鍍層中碳與鋯元素並沒有明顯之鍵結產生;且隨鋯含量之增加碳氮鍵結能強度從683下降到150(a.u.)。在機械與磨潤性能方面，添加鋯於碳氮鍍膜並沒有顯著的鍍層磨耗改善；純碳氮鍍層仍均具有最高奈米硬度(15.5GPa)與最低磨耗率(0.33x10-6mm3/Nm) 。在電化學腐蝕方面，所有披覆在高速鋼底材之鍍層均可改善其抗腐蝕性，其中純碳氮與CN-Z-2.0A(Zr:18%; C:60%; N:22%, at%)鍍層具有最佳的抗腐蝕表現。鍍膜在車刀試驗當中可有效降低35-47% 刀腹磨耗；但在微鑽針試驗當中卻沒有明顯增強刀具之抗磨耗性質。

A series of CN coatings with the addition of zirconium were deposited by unbalanced DC magnetron sputtering. Coatings’ chemical composition, structure and surface morphology, mechanical properties, tribology performance, corrosion resistance and anti-wear enhancement for cutting tools were investigated respectively.
The chemical composition were measured by glow discharge spectrometer (GDS) and electron dispersive X-ray (EDX); Structure and surface morphology were analyzed by X-ray diffraction analysis (XRD), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS); The hardness and elasticity were measured by nano-indention. Tribology properties and self-lubrication performance were determined by pin-on-disk tribometer. Potential-dynamic anodic polarization was used to determine the corrosion resistance behavior.
The results showed that as the Zr target current increased, both the Zr content (0-18%) and coating thickness (1.5- 2.9m) were increased, respectively. The C (68-60%) and N (32-22%) content were decreased. Notably, the N element was the primarily affected one. The addition of Zr to the CN coatings provided no hardness strengthening effect. In XPS analysis, no obvious C-Zr bond peak (281.9 eV) was observed; however the intensity of the C-N bond decreased from 683 to 150 (a.u.) with the Zr target current increase. The mechanical and tribological properties of the CN coatings were not significantly improved by adding Zr. The pure CN coatings showed the highest nano-hardness (15.5GPa) and the best anti-wear performance (wear rate: 0.33 10-6mm3/Nm). The corrosion resistance test showed that all the coatings deposited on the HSS substrate improved the electrochemical performance, among them pure CN and CN-Zr-2.0A (Zr:18%; C:60%; N:22%, at%) had the best protection effect.
In the machining performance experiment, the turning test showed that the coatings improved the flank wear by 35-47 %. By contrast the coatings did not have significant anti-wear enhancement for micro-drills.

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