| 研究生: |
鍾政龍 Chung, Cheng-Lung |
|---|---|
| 論文名稱: |
微波電漿化學氣相沉積法製備硼摻雜鑽石及其感測器應用 Microwave Plasma Chemical Vapor Deposition of Boron Doped Diamond and its Sensor Applications |
| 指導教授: |
曾永華
Tzeng, Yon-Hua |
| 學位類別: |
碩士 Master |
| 系所名稱: |
電機資訊學院 - 微電子工程研究所 Institute of Microelectronics |
| 論文出版年: | 2016 |
| 畢業學年度: | 104 |
| 語文別: | 中文 |
| 論文頁數: | 110 |
| 中文關鍵詞: | 硼摻雜鑽石 、鑽石電極 、循環伏安法 |
| 外文關鍵詞: | boron doped diamond, diamond electrode, cyclic voltammetry |
| 相關次數: | 點閱:87 下載:4 |
| 分享至: |
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物聯網的崛起,使得各式各樣感測器的重要性不言而喻,其中,以生醫領域的感測器而言,植入性的感測器需相當好的生物相容性,這當中,鑽石這項材料悄悄得扮演起不可抹滅的腳色,鑽石具有不易受到酸鹼腐蝕、硬度最強、導熱度最佳等優越特性,再加上鑽石具有良好的生物相容性,如果鑽石能製作成生醫領域的植入性感測器,將具有良好的可靠度及穩定性。
生醫領域的範疇中取決於鑽石的電化學特性,而鑽石除了具有良好的生物相容性,用鑽石製備之電極或感測器具有極寬的工作電位窗和極低的背景電流,再輔以良好的物理及化學穩定性,進行硼摻雜之後,這些特性也能獲得提升,使得鑽石電極之電化學特性廣泛研究於生醫領域。
本篇論文以微波電漿化學氣相沉積系統,調整出穩定的參數製備微米之鑽石薄膜,並且進行硼摻雜鑽石的製程,於製程結束確認其相關特性,並進行電化學中循環伏安法的量測樣品製備,在不同的電解液當中分析其電荷交換的能力和工作電位窗的表現。
本文調配赤黃血鹽、多巴胺、尿酸、氯化鉀等不同電解溶液,置入有不同程度硼摻雜鑽石電極之樣品、未摻雜鑽石電極和鉑工作電極,使用恆電位儀分析其循環伏安法特性,觀察硼摻雜鑽石的電化學特性。
Nowadays, Internet of things (IOT) is the most popular issue in our life. A wide range of sensors would play an important role in IOT. In the field of biotechnology, the implant sensors need very good biocompatibility and that is why diamond could be a choice to be an implant sensor. Diamond has a lot of good advantages, such as excellent hardness, good chemical stability and high thermal conductivity. Last but not least, biocompatibility is the reason why we used diamond. If diamond could be an implant sensor to detect different bio-materials, diamond may have a good reliability and stability.
In the field of biotechnology, not only the good biocompatibility diamond has, but also the good characteristic of electrical chemistry should be discussed. Diamond has wide potential window and low background current which means diamond has good potential to detect many bio-materials. When diamond is treated by different process, such as boron doping. The performance could be better.
In this study, we try to use microwave plasma chemical vapor deposition system to grow boron doped diamond films on silicon wafer. After the growing process, we do some test to check the characteristics of boron doped diamond. Then we used boron doped diamond to create sensor to do cyclic voltammetry (CV) test. Check the boron doped diamond’s behavior of electrical chemistry in different electrolyte. We also use sputter to grow platinum film on SiO2 and use it to do CV test. Compare the electrical chemistry behavior between boron doped diamond and Pt electrode.
[1] Hongjun Zeng, et al., "Boron-doped ultrananocrystalline diamond synthesized with an H-rich/Ar-lean gas system," CARBON 84 (2014) 103 – 117
[2] Jayakumar Shalini, et al., "In situ detection of dopamine using nitrogen incorporated diamond nanowire electrode," Nanoscale, 2013, 5, 1159–1167
[3] J. W. Liu, et al., "Electrical characteristics of hydrogen-terminated diamond metal-oxide-semiconductor with atomic layer deposited HfO2 as gate dielectric," Appl. Phys. Lett. 102, 112910 (2013)
[4] W. Haenni, et al., "Boron doped diamond electrodes for nitrate elimination in concentrated wastewater," Diamond and Related Materials, vol.12, pp. 606-612, Mar-Jul 2003.
[5] A. Denisenko, et al., "pH sensing by surface-doped diamond and effect of the diamond surface termination," Diamond and Related Materials, vol. 10, pp. 667-672, Mar-Jul 2001.
[6] J.Y.Jiang, et al., "Simultaneous hydrogen production and electrochemical oxidation of arganics using boron-doped diamond electrodes," Environmental Science & Technology, vol. 42, pp. 3059-3063, Apr 15 2008.
[7] T. Spataru, et al., "Detection of aniline at boron-doped diamond electrodes with cathodic stripping voltammetry," Talanta, vol. 73, pp. 404-406, Sep 15 2007.
[8] S.-Tong Lee, et al., "CVD diamond films: nucleation and growth," Materials Science and Engineering, vol. 25, pp. 123-154, 1999.
[9] J. C. Angus, et al., "Diamond and diamond-like films," Thin Solid Films, vol. 216, pp. 126-133, 1992.
[10] M. N. Yoder, et al., "Synthetic Diamond: Emerging CVD," Science and Technology: John Wiley & Son, 1993.
[11] Y. Gurbuz, et al., "Diamond semiconductor technology for RF device applications," Solid-State Electronics, vol. 49, pp. 1055-1070, 2005.
[12] http://www.chemicool.com/elements/carbon.html
[13] S.-Tong Lee, et al., "CVD diamond films: nucleation and growth," Materials Science and Engineering, vol. 25, pp. 123-154, 1999.
[14] David Saada, "Diamond and graphite properties, " 2000.
[15] http://en.wikipedia.org/wiki/Young's_modulus
[16] Mingjie Liu, et al., "Carbyne from first principles: Chain of C atoms, a nanorod or a nanorope," ACS Nano, 7 (11), pp. 10075-10082, 2013.
[17] Alexander A. Balandin, Suchismita Ghosh, et al., "Superior Thermal Conductivity of Single-Layer Graphene," Nano Letters, vol. 8, pp. 902-907, 2008
[18] http://www.diamondbladeselect.com/knowledge/basic-properties-of-diamond/
[19] http://en.wikipedia.org/wiki/Diamond
[20] V. Mortet, et al., "Surface acoustic wave propagation in aluminum nitride-unpolished freestanding diamond structures," Applied Physics Letters, vol. 81, pp. 1720-1722, 2002.
[21] K. E. Goodson, et al., "Improved heat sinking for laser-diode arrays using microchannels in CVD diamond," IEEE Transactions on Components Packaging and Manufacturing Technology Part B-Advanced Packaging, vol. 20, pp. 104-109, 1997.
[22] E. Kohn, et al., "Diamond MEMS — a new emerging technology," Diamond and Related Materials, vol. 8, pp. 934-940, 1999.
[23] C.-C. Choua, et al., "Processing and Crystal Microstructure of Porous High Pressure Crystallized Nanodiamond/UHMWPE Biomedical Nanocomposite," Advanced Materials Research, vol. 328-330, pp. 857-860, 2011.
[24] K. Miyata, et al., "Fabrication and characterization of diamond film thermistors," Review of Scientific Instruments, vol. 65, pp. 3799-3803, 1994.
[25] R. Müller, et al., "Application of CVD-diamond for catheter ablation in the heart," Diamond and Related Materials, vol. 13, pp. 1080-1083, 2004.
[26] P. Gluche, et al., "Actuator – sensor technology on “electronic grade," diamond films" Microsystem Technologies, vol. 5, pp. 38-43, 1998.
[27] S. Basu, et al., "Electrochemical sensing using nanodiamond microprobe," Diamond and Related Materials, vol. 15, pp. 269-274, 2006.
[28] 宋健民, "工業材料," 1995.
[29] M. Schwander, et al., "A review of diamond synthesis by CVD processes," Diamond and Related Materials, vol. 20, pp. 1287-1301, 2011.
[30] Paul W. May, Diamond thin films : a 21st -century material, The Royal society.
[31] King D, et al., "Scaling the microwave plasma-assisted chemical vapor diamond deposition process to 150–200 mm substrates, " Diamond and Related Materials, vol. 17, pp. 520-524, 2008.
[32] X. Jiang, et al., "Nucleation and initial growth phase of diamond thin films on (100) silicon," Phys. Rev. B, vol. 50, pp. 8402-8410, 1994.
[33] Williams, et al., "Nanocrystalline diamond," Diamond and Related Materials, vol. 20, pp. 621-640, 2011.
[34] Das, et al., "A review of nucleation, growth and low temperature synthesis of diamond thin films," International Materials Reviews, vol. 52, pp. 29-64, 2007.
[35] K. Mitsuda, Y. Kojima, et al., "The growth of diamond in microwave plasma under low pressure," J. Mater. Sci., vol. 22, pp. 1557–1562, 1987.
[36] Sumio Iijima, et al., "Growth of diamond particles in chemical vapor deposition," Journal of Materials Research, vol.6, pp. 1491-1497, 1991.
[37] M. Ihara, et al., "Correlation between nucleation site density and residual diamond dust density in diamond film deposition," Appl. Phys. Lett., vol.65, p. 1192, 1994
[38] W.A. Yarbrough, et al., "Applications of Diamond Films and Related Materials," Elsevier, Amsterdam, p. 25, 1991.
[39] Paul A. Dennig, et al., "Influence of substrate treatments on diamond thin film nucleation," Thin Solid Films, vol. 212, pp. 63-67, 1992.
[40] P.A. Dennig, et al., "Influence of substrate topography on the nucleation of diamond thin films," Appl. Phys. Lett., vol. 59, p. 1562, 1991.
[41] B. Lux, et al., "Diamond and Diamond-like Films and Coatings," Plenum Press, New York, p. 579, 1991.
[42] Angus, John C., et al., "Metastable growth of diamond and diamond-like phases," Annual Review of Materials Science, vol. 21, pp. 221-248, 1991.
[43] H. Maeda, et al., "Nucleation and growth of diamond in a microwave plasma on substrate," J. Cryst. Growth, vol. 121, pp. 507–515, 1992.
[44] B. Singh, et al., "Effects of filament and reactor wall materials in low-pressure chemical vapor deposition synthesis of diamond," Appl. Phys. Lett., vol. 52, pp. 451–452, 1988.
[45] Williams, et al., "Nanocrystalline diamond," Diamond and Related Materials, vol. 20, pp. 621-640, 2011.
[46] Ascarelli, et al., "Dissimilar grit-size dependence of the diamond nucleation density on substrate surface pretreatments," Applied surface science, vol. 64, pp.307-311, 1993.
[47] Iijima, Sumio, et al., "Early formation of chemical vapor deposition diamond films," Applied physics letters, vol. 57, pp. 2646-2648, 1990.
[48] O. Shenderova, et al., "Seeding slurries based on detonation nanodiamond in DMSO," Diamond and Related Materials, vol. 19, pp. 260-267, 2010.
[49] Akhvlediani, et al., "Nanometer rough, sub-micrometer-thick and continuous diamond chemical vapor deposition film promoted by a synergetic ultrasonic effect," Diamond and related materials, vol. 11, pp. 545-549, 2002.
[50] Pradhan, et al., "Effect of titanium metal in the prenucleation of ultrananocrystalline diamond film growth at low substrate temperature," Diamond and related materials, vol. 15, pp. 1779-1783, 2006
[51] J. Robertson, "Mechanism of bias-enhanced nucleation and heteroepitaxy of diamond on Si," Diamond and Related Materials, vol. 4, pp. 549-552, 1995.
[52] S. Yugo, et al., "Generation of diamond nuclei by electric field in plasma chemical vapor deposition," Appl. Phys. Lett., vol. 58, pp. 1036–1038, 1991.
[53] B. R. Stone, et al., "Characterization of bias-enhanced nucleation of diamond on silicon by invacuo surface analysis and transmission electron microscopy," Phys. Rev. B, vol. 45, pp. 11067–11084, 1992.
[54] H. Liu, et al., "Studies on nucleation process in diamond CVD: an overview of recent developments," Diamond Relat. Mater, vol. 4, pp. 1173–1188, 1995.
[55] Williams, et al., "Growth and properties of nanocrystalline diamond films," Physica Status Solidi a-Applications and Materials Science, vol. 203, pp. 3375-3386, 2006.
[56] Paul W. May, "Diamond thin films: a 21st-century material," Phil. Trans. R. Soc. Lond., vol. 358, pp. 473–495, 2000.
[57] V. Ralchenko, et al., "Quality of diamond wafers grown by microwave plasma CVD: effects of gas flow rate," Diamond and Related Materials 8 (1999) 189–193
[58] Li X, et al., "Investigation of the effect of the total pressure and methane concentration on the growth rate and quality of diamond thin films grown by MPCVD," Diamond and related materials.15(11):1784-8 (2006).
[59] Das D, et al., "A review of nucleation, growth and low temperature synthesis of diamond thin films," International Materials Reviews.52(1):29-64 (2007).
[60] Frenklach M. "The role of hydrogen in vapor deposition of diamond," Journal of Applied Physics.65(12):5142-9 (1989).
[61] Michaelson S, et al., "Hydrogen in nano-diamond films," Diamond and related materials.14(3):470-5 (2005).
[62] Gruen DM. "Nanocrystalline diamond films 1," Annual Review of Materials Science.29(1):211-59 (1999).
[63] Zhou D, et al., "Control of diamond film microstructure by Ar additions to CH4/H2 microwave plasmas," Journal of Applied Physics.84(4) (1998).
[64] Y.Muranaka, et al., J. Vac. Sci. Technol. A., 9(76)
[65] S.J. Harris, et al., Appl. Phys. Lett., 55.
[66] Biwu Sun, et al., J. Appl. Phys., 73(9)
[67] Elliott M, et al., "Optical emission spectroscopic studies of microwave enhanced diamond CVD using CH4/CO2 plasmas," Diamond and Related Materials.9(3):311-6 (2000).
[68] Stiegler J, et al., "Low temperature limits of diamond film growth by microwave plasma-assisted CVD," Diamond and related materials.5(3):226-30 (1996).
[69] http://www.azom.com/article.aspx?ArticleID=1644
[70] O.A. Williams, et al., "Growth, electronic properties and applications of nanodiamond," Diamond and Related Materials, vol. 17, pp. 1080-1088, 2008.
[71] D. M. Gruen, "Nanocrystalline diamond films," Annual Review of Materials Science, vol. 29, pp. 211-259, 1999.
[72] T. Lin, et al., "Compositional mapping of the argon-methane-hydrogen system for polycrystalline to nanocrystalline diamond film growth in a hot-filament chemical vapor deposition system," Applied Physics Letters, vol. 77, pp. 2692-2694, 2000.
[73] X. Xiao, et al., "Low temperature growth of ultrananocrystalline diamond," Journal of Applied Physics, vol. 96, pp. 2232-2239, 2004
[74] H. El-Hajj, et al., "Characteristics of boron δ-doped diamond for electronic applications," Diamond & Related Materials 17 (2008) 409–414
[75] V. V. Dvorkin, et al., "Use of Ultrafine-Dispersed Nanodiamond for Selective Deposition of Boron-Doped Diamond Films," PHYSICS OF THE SOLID STATE Vol. 46 No. 4 2004
[76] Yi-Jiun Chen, et al., "Electrochemical studies of nano-structured diamond thin-film electrodes grown by microwave plasma CVD," Vacuum 80 (2006) 818–822
[77] Katherine B. Holt, et al., "Scanning Electrochemical Microscopy and Conductive Probe Atomic Force Microscopy Studies of Hydrogen-Terminated Boron-Doped Diamond Electrodes with Different Doping Levels," J. Phys. Chem. B, Vol. 108, No. 39, 2004
[78] Journal of Chemical and Engineering Data, Vol. 31, No. 4, 1986
[79] E. Tanikawa, T. Okabe, and K. Maeda, Denki Kagaku 41 (7), 491 (1971).
[80] S. Wang, et al., "The structural and electrochemical properties of boron-doped nanocrystalline diamond thin-film electrodes grown from Ar-rich and H2-rich source gases," Diamond Relat. Mater., 2009, 18, 669–677.
[81] N. Mizuochi, et al., "EPR study of hydrogen-related defects in boron-doped p-type CVD homoepitaxial diamond films," Diamond & Related Materials 13 (2004) 2096–2099
[82] Reona Mori, et al., "Mutual relation among lattice distortion, Hall effect property and band edge cathodoluminescence of heavily-boron-doped microwave-plasma CVD diamond films homoepitaxially grown on vicinal (001) high-pressure/high-temperature-synthesized Ib substrates," Journal of Crystal Growth 415 (2015) 84 – 92
[83] Matt Hupert, et al., "Conductive diamond thin-films in electrochemistry," Diamond and Related Materials 12 (2003) 1940–1949
[84] Hongjun Zeng, et al., "Boron-doped ultrananocrystalline diamond synthesized with an H-rich/Ar-lean gas system," CARBON 84 (2014) 103 – 117
[85] P.W. May, et al., "Raman and conductivity studies of boron-doped microcrystalline diamond, facetted nanocrystalline diamond and cauliflower diamond films," Diamond & Related Materials 17 (2008) 105–117
[86] M.Bernard, et al., "About the origin of the low wave number structures of the Raman spectra of heavily boron doped diamond films," Diamond and Related Materials 13 (2004) 896–899
[87] Julie V. Macpherson "A practical guide to using boron doped diamond in electrochemical research” Phys. Chem. Chem. Phys., 2015, 17, 2935--2949
[88] J. Barjon, et al., "Resistivity of boron doped diamond," Phys. Status Solidi RRL 3, No. 6 (2009)
[89] R. Torz-Piotrowska, et al., "The application of CVD diamond films in cyclic voltammetry," Volume 37 Issue 2 December 2009
[90] Jason A. Bennett, et al., "Effect of sp2-Bonded Nondiamond Carbon Impurity on the Response of Boron-Doped Polycrystalline Diamond Thin-Film Electrodes," Journal of The Electrochemical Society, 151 (9) E306-E313 (2004)
[91] Takeshi Watanabe, et al., "Giant electric double-layer capacitance of heavily boron-doped diamond electrode” Diamond & Related Materials 19 (2010) 772–777
[92] Ichizo Yagi, et al., "The Effects of Nitrogen and Plasma Power on Electrochemical Properties of Boron-Doped Diamond Electrodes Grown by MPCVD," Journal of The Electrochemical
[93] http://www.okbu.net/chemistry/mrjordan/inorganic1/electrochem/ECHEM1.HTML
[94] http://www.olympusmicro.com/primer/techniques/fluorescence/bx51fluorescence.html
[95] SpringThorpe, et al., "Epitaxial growth rate measurements during molecular beam epitaxy," Journal of Vacuum Science & Technology B, vol. 8, pp. 266-270, 1990.
[96] Keith A. Snail, et al., "In situ diamond growth rate measurement using emission interferometry," Appl. Phys. Lett. 60 (25), 22 June 1992
[97] J. Robertson, "Diamond-like amorphous carbon," Materials Science & Engineering R-Reports, vol. 37, pp. 129-281, 2002.
[98] Z. Lu, L. Zhang, X. Ma, N. Yao, and B. Zhang, "The growth process and field emission characteristics of spherical aggregates of polycrystalline diamond flakes," physica status solidi (c), vol. 9, pp. 41-43, 2012.
[99] http://en.wikipedia.org/wiki/Scanning_electron_microscope
[100] http://www.slideshare.net/joybiitk/atomic-force-microscope-fundamental-principles
[101] Chia-Liang Sun, et al., "The simultaneous electrochemical detection of ascorbic acid, dopamine, and uric acid using graphene/size-selected Pt nanocomposites, " Biosensors and Bioelectronics 26 (2011) 3450–3455