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研究生: 李宜璋
Lee, Yi-Chang
論文名稱: 高速高頻多晶片探針卡微探針電氣特性之設計,模擬與製造
The Study of MEMS Probes for High-Speed, High-Frequency, and High-Parallel Wafer-Level Testing
指導教授: 洪茂峰
Houng, Mau-Phon
王永和
Wang, Yeong-Her
劉安鴻
Liu, An-Hung
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
論文出版年: 2004
畢業學年度: 92
語文別: 中文
論文頁數: 79
中文關鍵詞: 探針卡探針
外文關鍵詞: Probe card, Probe
相關次數: 點閱:59下載:10
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  •   由於目前製程的技術一直朝向元件縮小化。換言之,同一面積下可以擺放更多元件。另一方面,元件又朝向高頻發展。要在晶圓量測的過程中,從這些又小又快的元件中找出瑕疵品,以確保產品的良率,進而節省支出成本。這就是晶圓測試探針卡公司,為什麼肯研發或代理高速高頻多晶片探針卡的原因。
      透過本文,可以大略了解到探針卡以及探針。接著在研製的過程中,首先使用模擬軟體HFSS(高頻結構模擬)來決定出一些結構上的規格。之後透過材料特性以及機械特性,認識製作探針的初步程序,並利用模擬參數以及製程技術的互相配合與比較,藉此探索探針研製的可行性。

      The current trend is towards device miniaturization. In other words, there will be placed more devices in the same area. Besides, the current trend is towards high frequency. In the process of wafer-level testing, we can find the tarnish from these small and quick devices to ensure the yield of the products and then save cost. This is why the probe card manufacturers are willing to study or act for the high-speed, high-frequency, and high-parallel probe card.
      In this paper, we realize the probe card and probe approximately. In the process of study and fabrication, we decide the scale of the structure for HFSS in the first place. Second, we realize the initial procedure of the probe fabrication by the material characteristics and mechanical properties, and study the feasibility of probe fabrication by the cooperation and comparison of the simulation parameters and fabrication techniques.

    中文摘要……………………………………………………………I 英文摘要……………………………………………………………II 誌謝…………………………………………………………………III 目錄…………………………………………………………………V 表目錄………………………………………………………………VII 圖目錄………………………………………………………………VIII 目錄 第一章序論………………………………………………………………1 1-1 研究背景及動機……………………………………………………1 1-2 本文流程……………………………………………………………5 第二章基礎理論…………………………………………………………7 2-1傳輸線理論…………………………………………………………7 2-1-1無損耗傳輸線……………………………………………………10 2-1-2低損耗傳輸線……………………………………………………11 2-2無電鍍理論…………………………………………………………13 2-2-1無電鍍鎳理論……………………………………………………13 2-2-2無電鍍鎳作業………………………………………………16 第三章晶圓量測級探針卡之探針線路特性研究………………………18 3-1 探針卡介紹…………………………………………………………18 3-1-1 探針卡種類…………………………………………………19 3-1-2 垂直式探針卡結構概述…………………………………………23 3-1-3 垂直式探針卡優勢…………………………………………26 3-1-4 垂直式探針卡之瓶頸……………………………………………26 3-2 探針介紹……………………………………………………………28 3-2-1 MEMS介紹…………………………………………………………29 3-2-2 探針形狀種類………………………………………………30 3-2-3 探針量測之操作模式………………………………………32 3-2-4 探針所使用的材質…………………………………………34 3-2-5 探針研製方面應考慮事項…………………………………37 3-3 探針之接觸電阻以及清針…………………………………………44 第四章探針模擬結果……………………………………………………50 4-1 使用軟體簡介………………………………………………………50 4-2 探針設計摡念………………………………………………………53 4-3 探針寬度為參數之模擬……………………………………………56 4-4 Support厚度為參數之模擬………………………………………60 4-5 模擬後的討論………………………………………………………64 第五章晶圓量測級微探針之製作過程概述……………………………65 5-1 工形拉伸試片………………………………………………………65 5-1-1 工形拉伸試片的製作過程簡介……………………………65 5-1-2 工形拉伸試片的成品………………………………………69 第六章結論………………………………………………………………73 參考文獻…………………………………………………………………74 自傳………………………………………………………………………79

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