本實驗利用中頻雙極式磁控與非平衡磁控濺鍍混合系統，濺鍍固體碳靶及鈦靶，被覆含鈦無氫類鑽碳膜。主要目的為研究含鈦無氫類鑽碳膜的磨潤性質與被覆車刀之乾車削性能。
實驗中鍍膜被覆共分為二階段：第一階段，主要目的為探討基板偏壓對鍍膜的影響；第二階段，改變金屬鈦靶的電流大小，得到不同鈦金屬含量的鍍膜，探討不同鈦含量對鍍膜磨潤性質的影響。最後進行實地乾車削試驗，以瞭解含鈦無氫類鑽碳膜被覆車刀之乾車削性。
由第一階段鍍膜被覆得知：鍍膜硬度會隨著基板偏壓升高而增大；但鍍膜附著性有隨偏壓上昇而下降的趨勢。經SRV磨耗試驗證實基板偏壓為-55V時，鍍膜有最高的抗磨耗性。
經第二階段鍍膜被覆我們得到含鈦量0～51%的無氫碳膜。隨著含鈦量的增加，鍍膜的結構可分為三類：鈦含量在20a%內時，鍍膜以非晶態類鑽碳膜為主；當鈦含量介在28~35a%之間時，鍍膜內混合了鈦和碳化鈦的的結晶，且還有部分非晶態碳結構的存在；當鈦含量在40a%以上時，鍍膜內的結構以碳化鈦結晶為主
經由實驗得知：添加鈦金屬有助於無氫類鑽碳鍍膜與底材間的附著性，且當鈦金屬含量在3~20a%之間，鍍膜擁有較低的摩擦係數與較高的抗磨耗性；經由SRV磨耗試驗，證實含鈦無氫類鑽碳膜確實擁有比傳統的含氫類鑽碳膜還優越的磨潤性質。在乾車削試驗中，以含鈦量20a%被覆車刀表現最佳，其刀腹磨耗量約只有未被覆車刀的1/5，顯示被覆適當的無氫含鈦類鑽碳膜，的確有助於提升車刀的刀具壽命。

The main purpose of this study is to research the tribological properties and turning performance of titanium hydrogen-free amorphous carbon coatings prepared by sputtering graphite and titanium targets with a medium frequency Twin magnetron sputtering and unbalanced magnetron sputtering hybrid system.
It contains two stages of research in the study. We focus the influence of substrate bias on the properties of coatings in first stage. We change the current of titanium target to get various titanium quantities of coatings in second stage. Finally, a dry turning of coated inserts will be undergone to understand the turning performance of titanium hydrogen-free amorphous carbon coatings.
Through the research of the first stage we know that the hardness of the coatings increase and the adhesion of the coatings decrease with the substrate bias. After SRV tribological test we verify that the coating prepared under the minus 55 bias has highest wear resistance.
We got coatings with titanium content range from zero to fifty-one atomic percent in second stage. With increasing the content of titanium, the structure of the coating can be divided into three different types. When the titanium is within twenty atomic percent, the coating is the amorphous diamond-like carbon coatings. When the titanium is between twenty-eight and thirty-five, the structure of the coating is mixed with titanium, titanium carbide crystals and some of the amorphous carbon. When the titanium is above forty atomic percent, the property of the coating is dominated by titanium carbide crystals.
Through the study we can know that adding titanium contributes to the adhesion of the coatings and the coatings have the lower friction coefficient and higher wear resistance when the titanium is between three and twenty atomic percent.
We demonstrate that the hydrogen-free titanium diamond-like carbon coatings do have more advantages in tribological properties than conventional hydrogenated diamond-like carbon coatings. The twenty atomic percentage of titanium diamond-like carbon coating which flank wear is just about one-fifth of the uncoated insert that shows coated appropriate hydrogen-free diamond-like carbon coating truly help increase the tool life.

1. A.B. Vladimirov，I.S. Trakhtenberg，A.P. Rubshtein，et al.，”The effect of substrate and DLC morphology on the tribological properties coating”，Diamond and Related Materials ，9(2000)838-842.
2. M. Diani，A. Mansur，L. Kubler，J.B. Bischoff，D. Bolmont，”Search for carbon nitride CNx compounds with a high nitrogen content by electron cyclotron resonance plasma deposition”，Diamond Related Materials， 3(1994)264.
3. M. Lu，A. Bensaoula，A. Schultz，” Formation of carbon nitride films on Si(100) substrates by electron cyclotron resonance plasma assisted vapor deposition “，Applied Physics Letters，65(1994)696.
4. M. Lu，A. Bensaoula，” Physical properties of thin carbon nitride films deposited by electron cyclotron resonance assisted vapor deposition”，Journal of Vacuum Science & Technology，A13(1995)1639.
5. B.C. Holloway，D.K. Shuh，M.A. Kelley，et al.，” Synthesis and characterization of amorphous carbon nitride films”，Thin Solid Films，290-291(1996)94.
6. H. Gruger，D. Selbmann，E. Wolf，A. Leonhard，B. Arnold，” CNx-layers prepared by plasma assisted chemical vapour deposition”，Surface and Coatings Technology，86-87(1996)409.
7. J. Schwan，W. Dworschak，K. Jung，H. Khrhardt，”Microstructures and mechanical properties of amorphous hydrogenated carbon-nitrogen films”，Diamond and Related Materials，3(1994)1034
8. S. Veprek，J. Weidmann，F. Glatz，”Plasma chemical vapor deposition and properties of hard Cr3N4 thin films”， Journal of Vacuum Science & Technology，A13(1995)2914
9. C. Donne，J. Fontaine，T.L. Mogne，et al.，”Diamond-Like carbon-based functionally gradient coatings for space tribology” ，Surface and Coatings Technology.，120-121(1998)548-554.
10. R. Padiyath，S.V. Baba，” Incorporation of nitrogen into diamond-like carbon films”，Diamond and Related Materials，3(1994)210.
11. M. Tabbal，P. Merel，S. Moisa，et al.，” X-ray photoelectron spectroscopy of carbon nitride films deposited by graphite laser ablation in a nitrogen postdischarge”，Applied Physics Letters，69(1996)689.
12. A. Kumar，H.L. Chan，J.S. Kapat，”Deposition an characterization of titanium carbide coatings using laser ablation method”，Applied Surface Science，127-129(1998)549-552.
13. T. Okada，S. Yamada，Y. Takeuchi，T. Wada，” Formation of carbon nitride films with high N/C ratio by high-pressure radio frequency magnetron sputtering ”，Journal of Applied Physics，78(1995)7416.
14. N. Axen，G.A. Botton，et al.，”Incorporation of nitrogen in sputtered carbon films”，Surface and Coatings Technology”，2-3(1996)262-268.
15. R. Kaltofen，T. Sebald，G. Weisc，” Plasma diagnostic studies to the carbon nitride film deposition by reactive r.f. magnetron sputtering”，Thin Solid Films，290-291(1996)112.
16. T. Krumpiegl，H. Meerkamm，W. Fruth，et al.，”Amorphous carbon coatings and their tribological behaviour at high temperatures and in high vacuum”，Surface and Coatings Technology，121-120(1999)555-560.
17. N.A. Sanchez，C. Rincon，G. Zambranco，et al.，”Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering”，Thin Solid Films，373(2000)247-250.
18. E. Kusano，A. Satoch，M. Kitagawa，et al.，”Titanium carbide film deposition by DC magnetron reactive sputtering using a solid carbon source”，Thin Solid Film，343-344(1999)254-256.
19. D. Camino，A.H.S. Jones.，D. Mercs，D.G. Teer，”High performance sputtered carbon coatings for wear resistant applications”，Vaccum，52(1999)125-131.
20. S. Yang，D. Camino，A.H.S. Jones ，D.G. Teer，”Deposition and tribological behaviour of sputtered carbon hard coatings”，Surface and Coatings Technology，124(2000)110-116.
21. V. Fox，A. Jones，N.M. Renevier，D.G. Teer，”Hard lubricating coatings for cutting and forming tools and mechanical components”，Surface and Coatings Technology，125(2000)347-353.
22. D.Y. Wang，C.L. Chang，W.Y. Ho，”Characterization of hydrogen-free carbon films deposited by pulsed plasma technology”，Thin Solid Films，355-356(1999)246-251.
23. D.Y. Wang，C.L. Chang，”Influences of optical emission settings on wear performance of metal-doped diamond-like carbon films deposited by unbalanced magnetron sputtering”，Thin Solid Films，392(2000)11-15
24. C.L. Chang，D.Y. Wang，”Microstructure and adhesion characteristics of diamond-like carbon films deposited on steel substrate”，Diamond and Related Materials，10(2001)1528-1534.
25. P. Villiger，C. Sprecher，J.A. Peters，”Parameter optimization of Ti-DLC coatings using statistically based methods”，Surface and Coatings Technology，116-119(1999)585-590.
26. V.N. Inkin，G.G. Kirpilenko，A.A. Dementjev，K.I. Maslakov，”A superhard diamond-like carbon film”，Diamond and Related Materials，9(2000)715-721.
27. H. Liu，A. Tanaka，T. Kumagai，”Influence of sliding mating materials on the tribological behavior of diamond-like carbon films”，Thin Solid Films，352(1999)145-150.
28. Y. Ozmen ，A. Tanaka，T. Sumiya，”The effect of humidity of on the tribological behavior of diamond-like carbon (DLC) film coated on WC-Co by physical vapor deposition method”，Surface and Coatings Technology，133-134(2000)455-459.
29. I.S. Trakhtenberg，A.B. Vladimirov，A.P. Rubshtein，”Improved-quality needles with a diamond-like coating (DLC) for stitching machines and their production technology”，Diamond and Related Materials，8(1999)1765-1769.
30. T.C.S. Vandevelde，K. Vandierendonck，M.V. Stappen ，et al.，”Cutting application of DLC，hard carbon and diamond films”，Surface and Coatings Technology，113(1999)80-85.
31. H.O. Pierson，”Handbook of Refractory Carbides and Nitrides”，Noyes Publications，Westwood，NJ，1996，p.282.
32. S. Neuville，A. Matthews，”Hard carbon coatings: the way forward”，MRS Bulletin，September，1997，p.22.
33. B.B Pate ，M.H. Hecht，C. Binns，”Photoemission and photon-stimulated ion desorption studies of diamond(111): hydrogen”， Journal of Vacuum Science Technology，21(1981)364-367.
34. A. Ravch，L. Martinu，H.M. Hawthorne，M.R. Wertheimer，” Mechanical and tribological properties of dual-frequency plasma-deposited diamond-like carbon”，Surface and Coatings Technology，58(1993)45-55
35. A.A Minevich，” Wear of cemented carbide cutting inserts with multilayer Ti-based PVD coatings”，Surface and Coatings Technology，53(1992)161.
36. J.C. Sanchez-Lopez，C. Donnet，J. Fontaine，et al.，”Diamond-like carbon prepared by high density plasma”，Diamond and Related Materials，9(2000)638-642.
37. T.L. Huu，H. Nery，H. Zaidi，D. Paulmier，” Tribological behaviour of hard carbon coatings deposited on steel substrates by plasma-assisted chemical vapour deposition”，Diamond and Related Materials，1994；3:1028.
38. M. Pancielejko，W. Precht，A. Czyzniewski，”Tribological properties of PVD titanium carbides”，Vaccum，53(1999)57-60.
39. A. Erdemir，M. Switala，R. Wei，P. Wilbur，” Tribological investigation of the graphite-to-diamond-like behavior of amorphous carbon films ion beam deposited on ceramic substrates”，Surface and Coatings Technology，50(1991)17.
40. E.I. Melets，A. Erdemire. G.R. Fenske，” Tribological characteristics of DLC films and duplex plasma nitriding/DLC coating treatments”，Surface and Coatings Technology，73(1995)39.
41. D.P. Monaghan，D.G. Teer，P.A. Logan，et al.，” Deposition of wear resistant coatings based on diamond like carbon by unbalanced magnetron sputtering ”，Surface and Coatings Technology，60(1993)525.
42. H. Ronkainen，S. Varjus，J. Koskinen，” Tribological properties of diamond-like carbon films”，Tribology，11(4)(1992)133-141.
43. A. Erdemir，F.A. Nichols，X.Z. Pan，R. Wei，P. Wilbur，” Friction and wear performance of ion-beam-deposited diamond-like carbon films on steel substrates”，Diamond and Related Materials，3(1994)119.
44. A. Donnet，M. Belin，J.C. Auge，et al.，” Tribochemistry of diamond-like carbon coatings in various environments”，Surface and Coatings Technology，68/69(1994)626-631.
45. A. Donnet，A. Grill，” Friction control of diamond-like carbon coatings ”，Surface and Coatings Technology，94-95(1997)456-462.
46. T.L. Huu，H. Zaidi，D. Paulmier，” Lubricating properties of diamond-like coating”，Wear，181-183(1995)766-770.
47. B. Marchon，M.R. Khan，N. Heiman，P. Pereira，” Tribochemical wear on amorphous carbon thin films”，IEEE Transactions on Magnetics，26(5)(1990)2670.
48. D.S. Kim，T.E. Fischer，B. Gallois，” Effects of oxygen and humidity on friction and wear of diamond-like carbon films”，Surface and Coatings Technology，49(1991)537.
49. A. Erdemir，C. Bindal，J. Pagan，P. Wilbur，”Formation and self-lubricating mechanisms of boric acid on borided steel surfaces”，Surface and Coatings Technology，76/77(1995)559-563.
50. Y. Liu，A. Erdemir，E. Meletis，” The investigation of the relationship between graphitization and frictional behavior of DLC coatings”，Surface and Coatings Technology，86/87(1996)564.
51. H. Mohrbacher，B. Banplain，J.P. Celis，J.R. Roos，” Frictional behaviour of diamond-like carbon and diamond coatings in oscillating sliding”，Surface and Coatings Technology，62(1993)583.
52. C. Donnet ，” Environment and tribochemistry - two key factors for the tribology of diamond-like carbon coatings”，Surface and Coatings Technology， (1996)229.
53. M.N. Gardos，K.E. Spear，J.P. Dismuke，”Synthetic Diamond :Emerging CVD Science and Technology”，Wiley，New York，(1994)419.
54. E. Liu，B. Blanpain，E. Dekempeneer，F. Loffler，” Tribological behaviour of different diamond-like carbon materials”，”Diamond Films Technology，4(1994)37-49.
55. K. Miyoshi，R.L.C. Wu，et al.，”Environmental effects on friction and wear of diamond and diamond-like carbon coatings “，NASA Technical Memorandum ， 105634 (1992) 9320.
56. H. Ronkainen，S. Varjus，J. Koskinen，K. Holmberg，”Differentiating the tribological performance of hydrogenated and hydrogen-free DLC coatings”，Wear，249(2000)260-266.
57. V. Kulikovsky，P. Bohac，F. Franc，et al.，”Hardness，intrinsic stress，and structure of the a-C and a-C:H films prepared by magnetron sputtering”，Diamond and Related Materials，10(2001)1076-1081.
58. G.A.J. Amaratunga，M. Chhowalla，C.J. Kiely，I. Alexandrou，Nature，383(1996)321-323.
59. R.G. Lacerda，P. Hammer，F. Alvarez，” Comparative study on the bonding structure of hydrogenated and hydrogen free carbon nitride films with high N content”，Diamond and Related Materials，9(2000)796.
60. D.R. McKenzie，Y. Yin，N.A. Marks，” Hydrogen-free amorphous carbon preparation and properties”，Diamond and Related Materials，3(1994)353.
61. H. Dimigen，C.P. Klages，” Microstructure and wear behavior of metal-containing diamond-like coatings”，Surface and Coatings Technology，49(1991)543..
62. H. Oettel，R. Wiedemann，”Residual stresses in PVD hard coatings”，Surface and Coatings Technology，76/77(1995)265.
63. Y.L. Su， W.H. Kao，”Effect of thickness and carbon content on tribological behaviour and mechanical properties of Ti-C:H coatings”，Wear， 236(1999)221-234
64. K. Bewilogua，H. Dimigen，”Preparation of W-C:H coatings by reactive magnetron sputtering”，Surface and Coatings Technology，61(1993)144.
65. L. Feng，J. Tang，et al.，”Tribological properties of magnetron-sputtered TiC coatings”，Materials Science and Engineering，A257(1998)240-249.
66. H. Holleck，M. Lahres，P. Woll，” Multilayer coatings. Influence of fabrication parameters on constitution and properties”，Surface and Coatings Technology，41(1990)179.
67. J. Tang，J.S. Zabinski，J.E. Bultman，” TiC coatings prepared by pulsed laser deposition and magnetron sputtering”，Surface and Coatings Technology，91(1997)69.
68. Y.L. Su，W.H. Kao，” Optimum Me-DLC coatings and hard coatings for tribological performance”，Journal of Materials Engineering and Performance， 9(2000)38-50
69. U. Wiklund，M. Larsson，”Low friction PVD Titanium-carbon coatings”，Wear，241(2000)234-238.
70. V. Kulikovsky，A. Tarasenko，F. Fendrych，”The mechanical tribological and optical properties of Ti-C:H coatings，prepared by DC magnetron sputtering”，Diamond and Related Materials，7(1998)774-778.
71. V.V. Lyubimov，A.A. Voevodin，S.E. Spassky，et al.，” Stress analysis and failure possibility assessment of multilayer physically vapour deposited coatings”，Thin Solid Films，207(1992)117.
72. B. Bhushan，B.K. Gupta，Handbook of Tribology，2nd edition，Mcgraw-Hill，New York，1997.
73. D.P. Monaghan，D.G. Teer，et al.，” Deposition of wear resistant coatings based on diamond like carbon by unbalanced magnetron sputtering ”，Surface and Coatings Technology，60(1993)525.
74. Y.L. Su，W.H. Kao，”Optimum multilayer TiN-TiCN coatings for wear resistance and actual application”， Wear，223(1998)119-130
75. A.A. Voevodin，R. Bantle，A. Matthews，”Dynamic impact wear of TiCxNy and Ti-DLC composite coatings”，Wear，185(1995)151-157.
76. A. Matthews，A. Leyland，et al.，”Design aspects for advanced tribological surface coatings”，Surface and Coatings Technology，100-101(1998)1-6
77. Y.L. Su ， W.H. Kao ,”Tribological and application of Ti-C:H and Cr-C:H coated tungsten carbide substrate ”, Surface and Coatings Technology,37(2001)293-303
78. D.E. Wolfe，J. Singh，”Titanium carbide coatings deposited by reactive ion beam-assisted，electron beam-physical vapor deposition”，Surface and Coatings Technology，124(2000)142-153.
79. P. Couderc ，Y. Catherine，”Structure and physical properties of plasma-grown amorphous hydrogenated carbon films ”，Thin Solid Films，146(1987)93.
80. Y.L. Su，W.H. Kao，”Tribological behavior and wear mechanisms of Ti-C:H/TiC/TiCN/TiN/Ti coatings when sliding against steel ，bronze and aluminum alloy rods ”，Journal of Materials Science ，36(2001)189-199
81. Y.L. Su ，W.H. Kao，”Optimum Ti-C:H coatings on tungsten carbide inserts for milling application”，Journal of Materials Processing Technology， 108(2000)30-39
82. N.E. Lobiodo，R.R. Aharronov，R. P. Fontana，”An investigation of the properties of Ti-C:H films”，Surface and Coatings Technology，94-95(1997)652-657.
83. T. Cselle，A. Barimani，” Today's applications and future developments of coatings for drills and rotating cutting tools”，Surface and Coatings Technology，76-77(1995)712-718.
84. F. Klocke，T. Krieg，K. Gerschwiler，et al.，” Improved cutting processes with adapted coating systems”，CIRP Annals-Manufacturing Technology，47(1)(1998)65-68.
85. M . Lahres，P. Muller-Hummel，O. Doerfel，” Applicability of different hard coatings in dry milling aluminium alloys”，Surface and Coating Technology，91(1997)116.
86. I.J. Smith，L.A. Donohue，et al，” Thermal stability and oxidation resistance of TiAlN/CrN multilayer coatings”，Surface and Coatings Technology，94/95(1997)315.
87. S. Teisuke，B. Tatsuo，S. Daisuke，et al，”Evaluation of wear and tribological properties of coatings rubbing copper”，Wear，220（1998）154-160
88. S. Prawer，K.W. Nugent，et al，”Systematic variation of the Raman spectra of DLC films as a function of sp2：sp3 composition”，Diamond and Related Materials，5(1996)434
89. P. J. Burnett，D. S. Rickerby，”The relationship between hardness and scratch adhesion”，Thin Solid Films，154(1987)412
90. T. Arai，H. Fujita，M. Watanabe，”Evaluation of adhesion strength of thin hard coatings”，Thin Solid Films，154(1987)391
91. J. Szczyrbowski，G. Brauer，M. Ruske，et al，”Some properties of TiO2 layers prepared by medium frequency reactive sputtering”，Surface and Coatings Technology，112(1999)262