半導體雷射的尺寸微小化是近年來光電元件發展的方向，小尺寸元件所擁有的是高速、低損耗、高密度集成的特性。儘管現今的半導體雷射已經能夠精確的製作到次微米波長的大小，但傳統的半導體雷射卻依然會受限於光學繞射極限，為了達到雷射所需要的回饋機制，需要有長度至少半個光波波長的共振腔，這使得傳統半導體始終無法縮小到數個奈米的尺寸。不過近年來已經有團隊使用了表面電漿子的概念來突破繞射極限並製作出奈米雷射，表面電漿子擁有數十奈米的波長，可以取代傳統光波作為傳遞能量的方式，表面電漿奈米雷射的結構為半導體、金屬與絕緣體，三者形成Semiconductor-Insulator-Metal(SIM)結構，以電漿子的共振腔取代以往的光學共振腔可以有效的縮減雷射元件的體積。
表面電漿奈米雷射的實現需要克服高損耗造成閾值上升的問題，金屬薄膜的品質與平整度對於雷射損耗影響甚鉅，基板無法有效散熱也是造成閾值上升的原因。為了解決上述問題，本論文使用氧化鋅奈米線作為增益介質，並且專注於製作奈米懸空薄膜，相較於以往有基板的元件，懸空薄膜除了可以有效改善散熱的問題，對於將來轉移薄膜至其他目標元件更是有巨大的潛力及未來性。在生物醫學上，若能將元件縮小並轉移至微小細胞，期望能更入微的觀測並對其造成影響，在生物領域上也有相當大的發展性。

In this study, we take the surface plasmon nanolaser as the main research target, we used zinc oxide nanowire as the gain medium and spread the nanowires on a 150nm suspended metal film with 5nm alumina as the insulator layer to realize the semiconductor-insulator-metal (SIM) structure. To effectively reduce heat accumulation, we remove the substrate to get a suspended nano-thin film. When the devices are in contact with air, it can reduce the heat by the flowing air, thereby lowering the laser threshold. Through experiments, we have confirmed that suspending the film can effectively reduce the laser threshold (the minimum threshold can be reduced to 10μW) and increase the operating temperature to 90°C.

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