殘留振動的存在，影響了撓性機件傳輸運動之精度定位，增加達成工作目標所需要的時間。輸入修正，提供了一個有效且快速的減振方法，能有效地縮短安定時間及抑制殘留振動。然而輸入修正屬於廣義的開迴路控制，無法抵抗外界環境干擾，可能造成殘留振動無法完全消除；克服的方法除了減少外在干擾或發展更具強健性之輸入修正方法外，另可考慮結合回授控制系統。於本文中，我們進一步拓展輸入修正法的應用，包括：電磁驅動之Duffing非線性結構系統、長距離移動之線性系統以及與回授控制系統之整合。於Duffing非線性系統方面，本文以模擬分析和實驗驗証討論所發展出之非線性輸入修正結合回授控制之減振性能，其結果顯示：非線性輸入修正結合回授控制不僅能有效縮短系統之安定時間，對於系統受外界環境干擾下，仍具有良好的性能。於長距離移動系統方面，本文依系統本身的性能限制設計輸入修正法，模擬分析和實驗結果顯示，此線性輸入修正法能有效地抑制殘留振動，於加/減速過程所殘留下的Undershoot/Overshoot亦只有未修正前的四分之一。並為解決加/減速過程所殘留的Undershoot/Overshoot，我們應用此輸入修正方法的概念完成定位最佳化設計，成功地將Undershoot/Overshoot的大小壓至需求範圍中。於長距離移動系統與回授控制整合方面，我們亦將輸入修正結合回授控制器並與原輸入修正及純回授控制器比較，其結果顯示，輸入修正結合回授控制同時保有快速安定時間及干擾排除能力。本文研究結果將有助於應用在需要快速且穩定的切換之機械作動需求之精密機械控制相關應用。

　　This thesis concerns the precision positioning and vibration suppression of lightly damped mechanic systems using improved command shaping techniques. Command shaping is an effective technique for suppressing motion-induced residual vibration of lightly damped systems. However, due to its open-loop feature, the steady state behavior may not be well controlled due to the influences of external disturbances. In the first part of this thesis, a scheme to integrate the input shaping with feedback control is proposed. By input shaping, systems can fast reach their target positions while the feedback control ensures the robustness against environment disturbance. This scheme is verified using an electromagnetically driven fixed-fixed beam. The experimental results indicate that the proposed scheme can successfully reduce the rising time and suppress the residual vibration excited by external disturbance. In the second part of this thesis, the input shaping, feedback control, and the proposed shaping with control scheme are applied to a linear motor driven long range motion structural system. This system can also be subjected to electromagnetic force actuation to simulate the dynamics of the next generation magnetic bearing suspended wafer scanner for lithography process. The experimental indicates that these three methods can effectively suppress the vibration during traveling and thus increase the scanning rate significantly but an undershoot and an overshoot are observed at the starting and stopping of the stepper. Future research will be focused on how to reduce the amplitude of them while keeping the moving speed as fast as possible.

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