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研究生： 林俊全
Lin, Chun-Chuan
論文名稱： 鎢鈦鍍膜之磨潤性質研究
Tribological performance of W-Ti coatings
指導教授： 蘇演良
Su, Yean-Liang
學位類別： 碩士
Master
系所名稱： 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年： 2010
畢業學年度： 98
語文別： 中文
論文頁數： 105
中文關鍵詞： 磨潤 、鎢 、鈦 、鍍膜
外文關鍵詞： Tribological, Ti, W, Coating
相關次數： 點閱：112  下載：1 
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    • 本研究採用封閉式非平衡磁控濺鍍，利用漸進層的方式濺鍍。主要目的為探討TiN表面披覆W、Ti和W(N)鍍膜於高溫氧化前後之磨潤性質、機械性質及切削性能。實驗主要分為兩部份：第一部份探討TiN披覆W、Ti和W(N)鍍層的機械性質；第二部份探討不同的溫度（500 ℃、600 ℃）氧化一小時的機械性質；最後選用較佳鍍層進行乾車削及印刷電路板微鑚針試驗，以瞭解鍍膜披覆刀具之實際在工業上的應用。
    由實驗結果可知，W-Ti鍍層於Ti含量為5 %（鈦靶電流為0.47 A）時，鍍層擁有較高的奈米硬度35.2 GPa（10 mN）、微硬度Hv0.01 1545以及較好磨耗特性。W-Ti05鍍層經500 ℃、600 ℃一小時高溫氧化處理後，硬度及抗磨耗性質則都下降。由實際的切削實驗結果得知，W-Ti05鍍層能有效降低車刀及鑚針磨耗量，可降低車刀刀腹磨耗量48 %及微鑚針刀角磨耗量58 %。

    The TiN/TiWN/W-Ti multilayer coatings were deposited on the high speed steel substrate by closed field unbalanced magnetron sputtering system. The coatings were deposited with different tungsten and titanium ratios on the surface. The main purpose of this study is to research the mechanical and tribological properties and cutting performance of the TiN/TiWN/W-Ti multilayer before and after high thermal oxidation.
    The experiment was divided into two stages. In first stage, The effect of the mechanical properties of tungsten, titanium and tungsten nitride coatings were deposited on TiN coating. In second stage, The effect of the mechanical properties of oxidation treatment at 500 ℃ and 600 ℃. Finally, the cutting performance of the optimal coatings were understood in the turning and micro-drilling tests.
    The results reveal that the highest nano hardness of 35.2 GPa and the micro hardness of Hv0.011545 have the best wear resistance were performed by the W-Ti coatings with the titanium of at.5 %. the hardness and tribological properties decreased of W-Ti05 coating after 500 ℃ and 600 ℃ one hour oxidation treatment.
    In actually turning and micro-drilling tests, the W-Ti05 coatings will be deposited on cutting tools can be reduced about 48 % and 58 %, respectively.

    摘要 II Abstract III 總目錄 V 表目錄 VII 圖目錄 VIII 緒論 1 第一章 緒論 1 1-1 前言 1 1-2 研究動機 2 第二章 理論探討與文獻回顧 3 2-1 薄膜成形 3 2-1-1 薄膜成形技術 3 2-1-2 薄膜成形技術的種類 3 2-1-3 成形技術與用途 5 2-2 磁控濺鍍理論 5 2-2-1 直流濺鍍原理 5 2-2-2 磁控濺鍍目的 6 2-3 奈米硬度 7 2-3-1 基本原理 7 2-3-2 奈米硬度的計算 8 2-3-3 奈米硬度機的校正 10 2-3-3-1 探針面積函數的校正 10 2-3-4 奈米硬度誤差 12 2-3-4-1 黏著效應 12 2-3-4-2 尺寸效應 12 2-3-4-3 表面粗糙度效應 13 2-3-4-4 凸起和陷入效應 13 2-3-4-5 奈米硬度數值的差異 14 2-4 鍍膜性質 14 2-4-1 氮化鈦（TiN）鍍膜性質 14 2-4-2 鎢及氧化鎢性質 16 2-4-3 鈦及氧化鈦性質 18 第三章 實驗方法與步驟 20 3-1 實驗目的 20 3-2 實驗流程 20 3-3 實驗方法與規劃 21 3-3-1 鍍層參數與鍍膜安排 21 3-3-2 實驗材料 22 3-3-3 成份分析 22 3-3-4 結構分析 23 3-3-5 硬度實驗 23 3-3-6 附著性實驗 24 3-3-7 磨耗實驗 25 3-3-8 氧化實驗 25 3-3-9 車削實驗 25 3-3-10 鑚削實驗 26 3-3-11 表面、斷面和磨耗型態分析 27 3-4 實驗設備 27 第四章 鍍層實驗結果與討論 30 4-1 設計鍍層變化對鍍膜的影響 30 4-1-1 鍍膜基本性質 30 4-1-1-1 鍍膜微結構 30 4-1-1-2 鍍膜表面之粗糙度分析及斷面SEM觀察 31 4-1-1-3 鍍膜膜厚及成份分析 32 4-1-1-4 鍍膜硬度 33 4-1-2 鍍膜的附著性 33 4-1-3 鍍膜耐磨實驗 34 4-1-4 小結 35 4-2 高溫熱處理對鍍膜的影響 35 4-2-1 鍍膜基本性質 36 4-2-1-1 鍍膜微結構 36 4-2-1-2 鍍膜之表面及斷面SEM觀察 36 4-2-1-3 鍍膜硬度 38 4-2-2 鍍膜的附著性 39 4-2-3 鍍膜的磨耗性 39 4-3 乾車削實驗 41 4-4 PCB微鑚削實驗 42 第五章 結論與未來展望 45 5-1 結論 45 5-2 未來展望 47 第六章 參考文獻 48

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