簡易檢索 / 詳目顯示

研究生: 馬茀綺
Ma, Fei-Chi
論文名稱: 新型微電動液壓幫浦驅動之微混合器
Novel EHD Pump Driven Micro Mixers
指導教授: 呂宗行
Leu, T. S.
學位類別: 碩士
Master
系所名稱: 工學院 - 航空太空工程學系
Department of Aeronautics & Astronautics
論文出版年: 2002
畢業學年度: 90
語文別: 中文
論文頁數: 89
中文關鍵詞: 行進波微混合器電動液壓幫浦離子牽引
外文關鍵詞: EHD pump, micro mixers, traveling wave, ion drag
相關次數: 點閱:83下載:6
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 近幾年來,由於微機電系統(Micro-electro-mechanical system, MEMS)技術的成熟,其可被廣泛地運用在不同的學問上,例如:光電、化學、生醫檢測、機械、航空等方面。微總體分析系統(Micro Total Analysis System)便是將生醫檢測上取樣、樣本傳輸、混合、分離,及偵測等功能,利用微機電技術將分析儀器縮小並整合到一信用卡大小之生醫晶片上。在檢體(Sample)與試劑(Reagent)的混合中,傳統上是利用外界的擾動而產生之紊流,幫助二者的混合,但在微管道中,其流場多屬層流,很難到達紊流的狀況而幫助不同液體間的混合。本研究利用微機電製程製作出一微混合器,利用微電動液壓幫浦驅動二種不同液體,在流場中產生一側向力,或是產生一微漩渦,來達到混合的效果。同時,建立完整的實驗方法與設備,來觀察微管道中二種液體混合的情形。

    Due to the maturity of MEMS( Micro-Electro-Mechanical-System ) technology recently, it can be broadly used in many different applications, for example: optoelectronics, chemical, biochemical test, mechanical, aerospace…etc..
    μTAS( Micro Total Analysis System) uses MEMS technology to minimize and integrate analytical equipments into a credit-card sized biochip which includes sampling, sample transport, reaction, separation and detection functions. In the mixing of sample and reagent, it used external disturbance to generate turbulent flow to enhance mixing. But the flow field in the microchannel belongs to laminar flow mostly, it’s hard to achieve the turbulent flow for mixing enhancement. This research fabricated a micro mixer driven by EHD pumps which generate a side force or a micro vortex to enhance mixing. Microscopic flow visualization experimental setup is also established to visualize the flow field in the micro mixer.

    目 錄 中文摘要Ⅰ 英文摘要Ⅱ 誌謝Ⅲ 目錄Ⅳ 表目錄Ⅵ 圖目錄Ⅶ 符號說明Ⅹ 第一章緒論1 1.1 背景1 1.2 動機與目的3 1.3 文獻回顧4 第二章 微混合器設計與實驗設備8 2.1 電動液壓學(Electrohydrodynamics) 11 2.1.1庫倫力(Coulomb force) 12 2.1.2 介電泳力13 2.1.3 Korteweg-Hemholtz force14 2.1.4 Electrostrictive force 14 2.2 微電動液壓幫浦 15 2.3 微電動液壓幫浦之二種模式 16 2.3.1 離子牽引( Ion Drag )模式之數學推導 16 2.3.2行進波( Traveling Wave )模式17 2.3.2.1方形行進波形式 18 2.3.3 進行波( Traveling Wave )模式之數學推導19 2.4 微混合器之設計 25 2.4.1 離子牽引( Ion Drag )模式運用於微混合器 26 2.4.2 行進波( Traveling Wave )模式運用於微混合器 26 2.5 實驗設備 26 第三章 製程 29 3.1 微混合器製作之流程 29 3.1.1 電極板製作 29 3.1.1.1 光罩底片之繪製與製作 29 3.1.1.2 晶片清潔 30 3.1.1.3 金屬薄膜濺鍍 30 3.1.1.4 微影技術 31 3.1.2微管道之製作 34 3.1.3晶片接合技術 34 3.1.3.1陽極接合(Anodic bonding) 35 3.1.3.2熱融合接合(Thermal fusion bonding) 35 3.1.3.3 HF Bonding 36 3.2 可行性評估 37 3.3 第一代微混合器37 3.4 第二代微混合器 39 3.5 第三代微混合器 42 3.6 封裝(Package) 43 第四章 結果與討論 44 4.1 工作流體的選擇 44 4.2顯微視流實驗結果 46 4.2.1 離子牽引( Ion Drag )模式47 4.2.2 行進波( Traveling Wave )模式49 4.3 討論50 第五章 結論52 參考文獻54

    [1] http://www.pharmacology2000.com/General/Introduction/fick1.htm
    [2] Miyake, R.; Lammerink, T.S.J.; Elwenspoek, M.; Fluitman, J.H.J." Micro Mixer with Fast Diffusion" Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE. , 1993
    [3] Branebjerg, J.; Gravesen, P.; Krog, J.P.; Nielsen, C.R." Fast mixing by lamination" Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on , 1996
    [4] Ajay A. Deshmukh, Dorian Liepmann, and Albert P. Pisano" Continuous Micromixer with Pulsatile Micro Pumps" Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 4-8 June 2000, 73-6.
    [5] Robin H. Liu, Mark A. Streamler, Kendra V. Sharp, Michael G. Olsen, Juan G. Santiago, Ronald J. Adrian, Hassan Aref , and David J.Beebe,"Passive Mixer in a three Dimensional Serpentine Microchannel,"Tech. Digest 10th Intl. Conf. on Solid-State Sensors and Actuators (Transducers '99) (Sendai, Japan) 730-733 (1999).
    [6] Yi-Kuen Lee, Joanne Deval, Patrick Tabeling, and Chih Ming Ho"Chaotic Mixing in Electrokinetically and Pressure Driven Micro Flows" IEEE 14th International Conference on Micro Electro Mechanical System (MEMS 2001), Interlaken, Switzerland, 2001.
    [7] Vibhu Vivek, Yi Zeng, and Eun Sok Kim,"Novel Acoustic-wave Micromixer" IEEE International Micro Electro Mechanical Systems Conference, Miyazaki, Japan, January 23-27, 2000
    [8] Joanne Deval, Patrick Tabeling and Chih-Ming Ho, “A Dielectrophoretic Chaotic Mixer”, Proceeding of the IEEE 15th Annual Workshop of MEMS, 2002, U.S.A, p36.
    [9] Hiroaki Suzuki, Chih-Ming Ho, “A magnetic Force Driven Chaotic Micro-Mixer”, Proceeding of the IEEE 15th Annual Workshop of MEMS, 2002, U.S.A, p40.
    [10] Antonio Castellanos “Electrohydrodynamics”
    [11] http://www.ibmm.infomatics.bangor.ac.uk/pages/science/dep.htm
    [12] Fuhr, G.; Hagedorn, R.; Muller, T.; Benecke, W.; Wagner, B. “ Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivity”Microelectromechanical Microelectromechanical Systems, Journal of , Volume: 1 Issue: 3 , Sept. 1992, pp.141 –146
    [13] William F. Pickard “Ion Drag Pumping.Ι. Theory” Journal of Applied Physics, Vol.34, No.2, pp.246-258
    [14] Jin-Woo Choi, Yong-Kweon Kim, “Micro Electrohydrodynamic Pump Driven by Traveling Electric Fields”, Industry Applications Conference, 1995.Vol.2, pp.1480-1484
    [15] William H. Hayt, Jr. John A. Buck, “Engineering Electromagnetics”
    [16] S. M. Sze, “Semiconductor Sensors”
    [17] Nakanishi, H.; Nishimoto, T.; Nakamura, N.; Nagamachi, S.; Arai, A.; Iwata, Y.; Mito, Y., “Fabrication of Electrophoresis Device on Quartz and Glass Substrates Using a Bonding with HF Solution” Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on , 1997

    下載圖示 校內:立即公開
    校外:2002-07-22公開
    QR CODE