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研究生: 許育銘
Hsu, Yu-Ming
論文名稱: 引腳型塑膠封裝元件外露式晶片座脫層之研究
The Study of Exposed Die Paddle on Delamination for Lead Type Plastic Package
指導教授: 周榮華
Chou, Jung-Hua
學位類別: 碩士
Master
系所名稱: 工學院 - 工程科學系碩士在職專班
Department of Engineering Science (on the job class)
論文出版年: 2014
畢業學年度: 102
語文別: 中文
論文頁數: 68
中文關鍵詞: 引腳型塑膠封裝脫層電解效應有限元素分析熱應力
外文關鍵詞: Delamination, Electrolysis, Die pad de-flash
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  • 引腳型塑膠封裝(Lead Type Plastic Package, LTPP)中,外露式晶片座,經過電解去膠製程所產生之電解效應(Electrolysis),可因氫離子(H+)與電子(e-)反應產生氫氣(H2),氫氣的膨脹會掀離銅導線架晶片座與高分子材料的接合面造成界面脫層。分離式地線區的外露晶片座主要目的在避免地線區域直接受應力、電解效應與脫層之影響。本文利用有限元素(FEM)電腦分析,對LTPP不同分離式地線區的外露晶片座結構設計,進行熱應力數值模擬,藉此改善目前地線區於晶片座邊緣四周的脫層。本文以高熱應力之晶片座設計配合實驗,驗證電解效應及不同去膠製程參數對界面脫層之影響,得到(1)電解去膠製程中所施予的電壓越大脫層發生的比例越高,反之電壓越低脫層發生的比例越低,但不論電解去膠電壓高或低,均會有電解效應之影響導致脫層;(2)無電壓化學去膠的組別中,並未有任何脫層的狀況;此發現可應用於所有外露式晶片座之脫層改善。

    In lead type plastic package, the hydrogen produced by the reaction of electrolysis generated hydrogen ion and electrons could cause delamination of the interface between the copper lead frame die paddle and the polymer material. This research employed finite element numerical analysis to simulate the thermal stress on the exposed die paddle structure of various designs for different LTPP isolated ground areas. The exposed die paddle in the isolated ground area was aimed to avoid the ground area being directly influenced by the stress, electrolysis effect and delamination. This in terms improved the current delamination around the ground area and the edge of the die paddle. This research used the high thermal stress die paddle design in the experiments to verify the impact of the electrolysis effect and different de-flash process parameters on the interface delamination. The conclusions were first the higher voltage used for the electrical de-flash process resulted in higher percentage of delamination and lower voltages caused less percentage of delamination phenomenon. However delamination occurred regardless of the extent of applied voltages. Second, no delamination was observed in non-electrolysis chemical de-flash process cell. Such discovery can be applied to improve all exposed die paddle delamination.

    中文摘要............Ⅰ 英文摘要............Ⅱ 致謝................Ⅴ 目錄................Ⅵ 表目錄.............Ⅸ 圖目錄...........Ⅹ 符號...........ⅩⅢ 第一章 緒論............1 1-1 前言...........1 1-2 研究動機與目的..........2 1-3 文獻回顧...........5 第二章 塑膠封裝及產品可靠度測試介紹..........8 2-1 塑膠封裝介紹...........8 2-1-1 塑膠封裝的主要目的.........8 2-1-2 封裝製程的技術層級.........9 2-1-3 封裝的型態分類.........10 2-2 引腳型塑膠封裝製程介紹........11 2-2-1 晶圓背面研磨..........11 2-2-2 晶圓安置..........13 2-2-3 晶圓切割..........13 2-2-4 晶粒黏合..........14 2-2-5 銀膠烘烤..........15 2-2-6 電漿清洗..........16 2-2-7 銲線..........17 2-2-8 封膠..........18 2-2-9 穩定烘烤..........18 2-2-10 印字...........19 2-2-11 去膠去緯...........20 2-2-12 電解去膠...........20 2-2-13 電鍍...........21 2-2-14 去框/成型..........21 2-2-15 外觀檢驗...........22 2-2-16 包裝...........22 2-3 塑膠封裝產品可靠度測試介紹........23 2-3-1 塑膠封裝產品可靠度之測試項目......24 2-3-1-1 短期可靠度測試.........24 2-3-1-2 長期可靠度測試.........25 2-3-2 塑膠封裝產品可靠度之驗證機制......27 第三章 引腳型塑膠封裝外露式晶片座之脫層.........32 3-1 塑膠封裝材料基本特性.........32 3-1-1 銅導線架特性..........32 3-1-2 封模膠餅特性..........33 3-2 引腳型外露式晶片座構裝與膠餅脫層介紹.....38 3-2-1 電解效應..........38 3-2-2 外露式晶片座地線區應力分析.......40 第四章 實驗結果與討論...........41 4-1 電解效應及化學去膠製程能力實驗設計及步驟.....41 4-2 電解效應實驗結果與討論........46 4-2-1 電解效應實驗結果........46 4-2-2 超音波掃描脫層狀況.........48 4-2-3 電解效應實驗結果討論........49 4-3 化學去膠製程能力實驗結果與討論......50 4-3-1 化學去膠製程能力實驗結果........50 4-3-2 化學去膠製程能力實驗各組品質驗證結果......52 4-3-3 化學去膠製程能力實驗結果討論......53 4-4 減低外露式晶片座地線區應力改善方法......54 4-4-1 外露式晶片座設計模式........54 4-4-2 有限元素模擬方法.............55 4-4-3 外露式晶片座熱應力模擬分析.........58 4-4-4 外露式晶片座熱應力模擬分析結果........58 第五章 結論與未來研究方向...........63 5-1 結論............63 5-2 未來研究方向.........64 參考文獻...........65 附錄.............67

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