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研究生: 林大維
Lin, Da-Wei
論文名稱: 自旋幫浦探討Bi2Te3/WSe2雙層膜之自旋電荷轉換效應
Study of spin-to-charge conversion in Bi2Te3/WSe2 bilayers using spin pumping technique
指導教授: 黃榮俊
Huang, Jung-Chun-Andrew
學位類別: 碩士
Master
系所名稱: 理學院 - 物理學系
Department of Physics
論文出版年: 2026
畢業學年度: 114
語文別: 中文
論文頁數: 145
中文關鍵詞: 自旋幫浦spin-to-charge conversionTMDsTopological insulatorInverse Rashba-Edelstein effect (IREE)Rashba effect
外文關鍵詞: Spin pumping, spin-to-charge conversion, TMDs, Topological insulator, Inverse Rashba-Edelstein effect (IREE), Rashba effect
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  • 本研究以自旋幫浦技術探討 Bi2Te3/WSe2 雙層膜之自旋-電荷轉換特性,並與Bi2Te3 薄膜交叉比較;Bi2Te3 作為傳統拓樸絕緣體具有強自旋軌道耦合與拓樸表面態等物理特性,WSe2 做為二維材料則具強自旋軌道耦合與Rashba 介面態,由於兩者皆為凡得瓦層狀材料,其表面缺乏懸掛鍵(dangling-bond-free surface),因此可透過凡得瓦力(van der Waals force)形成原子尺度清晰且電子結構明確的異質介面(atomically clean and electronically sharp interface)。此異質結構利於探討拓樸表面態與 Rashba 介面態之交互作用(interplay)對轉換效率之影響。
    本研究以分子束磊晶製備不同厚度之 Bi2Te3 與 Bi2Te3/WSe2(1ML),利用 Raman、RHEED、XRD、XRR、AFM 與 XPS 分析薄膜品質與介面特性;Raman、AFM與RHEED結果顯示,WSe2 具有單層、晶體品質(high crystalline quality)和平整表面(smooth surface)以利於後續異質結構磊晶。XRD與XRR結果顯示Bi2Te3 及 Bi2Te3/WSe2 皆呈現良好結晶性、c 軸優選取向與可控厚度;AFM與RHEED 顯示 Bi2Te3 具有層狀成長特徵、高晶體品質(high crystalline quality)和平整表面(smooth surface );XPS depth mapping則確認介面間 Bi–Te 與 W–Se 鍵結訊號,且未觀察到明顯 Bi-Se鍵結,顯示介面未發生顯著化學混層。
    自旋幫浦量測結果顯示,單層 Bi2Te3 具有明顯自旋-電荷轉換行為,且 λIEE 呈厚度依賴性,其中 8 nm Bi2Te3 具有最高轉換效率,λIEE 約為 0.92 nm。相較之下,Bi2Te3/WSe2 異質結構之整體 λIEE 低於單層 Bi2Te3,8 nm 樣品約為 0.43 nm,下降約 53%。此結果顯示 WSe2 引入之 Rashba 介面態未有效增強轉換效率,可能因其與 Bi2Te3 拓樸表面態之自旋極化貢獻相互抵消,導致轉換效率受到抑制。

    The spin-to-charge conversion properties of Py/Bi2Te3 thin films and Py/Bi2Te3/WSe2 heterostructures were investigated by room-temperature spin pumping. Raman, RHEED, XRD, XRR, AFM, and XPS analyses confirmed the crystalline quality, c-axis orientation, thickness control, surface morphology, and chemical bonding of the samples. AFM revealed layered Bi2Te3 growth with a step height of about 1 nm, corresponding to one quintuple layer, while depth-resolved XPS verified Bi–Te and W–Se bonding without obvious Bi–Se formation. Spin pumping measurements showed that Py/Bi2Te3 exhibited the highest inverse Edelstein length (λIEE) of 0.92 nm at 8 nm.
    In Py/ Bi2Te3/ WSe2, λIEE decreased to about 0.43 nm at 8 nm, indicating that WSe2-induced Rashba interfacial states destructively couple with Bi2Te3 topological surface states and suppress spin-to-charge conversion

    摘要 I Abstract III 致謝 XIV 目錄 XV 圖目錄 XVIII 表目錄 XXII 第一章 緒論 1 1-1 前言 1 1-2 文獻回顧 3 1-2-1 文獻一 3 1-2-2 文獻二 6 1-3 動機 8 第二章 實驗相關理論原理 10 2-1 自旋霍爾效應(Spin Hall effect, SHE) 10 2-2 反轉自旋霍爾效應(Inverse spin hall effect, ISHE) 12 2-3 Edelstein effect 14 2-4 Inverse Edelstein effect 16 2-5 鐵磁共振與自旋幫浦機制(Ferromagnetic resonance and spin pumping mechanism) 18 第三章 實驗製備與儀器介紹 23 3-1 製程儀器 23 3-1-1 分子束磊晶系統 23 3-1-2 共濺鍍薄膜沉積系統(Co-Sputtering Deposition System) 29 3-2 量測儀器 33 3-2-1 X光繞射儀(X-Ray Diffraction, XRD) 33 3-2-2 原子力顯微鏡(Atom Force Microscopy, AFM) 37 3-2-3 微拉曼激發光譜儀(micro-Raman spectroscopy) 40 3-2-4 X射線光電子能譜儀(X-ray Photoelectron Spectroscopy XPS) 42 3-2-5 自旋幫浦系統(Spin pumping system) 43 3-2-6 四點電阻量測 45 3-3 主要實驗流程 46 3-3-1 MBE樣品製備流程 47 3-3-2 共濺鍍薄膜沉積系統(Co-Sputtering Deposition System)製備步驟 49 3-3-3 Spin pumping量測樣品製備與分析流程 49 3-3-3-1 Spin pumping量測樣品製備 49 3-3-3-2 數據處理 50 3-3-3-3 四點電阻量測(4-points probe method) 55 3-3-3-4 自旋-電荷轉換效率計算 56 第四章 實驗結果與討論 59 4-1 實驗架構 59 4-2 薄膜表徵確認 61 4-2-1 WSe2 薄膜表徵分析 61 4-2-1-1 WSe2拉曼量測與AFM結果與分析 61 4-2-1-2 WSe2 Rheed分析 62 4-2-2 Bi2Te3薄膜表徵分析 64 4-2-2-1 Bi2Te3 RHEED量測結果與分析 64 4-2-2-2 Bi2Te3 AFM 量測結果與分析 66 4-2-2-3 Bi2Te3 XRD和XRR量測結果與分析 68 4-2-2-4 Bi2Te3 XPS 量測結果與分析 73 4-2-3 Bi2Te3 / WSe2薄膜表徵分析 75 4-2-3-1 Bi2Te3 / WSe2 RHEED量測結果與分析 75 4-2-3-2 Bi2Te3 / WSe2 XRD和XRR結果與分析 78 4-2-3-3 Bi2Te3 / WSe2 XPS 量測結果與分析 81 4-3 鎳鐵合金(Ni80Fe20, Py)飽和磁化量和阻尼係數分析 86 4-4 單層Bi2Te3自旋幫浦量測結果與分析 90 4-4-1 鐵磁共振分析與自旋流密度計算 90 4-4-2 自旋幫浦電壓訊號處理與電荷流計算 94 4-4-3 不同厚度Bi2Te3之自旋轉換效率比較 99 4-5 雙層Bi2Te3/WSe2自旋幫浦量測結果與分析 101 4-5-1 鐵磁共振分析與自旋流密度計算 101 4-5-2 自旋幫浦電壓訊號處理與電荷流計算 105 4-5-3 不同厚度Bi2Te3之自旋轉換效率比較 107 4-6 Bi2Te3/WSe2與Bi2Te3之自旋電荷轉換效率比較 110 4-7 Bi2Te3、Bi2Se3、Sb2Te3/WSe2自旋電荷轉換效率比較 112 第五章 結論 114 參考文獻 116

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