本研究利用封閉式非平衡磁控濺鍍系統發展應用於工業的氮化鉻鎢、氮化鈦鎢及碳化鉻鎢奈米多層鍍膜技術。論文中探討鎢元素、微晶大小、表面粗糙度及調變週期對氮化鉻、氮化鈦及碳化鉻鍍膜，奈米結構及奈米機械性質的影響。使用奈米壓痕及奈米磨耗試驗研究奈米多層鍍膜的機械及磨潤性質。利用原子力顯微鏡、掃瞄式電子顯微鏡、穿透式電子顯微鏡及X光繞射儀研究奈米多層膜的微觀結構。最後,利用車削及印刷電路板微鑽削實驗分析氮化鉻鎢、氮化鈦鎢及碳化鉻鎢鍍膜的切削性能。

　　實驗結果顯示，添加3~8 at.%的鎢元素於氮化鉻鍍膜內，對其硬度值有顯著的影響。鎢含量6 at.%的Cr-W0.06-N鍍膜具有最高的硬度值67.2 GPa。但進一步添加鎢含量至16 at.%，硬度反而下降至36 GPa。隨著鎢含量的提升，氮化鈦鎢鍍膜硬度也隨之增加。鎢含量14 at.%的Ti-W0.14-N鍍膜具有最高的硬度值46.3 GPa。添加12~15 at.%的鎢元素於碳化鉻鎢鍍膜內，對其硬度值並無顯著影響。奈米磨耗試驗中，Cr-W0.06-N和Ti-W0.14-N分別為氮化鉻鎢、氮化鈦鎢鍍膜中，具有最佳的耐磨耗性質的鍍膜。而60V2鍍膜為碳化鉻鎢中，具有最低摩擦係數及磨耗深度鍍膜。H/E參數值(材料破壞前的彈性應變)越高，鍍膜的磨耗深度越淺。因此H/E參數較單獨使用硬度值更能準確判斷鍍膜的抗磨耗性。

　　隨著鎢含量的增加，氮化鉻鎢、氮化鈦鎢的微結構可分為三種類型。第一種具有奈米結晶或非晶態結構且其表面形貌相當細緻，如Cr-W0.03-N和Ti-W0.01-N鍍膜。第二種擁有緻密和纖細的柱狀晶結構而其表面形貌仍為細緻的結晶態。如Cr-W0.06-N, Cr-W0.08-N, Ti-W0.06-N和Ti-W0.14-N鍍膜。第三種為具有粗大柱狀結晶且表面形貌十分粗糙的鍍膜，如Cr-W0.13-N, Cr-W0.16-N, Ti-W0.29-N和Ti-W0.38-N鍍膜。碳化鉻鎢鍍膜則隨著甲烷流量增加，其微結構由緻密柱狀結晶發展成鬆散類非晶型態。而底材偏壓對碳化鉻鎢鍍膜微結構並無顯著影響。40V2,60v2和80V2鍍膜皆為緻密且發展良好的柱狀晶結構

　　隨著鎢含量的提升，氮化鉻鎢、氮化鈦鎢及碳化鉻鎢鍍膜的微晶大小也隨之增大。氮化鉻鎢、氮化鈦鎢及碳化鉻鎢鍍膜的表面粗糙度，隨著微晶大小的增大而顯著提升。在奈米磨耗試驗中，表面粗糙度和氮化鉻鎢、氮化鈦鎢及碳化鉻鎢鍍膜的磨耗行為有強烈的關連性。隨著表面粗糙度的增加，摩擦係數及磨耗深度亦隨之明顯變大。隨著多層膜調變週期的增加，氮化鉻鎢和氮化鈦鎢鍍膜的微晶大小也隨之明顯變大，而碳化鉻鎢鍍膜則略微增大。

　　車削及印刷電路板微鑽削實驗中，Cr-W0.06-N, Ti-W0.14-N和60V2鍍膜分別為氮化鉻鎢、氮化鈦鎢及碳化鉻鎢鍍膜中具有最佳抗磨耗能力的鍍膜。在印刷電路板實驗鑽孔數為兩萬孔的情況下，60V2是所有奈米多層鍍膜中具有最小刀角磨耗的鍍膜。

　　This study utilizes the closed-field unbalanced magnetron sputtering system to develop the Cr-W-N, Ti-W-N and Cr-W-C nano-multilayered coatings for industrial applications. Effect of tungsten, crystallite size, surface roughness and modulation period on the nano-structure and nano-mechanical properties of CrN, TiN and CrC coatings was discussed in this dissertation. Mechanical and tribological properties of these nano-multilayered coatings were investigated by the nanoindentation technique and nano-wear test. The microstructure of these nano-multilayered coatings was examined by AFM, SEM, TEM and XRD in terms of crystal structure and crystallite size. Finally, the cutting performance of the Cr-W-N, Ti-W-N and Cr-W-C coated cemented carbide tools was analyzed in the turning and PCB micro-drilling test.

　　Results of the experiments show that adding 3~8 at.% tungsten into the Cr-N coating influence the hardness significantly. The hardness rises steeply and a maximum of 67.2 GPa is reached approximately 6 at.% W of the Cr-W0.06-N coating. Upon further increasing the tungsten content, the hardness drops rapidly to approximately 36 GPa at 16 at.%. The hardness is increasing with an increase of the tungsten content for the Ti-W-N coatings. The Ti-W0.38-N coatings with 38 at.% tungsten possess the highest hardness of 46.3 GPa. For the Cr-W-C coatings, adding 12~15 at.% tungsten does not influence the hardness significantly. The optimum Cr-W-N and Ti-W-N coatings for sliding against spherical diamond indenter in the nano-wear test are the Cr-W0.06-N and Ti-W0.14-N coatings. For the Cr-W-C coatings, the 60V2 coating obtains the lowest wear depth and friction coefficient among all Cr-W-C coatings. The wear depth decreases with an increase of the H/E factor (elastic strain to failure) in the nano-wear test. The H/E factor is a more suitable parameter for predicting wear resistance than is hardness alone.

　　With increasing the tungsten content, the microstructure of Cr-W-N and Ti-W-N coatings can be divided into three types. The first type, Cr-W0.03-N and Ti-W0.01-N coatings, is nanocrystalline/amorphous and the surface topography is featureless and very smooth. The second type has the slender columnar grain structure and surface topology changes into crystalline, and can be found in the Cr-W0.06-N, Cr-W0.08-N, Ti-W0.06-N and Ti-W0.14-N coatings. Moreover, the third type is coarse columnar and the surface topology is rough crystalline structure and we can found in the Cr-W0.13-N, Cr-W0.16-N, Ti-W0.29-N and Ti-W0.38-N coatings. An obvious evolution from dense columnar to loose amorphous-like microstructure in the Cr-W-C coatings is observed with increasing the flow rate of methane gas from 2 to 6 sccm at 35V. There is no significant evolution of the microstructure with an increase in the substrate bias. The 40V2, 60V2 and 80V2 coatings show dense and well-developed columnar structures.

　　The crystallite sizes of the Cr-W-N, Ti-W-N and Cr-W-C coatings are increasing with increase of the tungsten concentration. The surface roughness of the Cr-W-N, Ti-W-N and Cr-W-C coatings is obviously increased with increase of the crystallite size. The surface roughness and the wear behavior of the Cr-W-N, Ti-W-N and Cr-W-C coatings in the nano-wear test have strong correlation. The higher the surface roughness of the coatings is, the greater the coefficient of friction and wear depths of the coatings are. An obvious increase in crystallite size is observed in the case of the Cr-W-N and Ti-W-N coatings as the modulation period is increased, whereas only minor change in the crystallite size is observed in the case of the Cr-W-C coatings.

　　The Cr-W0.06-N, Ti-W0.14-N and 60V2 coatings have the best wear resistance for Cr-W-N, Ti-W-N and Cr-W-C coatings in the turning and PCB micro-drilling test, respectively. By drilling the same number of 20,000 holes, the 60V2 coated micron-drill has the smallest corner wear among all nano-multilayered coatings in PCB micro-drilling test.

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