本研究探討添加不同種類的燒結助劑於兩種AlN粉體中，配合特殊燒結製程製備氮化鋁陶瓷。燒結後試片經XRD晶相鑑定試片晶相為AlN相，成功地將AlN在一般高溫爐中燒結緻密。其關鍵在於特殊燒結製程，有別於過去文獻製備氮化鋁陶瓷皆在還原氣氛爐中燒結緻密，大大降低了生產成本。
研究中探討添加不同比例的釤系、釓系與釔系等稀土氧化物和不同比例的鈣系的鹼土金屬氧化物相互搭配混合6小時，經真空烘箱加熱50℃、5小時乾燥粉體，然後研磨造粒過100目篩網，造粒粉體以單軸加壓40MPa加壓成型，再冷均壓(CIP)98MPa，以550℃燒除黏結劑PVB，然後將坯體埋入粉末床及氮化硼隔板中，置入氧化鋁坩堝中，放入高溫爐通氮氣加熱至1700℃持溫不同時間進行燒結。燒結後試片藉由XRD分析主要結晶相及二次相成分與數量、以SEM觀察試片破斷面以了解晶粒生長型態、晶粒大小與晶界相分佈位置，以熱傳導分析儀量測試片熱傳導值，並以維氏硬度計量測試片硬度。
研究結果顯示三種組合助燒劑在1700℃持溫1、3、5時間，可以得到97%以上的相對緻密度，其相對密度與線收縮率及機械性質之維氏硬度值的走勢呈同步變化趨勢，以試片TA3Y1C的相對密度99.4%(3.34g/cm3)與維氏硬度值1310kg/mm2為測量的最高值。相同比例條件下，三種組合助燒劑在1700℃持溫3hr的燒結體試片結晶型態，以試片TA1Y1C較佳，其相對密度98.6%(3.26 g/cm3)、線收縮率17.3%、熱傳導值147 W/mK及維氏硬度1209 kg/mm2 。

The study was sintering AlN powder with kinds of additives under specific sintering process to manufacture AlN ceramic bodies. It was successful to obtain dense AlN ceramic bodies under 1700℃ of MoSi2 heating furnace. The specific sintering process of this study was different from previously reported which all sintered AlN ceramics under reducing atmosphere of graphite resistance furnace to avoid oxidation. To change the heating furnace from the graphite resistance to the MoSi2 material, the product cost could be greatly decreased.
In this work, the sintering additives were choiced rare-earth oxides, such as Sm2O3, Gd2O3, Y2O3 and CaO. The calculated ratio of raw materials were vibration-milled for 6 h with ethanol. The slurry was dried in a vacuum oven about 50℃ for 5 h. Then the powder was ground and sieved through a 100-mesh sieve. Ceramic green bodies were uniaxially pressed at 40 MPa first, and then under cold isostatically pressed (CIP ped) at 98MPa. This green bodies were heated at 550℃ to remove organic binders. The green pellets were embedded in carbon powder on a BN board, and sintered at 1700℃ with N2 atmosphere for 1,3,5 h respectively. X-ray diffractometry (XRD) was used to identify the produced phases. SEM was used to observe the fractured surfaces of sintered bodies to discover the grain morphology. Thermal conductivity was measured by the laser flash equipment(Laser Flash LFA-447). Hardness of sintered specimen was measured by Vicker’s hardness meter.
The results of study showed that three kinds of sintering additives was helpful to sintering up to 97% relative density. The relative density of sintered bodies and shrinkage under sintering was proportion to the Vicker’s hardness of sintering ceramic bodies. The representative result of TA3Y1C(composed by AlN powder with 3wt% of Y2O3 and 1wt% of CaO) was obtained the relative density of 99.4%(3.34g/cm3) and Vicker’s hardness 1310kg/mm2. The other result of TA1Y1C(composed by AlN powder with 1wt% of Y2O3 and 1wt% of CaO) which was sintered at 1700℃ for 3 h was measured the relative density of 98.6%(3.26 g/cm3), shrinkage of 17.3%, thermal conductivity of 147 W/mK and Vicker’s hardness of 1209 kg/mm2. These results were near the best conditions of sintered AlN ceramic bodies in published papers.

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