本論文為開發一六軸奈米測量機平台，主要在平台之設計分析、製造、組裝，並整合六自由度誤差量測系統進行平台回授控制。此平台包含兩個部份，第一個部份為利用壓電致動器推動之四軸壓電補償平台，第二個部分為利用音圈馬達來推動V型導軌架構而成之XY雙軸滑軌平台。由於利用音圈馬達推動之中長行程平台其定位精度經由控制也很能突破至奈米級，因此使用壓電補償平台來補償XY雙軸滑軌平台移動時所形成的誤差（Z軸方向誤差、Pitch 、Roll和Yaw），使整個平台系統的定位精度提高，而本四軸壓電微動平台有Z、θx、θy、θz等四自由度之運動。位置回饋訊號為設計一六自由度的雷射量測系統包含三組干涉儀與一個角度量測系統將平台移動時六個自由度誤差回饋進行控制。將建構平台設計要求三軸定位精度達10nm，此平台最終目的將可提供量測次微米級結構達到奈米級精度。

This paper concentrates on the design, analysis, manufacturing process and assembly of a six-axes nanomeasuring machine stage and combines a six degrees-of-freedom error measuring system for feedback control on nanomeasuring machine stage. This stage includes two parts: 1) a four-axes PZT stage utilizing piezoelectric actuator；2) A ball guided X-Y stage utilizing two voice coil motor. The ball guided X-Y stage utilizing two voice coil motor to servo the moving stage can’t achieve nanometer-scale accuracy. Thus, the PZT stage is designed to compensate the vertical straightness, pitch, roll and yaw errors throughout its range of travel. This stage have four degrees-of-freedom movements(Z、θx、θy、θz). Precision feedback is provided by the six degrees-of-freedom measuring system with integrating the three plane mirror interferometers and a two-axes angular sensor. The stage is designed to achieve a positioning accuracy of 10 nm. The ultimate purpose of this measuring machine is to provide a means of measuring submicron-scale feature with nanometer-scale accuracy.

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