| 研究生: |
盧昱勳 Lu, Yu-Shun |
|---|---|
| 論文名稱: |
二硫化鉬系列光感測器結合塔姆電漿共振之光電特性研究 The Study of MoS2-based Photodetector Integrated with Tamm Plasmon Resonance |
| 指導教授: |
許進恭
Sheu, Jinn-Kong |
| 學位類別: |
碩士 Master |
| 系所名稱: |
理學院 - 光電科學與工程學系 Department of Photonics |
| 論文出版年: | 2021 |
| 畢業學年度: | 109 |
| 語文別: | 中文 |
| 論文頁數: | 107 |
| 中文關鍵詞: | 二硫化鉬 、光感測器 、塔姆電漿共振 、CST STUDIO SUITE |
| 外文關鍵詞: | MoS2, Photodetector, Tamm Plasmon Resonance, CST STUDIO SUITE |
| 相關次數: | 點閱:231 下載:0 |
| 分享至: |
| 查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
本論文中,我們選用MoS2取代三維半導體,並結合塔姆電漿共振應用於金-半-金光感測器中,成功製作出具有高波長選擇性之近紅外光感測器。
首先,使用CST光學模擬軟體設計DBR結構,再製作出TiO2/SiO2組成之DBR,其反射率達99.5%,中心波長約在933nm。再透過CST找到合適參數後,於最後一層DBR上鍍有5nm/30nm之Ni/Au,量測反射頻譜後,發現有一半高寬極窄之反射谷位於1012nm,此即塔姆電漿共振,其反射率達56.3%。接著再以CST嘗試模擬不同材料厚度與組成對於塔姆電漿共振與電場之影響。
接下來,我們使用二維材料機械剝離法,將MoS2轉印於目標基板之上,包括上述設計之DBR基板與一般基板TiO2鍍於藍寶石基板),再製作指叉結構。此時,我們具有四組結構,包含有/無塔姆電漿共振、指叉結構中有/無MoS2材料,分別對其進行光暗電流量測,發現僅有主動層是MoS2,且基板為DBR之元件對於光源有明顯反應。
最後,將唯一對於光照有反應的元件之光電流進行歸一化後,將其光響應與監控片之反射頻譜相比,發現波段與塔姆電漿共振十分接近,推測是塔姆電漿共振產生之熱載子,部分熱載子成功越過金-半能障,順利注入半導體之導帶中,提升光電效率,成功製作出具有高波長選擇性之近紅外光感測器。
In this study, we propose a MoS2-based photodetector integrated with Tamm plasmon resonance using nickel/gold layer and 9 pairs of TiO2/SiO2 DBRs. Optical measurement results show high absorption (56.3%) with a narrow FWHM at 1012nm, that is Tamm plasmon resonance. The photoresponsivity measurement shows that there is a maximum photoresponsivity at 1020nm. In other words, the incident light in the wavelength range of 1020nm can fully excite the TPR and maximize the responsivity of the device. Thus, we successfully produced a near-infrared photodetector with high wavelength selectivity.
[1] R. Harrington, C. Senatore, J. Scanlon, and R. M. Yee, "The role of infrastructure in an automated vehicle future," Bridge, vol. 40, no. 06, p. 2018, 2018.
[2] M. Penttinen et al., "Experimental procedure: Deliverable D3. 2 of L3Pilot," 2019.
[3] M. A. Meggiolaro, "Analysis of control strategies for autonomous scale motorcycles stabilization and trajectory tracking," PUC-Rio, 2018.
[4] 陳國平, "利用塔姆電漿子元件製作高靈敏度光學生物感測器," 科技部補助專題研究計畫成果報告, 2016.
[5] Z. Yin et al., "Single-layer MoS2 phototransistors," ACS nano, vol. 6, no. 1, pp. 74-80, 2012.
[6] H. S. Lee et al., "MoS2 nanosheet phototransistors with thickness-modulated optical energy gap," Nano letters, vol. 12, no. 7, pp. 3695-3700, 2012.
[7] W. Zhang, J. K. Huang, C. H. Chen, Y. H. Chang, Y. J. Cheng, and L. J. Li, "High‐gain phototransistors based on a CVD MoS2 monolayer," Advanced materials, vol. 25, no. 25, pp. 3456-3461, 2013.
[8] I. Omkaram, Y. K. Hong, and S. Kim, "Transition Metal Dichalcogenide Photodetectors," Two-Dimensional Materials for Photodetector, 2018.
[9] X. Wang et al., "Ultrasensitive and broadband MoS2 photodetector driven by ferroelectrics," Advanced materials, vol. 27, no. 42, pp. 6575-6581, 2015.
[10] C. Xie, C. Mak, X. Tao, and F. Yan, "Photodetectors based on two‐dimensional layered materials beyond graphene," Advanced Functional Materials, vol. 27, no. 19, p. 1603886, 2017.
[11] M. Kaliteevski et al., "Tamm plasmon-polaritons: Possible electromagnetic states at the interface of a metal and a dielectric Bragg mirror," Physical Review B, vol. 76, no. 16, p. 165415, 2007.
[12] C. Zhang, K. Wu, V. Giannini, and X. Li, "Planar hot-electron photodetection with tamm plasmons," ACS nano, vol. 11, no. 2, pp. 1719-1727, 2017.
[13] Z. Wang, J. K. Clark, Y.-L. Ho, and J.-J. Delaunay, "Hot-electron photodetector with wavelength selectivity in near-infrared via Tamm plasmon," Nanoscale, vol. 11, no. 37, pp. 17407-17414, 2019.
[14] 李. 李明洋, 張文豪, "二維過渡金屬二硫族化物平面異質結構," 自然科學簡訊第二十八卷第一期, 2016.
[15] O. V. Yazyev and A. Kis, "MoS2 and semiconductors in the flatland," Materials Today, vol. 18, no. 1, pp. 20-30, 2015.
[16] K. F. Mak, C. Lee, J. Hone, J. Shan, and T. F. Heinz, "Atomically thin MoS 2: a new direct-gap semiconductor," Physical review letters, vol. 105, no. 13, p. 136805, 2010.
[17] 莊鎮宇, "未來的魔毯: 淺談二維材料與其大面積製程發展," 科儀新知, no. 203, pp. 72-80, 2015.
[18] N. A. Kumar, M. A. Dar, R. Gul, and J.-B. Baek, "Graphene and molybdenum disulfide hybrids: synthesis and applications," Materials Today, vol. 18, no. 5, pp. 286-298, 2015.
[19] R. W. Wood, "XLII. On a remarkable case of uneven distribution of light in a diffraction grating spectrum," The London, Edinburgh, and Dublin Philosophical Magazine and Journal of Science, vol. 4, no. 21, pp. 396-402, 1902.
[20] P. Singh, "SPR biosensors: Historical perspectives and current challenges," Sensors and actuators B: Chemical, vol. 229, pp. 110-130, 2016.
[21] M. Cittadini, M. Bersani, F. Perrozzi, L. Ottaviano, W. Wlodarski, and A. Martucci, "Graphene oxide coupled with gold nanoparticles for localized surface plasmon resonance based gas sensor," Carbon, vol. 69, pp. 452-459, 2014.
[22] 見明吳, 旻龍蔡, 淳宇莊, 豫笳崔, and 志楧許, "分子生醫光電科學與技術," 物理雙月刊, vol. 27, no. 5, pp. 670-686, 2005.
[23] 蔡. 邱國斌, "金屬表面電漿簡介," 物理雙月刊(二十八卷二期), 2006.
[24] G. Ruffato, G. Zacco, and F. Romanato, "Innovative exploitation of grating-coupled surface plasmon resonance for sensing," Plasmonics-Principles Appl, vol. 2012, pp. 419-444, 2012.
[25] B. D. Gupta, A. Pathak, and V. Semwal, "Carbon-based nanomaterials for plasmonic sensors: a review," Sensors, vol. 19, no. 16, p. 3536, 2019.
[26] S. A. Maier, Plasmonics: fundamentals and applications. Springer Science & Business Media, 2007.
[27] A. Bijalwan and V. Rastogi, "SPR Gas Sensor Using Bimetallic Structure Based on Gold Grating-Aluminum Film," in 2017 IEEE Workshop on Recent Advances in Photonics (WRAP), 2017: IEEE, pp. 1-3.
[28] E. Hecht, "OPTIC," Addison-Wesley, 2002.
[29] P. Lova, G. Manfredi, and D. Comoretto, "Advances in functional solution processed planar 1D photonic crystals," Advanced Optical Materials, vol. 6, no. 24, p. 1800730, 2018.
[30] S. Moaveni, Finite element analysis theory and application with ANSYS, 3/e. Pearson Education India, 2011.
[31] 王刚 and 安琳, COMSOL Multiphysics 工程实践与理论仿真: 多物理场数值分析技术. Dian zi gong ye chu ban she, 2012.
[32] C. M. STudio, "CST STudio SuiTe 2013," Computer Simulation Technology AG, 2013.
[33] T. Weiland, M. Timm, and I. Munteanu, "A practical guide to 3-D simulation," IEEE Microwave Magazine, vol. 9, no. 6, pp. 62-75, 2008, doi: 10.1109/mmm.2008.929772.
[34] 張景學 and 吳昌崙, 半導體製造技術. 文京圖書出版, 2000.
[35] 施敏 and 伍國, 半導體元件物理與製作技術. 2013.
[36] R. Frisenda et al., "Recent progress in the assembly of nanodevices and van der Waals heterostructures by deterministic placement of 2D materials," Chemical Society Reviews, vol. 47, no. 1, pp. 53-68, 2018.
[37] R. Garcıa and R. Perez, "Dynamic atomic force microscopy methods," Surface science reports, vol. 47, no. 6-8, pp. 197-301, 2002.
[38] Y. Seo and W. Jhe, "Atomic force microscopy and spectroscopy," Reports on Progress in Physics, vol. 71, no. 1, p. 016101, 2007.
[39] 杜正恭, "掃描式電子顯微鏡," 材料分析儀器, p. 22, 1998.
[40] 羅聖全, "科學基礎研究之重要利器-掃描式電子顯微鏡(SEM)," 科學研習月刊, 2013.
[41] J. R. DeVore, "Refractive indices of rutile and sphalerite," JOSA, vol. 41, no. 6, pp. 416-419, 1951.
[42] W. C. Hamilton, "Significance tests on the crystallographic R factor," Acta Crystallographica, vol. 18, no. 3, pp. 502-510, 1965.
[43] P. Johnson and R. Christy, "Optical constants of transition metals: Ti, v, cr, mn, fe, co, ni, and pd," Physical review B, vol. 9, no. 12, p. 5056, 1974.
[44] P. B. Johnson and R.-W. Christy, "Optical constants of the noble metals," Physical review B, vol. 6, no. 12, p. 4370, 1972.
[45] K. Leosson et al., "Comparing resonant photon tunneling via cavity modes and Tamm plasmon polariton modes in metal-coated Bragg mirrors," Optics letters, vol. 37, no. 19, pp. 4026-4028, 2012.
[46] H. Li et al., "From bulk to monolayer MoS2: evolution of Raman scattering," Advanced Functional Materials, vol. 22, no. 7, pp. 1385-1390, 2012.
[47] S. Najmaei, Z. Liu, P. Ajayan, and J. Lou, "Thermal effects on the characteristic Raman spectrum of molybdenum disulfide (MoS2) of varying thicknesses," Applied Physics Letters, vol. 100, no. 1, p. 013106, 2012.
[48] J. Shi et al., "3R MoS2 with broken inversion symmetry: a promising ultrathin nonlinear optical device," Advanced Materials, vol. 29, no. 30, p. 1701486, 2017.
[49] X. Li and H. Zhu, "Two-dimensional MoS2: Properties, preparation, and applications," Journal of Materiomics, vol. 1, no. 1, pp. 33-44, 2015.
[50] S.-G. Huang, K.-P. Chen, and S.-C. Jeng, "Phase sensitive sensor on Tamm plasmon devices," Optical Materials Express, vol. 7, no. 4, pp. 1267-1273, 2017.
[51] D.-J. He, W.-L. Zhang, R. Ma, S.-S. Wang, X.-M. Wu, and Y.-J. Rao, "Transverse localization of Tamm plasmon in metal-DBR structure with disordered layer," Chinese Physics B, vol. 27, no. 8, p. 087301, 2018.
[52] S. V. Boriskina and Y. Tsurimaki, "Sensitive singular-phase optical detection without phase measurements with Tamm plasmons," Journal of Physics: Condensed Matter, vol. 30, no. 22, p. 224003, 2018.
[53] M. Amani et al., "Near-unity photoluminescence quantum yield in MoS2," Science, vol. 350, no. 6264, pp. 1065-1068, 2015.
[54] T. Atallah et al., "Electrostatic screening of charged defects in monolayer MoS2," The journal of physical chemistry letters, vol. 8, no. 10, pp. 2148-2152, 2017.
[55] S. Mouri, Y. Miyauchi, and K. Matsuda, "Tunable photoluminescence of monolayer MoS2 via chemical doping," Nano letters, vol. 13, no. 12, pp. 5944-5948, 2013.
[56] H. Ardekani, R. Younts, Y. Yu, L. Cao, and K. Gundogdu, "Reversible photoluminescence tuning by defect passivation via laser irradiation on aged monolayer MoS2," ACS applied materials & interfaces, vol. 11, no. 41, pp. 38240-38246, 2019.
[57] Z. Huang et al., "Amorphous MoS2 photodetector with ultra-broadband response," ACS Applied Electronic Materials, vol. 1, no. 7, pp. 1314-1321, 2019.