由於鑽石具有許多優異的物理及化學特性，舉凡其高硬度、低摩擦係數的機械性質；高熱傳導率、低熱膨脹的熱學性質；不與酸鹼反應的化學惰性等，使得其應用範圍十分廣泛，具有極高的應用潛力。而目前，以化學氣相沉積法成長大面積單晶鑽石遇到的主要問題包括 : 成長過後的單晶鑽石面積縮小、成長速率過慢、高缺陷密度等。本篇論文的主要目標，便是找出可能的解決方法去增大單晶鑽石的表面，並同時提升其成長速率及品質。
本篇論文以微波電漿輔助化學氣相沉積法，調整出適宜且穩定的參數，在功率6700 W，壓力120 mbar的條件下成長單晶鑽石，為了解決成長時周圍環繞多晶鑽石而導致單晶鑽石面積縮小，本實驗設計了「pocket holder」載台來承載單晶鑽石基板，成功避免在其周圍產生多晶鑽石環。藉由此方法，單晶鑽石的成長速率約為10 - 25 μm/h ，成長時間約為8 - 64小時。
此外，本實驗亦通入了二氧化碳氣體，透過分解二氧化碳使得氣氛中含有氧原子的成分，目的欲使鑽石表面透明化，再藉由拉曼光譜儀、光學顯微鏡，原子力顯微鏡等儀器來確認成長之單晶鑽石品質。

Diamond has many excellent physical and chemical properties such as high hardness, low coefficient of friction, high thermal conductivity, low coefficient of thermal expansion, and chemical inertness making it not reactive with acids at room temperature. Diamond’s applications are therefore very broad. At present, the main problems would be economic and rapid growth of high quality large-area single- crystal diamond by chemical vapor deposition. The main purpose of this thesis is to figure out possible solutions to increase the surface area of single crystal diamond, and increasing the growth rate and quality at the same time.
In this thesis, microwave plasma enhanced chemical vapor deposition in CH4 and H2 is used to grow single crystalline diamond by the stable and proper experimental parameters at the microwave power of 6700 W and a gas pressure of 120 mbar. In order to avoid the growth of polycrystalline diamond rims surrounding single crystal diamond during the diamond growth, “pocket holder” was designed to carry single crystalline diamond substrates. It succeeded to avoid the formation of polycrystalline diamond rims around single crystal diamond. By this method, the growth rate of single crystalline diamond was about 10 - 25 μm/hr when the growing time was about 8 - 64 hours.
In addition, carbon dioxide gas was used to produce oxygen atoms (ions) in this study. The purpose is to reduce graphitic carbon and defects and the diamond transparent. The quality of diamond growth was characterized by Raman spectroscopy, optical microscopy, atomic force microscopy, etc.

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