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研究生: 羅晢
Lo, Che
論文名稱: 以水熱法合成二硫化鉬開發室溫可操作之二氧化氮氣體感測器
Development of Room-Temperature Operable NO2 Gas Sensors Using Hydrothermally Synthesized MoS2
指導教授: 蘇炎坤
Su, Yan-Kuin
張守進
Chang, Shoou-Jinn
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
論文出版年: 2024
畢業學年度: 112
語文別: 英文
論文頁數: 72
中文關鍵詞: 二硫化鉬奈米花瓣球室溫二氧化氮氣體感測器
外文關鍵詞: MoS2, Nanoflower, Room temperature, NO2, Gas Sensor
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  • 本研究採用水熱法成功合成了二硫化鉬(MoS2)奈米花辦球狀結構,並透過調節不同的生長溫度和生長條件進行最佳化。製備出的 MoS2 被應用於室溫下測量 NO2 氣體的感測器中,旨在探索其氣體感測性能及最佳化途徑。
    首先,我們詳細描述了 MoS2 的水熱合成過程及其影響因素。透過變化的生長溫度和時間,我們觀察到 MoS2 奈米結構在不同條件下的形貌和晶體結構變化。實驗結果顯示,在 180°C 生長 36 小時,並經過 300°C 退火處理的條件下,MoS2 表現出最優的晶體結構和形貌,以及最佳的氣體感測性能。
    其次,我們進行了詳盡的氣體感測性能測試和分析。利用 X 光薄膜微區繞射儀(XRD)、掃描式電子顯微鏡(SEM)以及高解析穿透式電子顯微鏡(HR-TEM)等技術對合成的 MoS2 進行表徵,並使用 BET 等溫線分析其比表面積。透過 X 射線光電子能譜(XPS)測量,驗證了合成 MoS2 的元素組成及結晶性質。實驗結果顯示,優化後的 MoS2 樣品在室溫下對 NO2 氣體具有較高的響應度、選擇性和良好的穩定性,與其優化後的晶體結構及硫空缺有密切關係。
    最後,本文總結了研究結果並討論了其在環境監測和氣體感測應用中的潛在價值。透過優化合成條件和後續的退火處理,我們成功提升了 MoS2 在室溫下的氣體感測性能,為其在實際應用中的廣泛應用奠定了基礎。
    綜上所述,水熱合成的 MoS2 在室溫下具有良好的氣體感測特性,未來的研究將持續探討其在環境監測及其他感測領域的應用前景。

    This study successfully synthesized MoS2 nanoflower structures using the hydrothermal method and optimized them by adjusting different growth temperatures and times. The synthesized MoS2 was applied in the development of gas sensors for detecting NO2 gas at room temperature, aiming to explore its gas sensing performance and optimization pathways.
    Firstly, we detailed the hydrothermal synthesis process of MoS2 and its influencing factors. By varying the growth temperature and time, we observed changes in the morphology and crystal structure of MoS2 nanostructures under different conditions. Experimental results demonstrated that MoS2 exhibited optimal crystal structure and morphology when grown at 180°C for 36 hours followed by annealing at 300°C, which also resulted in the best gas sensing performance.
    Secondly, comprehensive gas sensing performance tests and analyses were conducted. Characterization techniques including X-ray diffraction (XRD), scanning electron microscopy (SEM), and high-resolution transmission electron microscopy (HR-TEM) were employed to characterize the synthesized MoS2. Additionally, BET surface area analysis was performed. X-ray photoelectron spectroscopy (XPS) measurements verified the elemental composition of the synthesized MoS2. Experimental results showed that the optimized MoS2samples exhibited high sensitivity, selectivity, and stability towards NO2 gas at room temperature, which correlated closely with its optimized crystal structure and sulfur vacancies.
    Finally, this paper summarizes the research findings and discusses the potential applications of MoS2 in environmental monitoring and gas sensing. Through optimization of synthesis conditions and subsequent annealing treatments, we successfully enhanced the gas sensing performance of MoS2 at room temperature, laying a solid foundation for its widespread application in practical settings.
    In conclusion, hydrothermally synthesized MoS2 demonstrates excellent gas sensing characteristics at room temperature, highlighting promising applications in environmental monitoring and other sensing fields. Future research will continue to explore its potential in these areas.

    摘要 I Abstract II 致謝 IV Contents V Table captions VIII Figure captions IX Chapter 1 Introduction 1 1.1 Background and Motivation 1 1.2 Background of 2D material MoS2 2 1.3 Overview of Hydrothermal Method 2 1.4 Overview of Gas Sensor 3 1.5 Organization of This Thesis 3 Chapter 2 Relevant Theory and Experimental Equipment 5 2.1 Theory of Gas Sensor 5 2.1.1 Responsivity of the Gas Sensor 6 2.2 Experimental Equipment 7 2.2.1 Raman Spectrometer 7 2.2.2 X-ray Photoelectron Spectroscopy (XPS) 7 2.2.3 Scanning Electron Microscope (SEM) 7 2.2.4 Surface Area Analyzer (BET) 8 2.2.5 Transmission Electron Microscope (TEM) 9 2.2.6 X-ray Diffraction (XRD) 9 Chapter 3 Fabrication and Characteristic of MoS2 Sensors 11 3.1 Hydrothermal synthesis of Molybdenum Disulfide (MoS2) 11 3.2 Fabrication of MoS2 Gas Sensors 12 3.3 Measurement Equipment of Gas Sensor 13 3.4 Structural Characteristics 13 3.4.1 SEM and TEM Analysis 13 3.4.2 Raman Analysis 18 3.4.3 XRD Analysis 20 3.4.4 BET Analysis 21 3.5 Elements Analysis 23 3.5.1 EDS Analysis 23 3.5.2 XPS Analysis 25 Chapter 4 Characteristics of MoS2 Gas Sensors 30 4.1 Motivation 30 4.1.1 Different Hydrothermal Growth Conditions 30 4.2 Characteristics of MoS2 Gas Sensors 30 4.2.1 Gas Sensing Characteristics of MoS2 Based Gas Sensors Fabricated under Different Hydrothermal Temperature Conditions 30 4.2.2 Gas Sensing Characteristics of MoS2 Based Gas Sensors Fabricated under Different Hydrothermal Time Conditions 38 4.3 The effects of different annealing temperatures on the characteristics of gas sensors 44 Chapter 5 Conclusion and Future Work 52 5.1 Conclusion 52 5.2 Future work 53 References 55

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