探針的磨耗是原子力顯微鏡於使用時一個無可避免且極為嚴重的問題，磨耗會減短探針使用壽命且造成影像解析度下降。使用輕敲模式在掃描過程中，探針針尖受與之表面垂直之作用力影響極大，甚至可能造成探針發生相變化，而相變後的晶體結構，其硬度等機械強度可能小於原相，因而造成磨耗現象。探討探針在掃描中是否發生相變化，並研判其途徑即是本文的主要研究課題。
本研究以矽探針為主體，先行以有限元素分析法模擬矽探針受力時，內部應力的分布情形，之後實際給予矽探針與之針尖表面垂直的作用力，使之發生磨耗現象，並以背向散射電子繞射分析針尖，藉由其菊池線圖及上述數據分析是否有相變化情形，研判矽探針受力時可能發生的相變化途徑，最後以探針的製造材料─單晶矽進行高壓實驗，探討其實際高壓相變之途徑。

Wear of probe tips is an inevitable and very serious issue during the use of atomic force microscope (AFM). Wear can introduce artifacts and reduce the image resolution. The force which effects on the probe tips’ surface vertically is too great so that it may induce probe phase transformation during scanning with tapping mode. The hardness of the crystal structure after phase transformation may be small than that of original phase, and it may induce wear of probe tips. Researching that if phase transformation occurs on probe tips or not is the major research in this study.
We focused on silicon probes in this study. At first, we used the finite element method to know how the stress distributed under loading. Then we gave force on silicon probes to make they wear, and then we used EBSD to analyze them. We developed the phase-transformation path by Kikuchi patterns and the data we got in this study. Finally, we used single crystal silicon which is the material of silicon probes to do the high-pressure experiment in order to know and confirm the high-pressure phase transformation path of silicon.

[1] 蔡毓楨, 薛富盛, 呂福興, and 吳宗明, 原子力顯微鏡實作訓練教材: 五南圖書, 2007.
[2] 黃英碩, "掃描探針顯微術的原理及應用," 科儀新知, pp. 7-17, 2005.
[3] B. Bharat, Handbook of Micro / Nano Tribology: CRC Press, 1999.
[4] B.Bhushan, Introduction to Tribology. New York: John Wiley, 2002.
[5] A.D.Sarkar, Friction and Wear: Academic press, 1980.
[6] B.Bhushan, Handbook of Micro/Nano Tribology: CRC Press, 1995.
[7] Z. Tao and B. Bhushan, "Surface modification of AFM silicon probes for adhesion and wear reduction," Tribology Letters, vol. 21, pp. 1-16, 2006.
[8] M. L. Bloo, H. Haitjema, and W. O. Pril, "Deformation and wear of pyramidal, silicon-nitride AFM tips scanning micrometre-size features in contact mode," Measurement, vol. 25, pp. 203-211, 1999.
[9] B. Skårman, L. R. Wallenberg, S. N. Jacobsen, U. Helmersson, and C. Thelander, "Evaluation of Intermittent Contact Mode AFM Probes by HREM and Using Atomically Sharp CeO2 Ridges as Tip Characterizer," Langmuir, vol. 16, pp. 6267-6277, 2000/07/01 2000.
[10] C. Su, L. Huang, K. Kjoller, and K. Babcock, "Studies of tip wear processes in tapping mode™ atomic force microscopy," Ultramicroscopy, vol. 97, pp. 135-144, 2003.
[11] H. Edwards, R. McGlothlin, and E. U, "Vertical metrology using scanning-probe microscopes: Imaging distortions and measurement repeatability," Journal of Applied Physics, vol. 83, pp. 3952-3971, 1998.
[12] P. Grutter, Zimmermann, x, W. Edling, and D. Brodbeck, "Tip artifacts of microfabricated force sensors for atomic force microscopy," Applied Physics Letters, vol. 60, pp. 2741-2743, 1992.
[13] K. L. Westra, A. W. Mitchell, and D. J. Thomson, "Tip artifacts in atomic force microscope imaging of thin film surfaces," Journal of Applied Physics, vol. 74, pp. 3608-3610, 1993.
[14] B.Bhushan, Spinger handbook of nanotechnology: Springer, 2007.
[15] 陳政諴, "自組裝單分子層應用在原子力顯微鏡探針的磨耗行為研究," 材料科學及工程學系, 國立成功大學, 2010.
[16] 林明彥, "原子力顯微儀的原理（下）," 科儀新知, vol. 27, pp. 46-57, 2005.
[17] 李昇樺, "以有限元素分析法去探討原子力顯微鏡探針的磨耗現象," 材料科學及工程學系, 國立成功大學, 2010.
[18] S.Minomura and H.G.Drickamer, "Pressure-induced phase transformations in Si, Ge, and some III-V compounds," J. Phys. Chem.Solids, vol. 23, p. 451, 1961.
[19] J. Z. Hu, L. D. Merkle, C. S. Menoni, and I. L. Spain, "Crystal data for high-pressure phases of silicon," Physical Review B, vol. 34, pp. 4679-4684, 1986.
[20] S. J. Duclos, Y. K. Vohra, and A. L. Ruoff, "Experimental study of the crystal stability and equation of state of Si to 248 GPa," Physical Review B, vol. 41, pp. 12021-12028, 1990.
[21] A. Kailer, Y. G. Gogotsi, and K. G. Nickel, "Phase transformations of silicon caused by contact loading," Journal Name: Journal of Applied Physics; Journal Volume: 81; Journal Issue: 7; Other Information: PBD: Apr 1997, pp. Medium: X; Size: pp. 3057-3063, 1997.
[22] R. Hull, Properties of Crystalline Silicon. London: INSPEC, 1999, 1999.
[23] M. Durandurdu and D. A. Drabold, "High-pressure phases of amorphous and crystalline silicon," Physical Review B, vol. 67, p. 212101, 2003.
[24] C. Cheng, "Uniaxial phase transition in Si: Ab initio calculations," Physical Review B, vol. 67, p. 134109, 2003.
[25] B. Haberl, "Structural Characterization of Amorphous Silicon," Doctor of Philosophy, Australian National University, 2010.
[26] V. Kulikovsky, V. Vorlíček, P. Boháč, M. Stranyánek, R. Čtvrtlík, and A. Kurdyumov, "Mechanical properties of amorphous and microcrystalline silicon films," Thin Solid Films, vol. 516, pp. 5368-5375, 2008.
[27] K. Mylvaganam and L. C. Zhang, "Effect of bct-5 Si on the Indentation of Monocrystalline Silicon," Applied Mechanics and Materials, vol. 117 - 119, pp. 666-669, 2011.
[28] "An Introduction to the Finite Element Method / J.N. Reddy," ed: Nueva York, EUA : McGraw-Hill, 1993.
[29] 郭正祥, "嵌球式聯軸器的分析及改善," 機械工程系, 國立臺灣科技大學, 2010.
[30] Budget Sensors. Available: http://www.budgetsensors.com/tapping_mode_afm_aluminium.html
[31] R. R. Craig, Mechanics of materials, 3rd ed. NY: Hoboken, 2011.
[32] V. M. Group, Scanning Probe Microscopy
Training Notebook, 3.0 ed.: Digital Instruments, 2000.
[33] 黃宏勝 and 林麗娟, "FE-SEM/CL/EBSD分析技術簡介," 工業材料雜誌, vol. 201, pp. 99-108, 2003.
[34] 花柏榕, 簡淑櫻, 龔慧貞, and 王雁賓, "探索物質在極限環境之研究-大體積壓力機簡介," 地球科學系, 國立成功大學, 2012.
[35] G. M. Pharr, W. C. Oliver, R. F. Cook, P. D. Kirchner, M. C. Kroll, T. R. Dinger, and D. R. Clarke, "Electrical resistance of metallic contacts on silicon and germanium during indentation," Journal Name: Journal of Materials Research; (United States); Journal Volume: 7:4, pp. Medium: X; Size: Pages: 961-972, 1992.
[36] S. V. Ovsyannikov and V. V. Shchennikov, "Phase transitions investigation in ZnTe by thermoelectric power measurements at high pressure," Solid State Communications, vol. 132, pp. 333-336, 2004.