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研究生: 吳奕寬
Wu, Yi-Kuan
論文名稱: 化學氣相沉積法在銅箔上合成石墨烯及相關分析
Chemical vapor deposition of graphene on copper and its analyses
指導教授: 曾永華
Tzeng, Yonhua
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
論文出版年: 2013
畢業學年度: 101
語文別: 中文
論文頁數: 91
中文關鍵詞: 石墨烯化學氣相沉積法雪花狀石墨烯大面積石墨烯銅晶格方向銅表面階梯狀
外文關鍵詞: graphene, chemical vapor deposition (CVD), snow-flake graphene, large domain size graphene, crystal orientation of copper, step on copper surface
相關次數: 點閱:111下載:6
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  • 石墨烯擁有許多優異的特性與條件,良好的光電特性、熱特性以及機械性質,在近年來成為相當熱門的研究材料。
    在實驗中,主要以CVD熱化學氣相沉積法成長石墨烯,不只是成長高品質的連續面單層石墨烯薄膜,也在較低的壓力下成長出雪花形狀的石墨烯,經由改變製程參數可成長出單一晶粒大於500um大小的石墨烯,或成長出擁有許多奈米等級縫隙的石墨烯薄膜,並可將此雪花狀石墨烯的縫隙接合成一連續面單層石墨烯薄膜。
    在後續分析中,根據SEM、EBSD、AFM影像,觀察了在不同晶格方向的銅表面所成長出的雪花狀石墨烯,發現石墨烯的形狀、成核、覆蓋程度、分支成長方向以及在覆蓋有石墨烯的銅表面上的階梯狀排列,都跟銅表面的晶格方向有所關係,此表示在石墨烯的成長上,不只是製程參數,如壓力、氣體流量、溫度等,會對其結果造成影響,銅的晶格方向也是影響石墨烯成長的重要原因之一。
    此外,在實驗中也嘗試使用含碳氫聚合物的幫浦油氣成長石墨烯,並從實驗中觀察幫浦油氣對成長石墨烯的影響,以及在相同處理步驟下不同編號的銅箔成長石墨烯結果。

    Graphene has many excellent features, such as good optical, thermal and mechanical properties, and it becomes a popular material in recent years.
    In the experiment, we grow graphene by chemical vapor deposition process. We not only grow high quality single layer graphene, but also grow snow-flake graphene at lower pressure. By changing the parameters, we can grow large grain size graphene which was over 500um, and grow snow-flake graphene with nano-gaps. And the gaps of snow-flake graphene can be merged to grow continuous film.
    After using scanning electron microscopy (SEM), electron-backscatter diffraction (EBSD), and atomic force microscope (AFM) to analysis graphene and copper, we observed snow-flake graphene growing on different copper crystals, and we found that the graphene shape, nucleation, coverage on copper, branch growth direction and the step on copper surface are related to the crystal orientation of copper surface. It means that CVD graphene growing on copper not only affect by the parameters such as pressure, gas flow rate, and temperature, but also crystal orientation of copper surface.
    In addition, the experiment also used pump oil containing hydrocarbon polymer to grow graphene, and we also observed the effect of pump oil on graphene growth.

    摘要 I Abstract II 致謝 III 目錄 V 圖目錄 VIII 第一章 緒論 1 第二章 文獻回顧 3 2-1石墨烯的製備方法 3 2-1-1機械式剝離法 (Mechanical exfoliation) 3 2-1-2氧化還原法(Oxidation) 4 2-1-3 碳化矽磊晶法 4 2-1-4 化學氣相沉積法(Chemical vapor deposition,CVD) 5 2-2石墨烯的轉移方式 9 2-2-1 使用PDMS轉移 9 2-2-2 使用PMMA轉移 11 2-2-3 利用銅蒸散轉移石墨烯 14 2-2-4 Roll- to - roll 14 2-3石墨烯的判定方法與工具 15 2-3-1 光學顯微鏡(Optical microscope ,OM) 16 2-3-2 原子力顯微鏡(Atomic force microscope, AFM) 17 2-3-3 穿隧式電子顯微鏡(Transmission electron microscopy,TEM) 18 2-3-4 掃描式電子顯微鏡(Scanning electron microscopy,SEM) 19 2-3-5拉曼光譜儀(Raman spectroscopy) 20 2-4化學氣相沉積法在銅箔上成長石墨烯 24 2-4-1成長大面積domain size石墨烯 24 2-4-2影響石墨烯成長的因素 26 第三章 實驗儀器設備 29 3-1實驗耗材與溶劑 29 3-1-1銅箔 29 3-1-2實驗溶劑 29 3-1-3光阻 30 3-2製程設備 31 3-2-1 熱化學氣相沉積系統 31 3-2-2前置及轉移石墨烯使用之儀器 37 3-3分析與量測儀器 37 3-3-1光學顯微鏡(Optical microscope ,OM) 38 3-3-2原子力顯微鏡(Atomic force microscope, AFM) 38 3-3-3掃描式電子顯微鏡(Scanning electron microscopy,SEM) 39 3-3-4電子背向散射繞射儀(Electron Backscatter Diffraction,EBSD) 40 3-3-5拉曼光譜儀(Raman spectroscopy) 41 第四章 實驗內容與結果 42 4-1石墨烯製備與轉移 42 4-2 連續面石墨烯(Continuous film) 49 4-3 雪花狀石墨烯(Snow-flake graphene) 51 4-3-1 大面積單一晶粒石墨烯(Large grain size graphene) 51 4-3-2 大面積連續面石墨烯 53 4-3-2-b 關閉氫氣 54 4-3-2-c 提高甲烷流量以及腔體壓力 55 4-3-2-d 拉長第三階段(III)時間 56 4-3-2-e 增加甲烷分壓 57 4-3-3銅表面晶格方向對石墨烯成長的影響 - 形狀、成長速度、成核 58 4-3-4雪花狀石墨烯成長與銅表面形貌以及表面銅晶格方向 66 4-3-5雪花狀石墨烯分支跨越不同晶格方向的銅twins表面 70 4-3-6雪花狀石墨烯在銅的晶界上 78 4-3-7蝕刻覆蓋有雪花狀石墨烯的銅箔 79 4-4碳氫聚合物成長石墨烯 80 4-5銅箔表面氧化鉻之影響 82 第五章 結論 83 第六章 未來展望 86 參考文獻 87

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