本文致力於設計製造出線型形狀記憶合金致動之微型夾爪，結合N.P.Suh的兩大設計公設[21]：功能獨立設計及最小資訊量設計，將原尺寸0.87mmx0.68mmx0.2mm縮小2/3約為0.55mm×0.44mm×0.2mm，簡化夾爪製造流程，使夾爪製造適用於單片光罩式加工，並對新型微夾爪進行建模分析及ANSYS模擬。
首先將致動器由壓電致動器改為線型形狀記憶合金，應用形狀記憶效應致動夾爪開闔，設計出包含SMA致動器與懸臂之微夾爪致動器，並將SMA致動器進行建模分析，了解SMA致動應用的動態行為。
其次對於微夾爪與SMA致動器組裝上，規劃製作及組裝流程，利用測定顯微鏡完成製作及組裝程序。控制器方面以555電路模擬PWM控制SMA致動微夾爪開闔，以完成致動夾爪開闔檢測及夾持測試。
最後透過影像系統完成夾持器夾持測試，夾持測試包含資訊工程及生醫環境夾持，資訊工程夾持是將長5mm、直徑38μm物件，由內徑49μm組裝孔夾出即完成；生醫環境夾持則是將長1cm、直徑38μm的物件放入液體(水)中，利用夾持器深入液面下夾取物件。

In this thesis, A SMA actuated micro-gripper is designed and fabricated. Using Suh’s design method with which independent axiom and information axiom, the gripper is reduced from original size of 0.87mmx0.68mmx0.2mm to 0.55mmx0.44mmx0.2mm. A single mask mode is used to simplify gripper’s fabrication processes for suitable fabrication. A model of the new micro-gripper is constructed, and analyzed and simulated by ANSYS.
At first, the piezo actuator is changed to the SMA actuator and the shape memory effect is applied to actuat the mico-gripper. The design of micro-gripper actuator consists of a SMA actuator and cantilever arm. A model of the the SMA actuator is constructed to study the dynamic motion behavior.
Secondly, Fabrication processes are planned to fabricate micro-gripper and SMA actuator, and fabrication is finished by using measuring microscope. Using 555, a PWM controled to actuate SMA micro-gripper is simulated.
Finally, gripping tests are competed by using an image acquisition system. The gripping tests include the gripping applications in information engineering and biomedical environment. In information engineering, the test is to grip an object of 5mm in length and 38μm in diameter out of a hole with 49μm in diameter. In biomedical environment test, a gripping object of 1cm in length and 38μm in diameter is manipulated under water.

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