| 研究生: |
李岳庭 Li, Yue-Ting |
|---|---|
| 論文名稱: |
利用硒化與共電鍍形成二銦化銅硒薄膜的研究 Growth of CIS thin film by selenization of co-plated Cu/In precursor |
| 指導教授: | 彭洞清 |
| 學位類別: |
碩士 Master |
| 系所名稱: |
電機資訊學院 - 微電子工程研究所 Institute of Microelectronics |
| 論文出版年: | 2010 |
| 畢業學年度: | 98 |
| 語文別: | 中文 |
| 論文頁數: | 71 |
| 中文關鍵詞: | 共電鍍 、二硒化銅銦 |
| 外文關鍵詞: | co-electrodeposition, CIS |
| 相關次數: | 點閱:93 下載:1 |
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本論文利用共電鍍方式取代傳統的物理氣相沉積法(濺鍍)來製備Cu-In先驅層於可撓式的不鏽鋼基板上,再經由蒸鍍硒化的方式,形成CIS主吸收層,具有低成本、製程簡單、製造大面積材料的潛力,且可撓式基板的應用對於產業界之量產及發展上皆有相當大的助益。
在探討電鍍薄膜實驗中,電鍍液pH值、Cu-In相對濃度、錯合劑、硒化溫度與時間等等的實驗參數皆會影響最終CIS主吸收層的薄膜品質,並透過X光繞射儀(XRD)、掃描式電子顯微鏡(SEM)、能量分散光譜儀(EDS),對製備的CIS主吸收層進行晶體結構、表面形貌、薄膜厚度、組成成分進行分析。
最後成功作出具有轉換效率的薄膜太陽能電池,由電流-電壓特性曲線,該元件具有顯著之二極體特性,量測數據Vm = 0.05 V、Im = 0.48 mA、F.F. = 25 %、η = 0.26 %。
關鍵字: 共電鍍、二硒化銅銦
In this thesis, the novel co-electrodeposition method was used to deposit Copper-Indium as metal precursors on the flexible stainless substrate. Sequentially, the evaporation method was used to achieve the selenization process and form the CIS films as an absorbent layer for thin film solar cell devices. As compared with the traditional physical vapor deposition, the co-deposition methods provide the benefits of low cost, simple process, and large-area process. Moreover, the flexible stainless substrates provide advantages on commercial applications and productions in solar cell industry.
In this work, the various experimental parameters have to be optimized including the pH value, concentrations, temperature of selenization and durations time. We then used the analytical tools such as SEM, XRD, and EDS to identify the thin films CIS. The surface morphology, the preferred crystalline orientation, the stoichiometry, of CIS absorber layers are characterized.
Finally, we successfully fabricate the thin film solar cells with transforming efficiency (by using co-electrodeposition of Cu-In precursors). From the measurements by the solar simulator, the devices apparently exhibit the diode I-V characteristics. The results of maximum voltage (Vm), maximum current(Im), fill factor(F.F.) and efficiency(η) of the cells are 0.05 V, 0.48 mA, 25 % and 0.26 %, respectively.
Keywords: co-electrodeposition, CIS.
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