本論文使用離子交換技術成功的製作出可靠度高且造價相對低廉的積體光波導元件，並將其建構在矽酸鹽玻璃基板N-BK7，之後再搭配光學量測來了解其特性與效能。
首先，利用Ag+-Na+離子交換技術製作平面波導於矽酸鹽玻璃之中，透過有系統性的分析，建立波導特性與離子交換過程參數，如玻璃表層最大折射率改變量、擴散深度以及擴散係數等等。利用此分析結果，採用濕式離子交換去製作出操作波段1500nm之MZI架構下的Y型光波導，而混合熔鹽的配方為AgNO3:NaNO3(摩爾比為0.04:1)且溫度維持360℃。
接著為了觀察元件光特性調變的情形，熱光效應在藉由施加偏壓下，使其電極產生一個局部熱效應，而在電性的分析上由公式推導出施加電壓相對電極阻值及電極溫度的關係式，達到π相位的溫度變化為5℃。而施加電壓後電極所消耗的功率，可以改變MZ arms間的干涉程度時約80mW可達到第一個π相位。另一方面，也討論到施加不同頻率的電訊號於光調變器上，所造成的影響，當電訊號的頻率從50Hz增加至850Hz時，元件的動態調變深度有下降至一半的趨勢。

In this thesis, ion-exchange technology has been successfully used to realize dependable and low-cost optical waveguide devices in silicate glass such as N-BK7. First, the planar waveguides were fabricated via Ag+-Na+ ion-exchange in silicate glass. The effects of the silver ion diffusion in this glass matrix has been evaluated to determine the silver and sodium ion diffusion coefficients as well as the value of the maximum refractive index change. With these data obtained, Mach-Zehnder interferometers based on Y-junction waveguides operating at λ=1550nm were fabricated by the wet ion-exchange using AgNO3:NaNO3 molten salt with the mole ratio of 0.04 to 1 maintained at a temperature of 360℃. To evaluate these devices, the thermo-optical effect was applied to the active region via heating electrode located near one of the two Mach-Zehnder arms. Based on the measurement results obtained, the input power and the temperature change observed at the maximum signal attenuation were 80 mW and 5℃, respectively. reached via heating electrodes on the side of the Mach–Zehnder arms.

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