本文旨在發展微型壓力感測器陣列之設計及製作技術。首先我們在厚25微米雙面鍍鋁電極的PVDF壓電薄膜上，利用準分子雷射微細加工技術，製作了具有11個感測單元，感測面積為0.4×0.4 mm2的微型壓力感測器陣列。同時設計了一對一的電荷放大器，並以筆心斷裂法逐一校正感測器。感測器的頻寬則以氣體震波管來測定。最後將感測器陣列放入水槽中，並透過擷取控制系統和高速攝影機，量測單一空蝕汽泡在固體表面附近崩裂時所產生的衝擊訊號。

This study aims at building up the techniques for designing and fabricating an array of micro-sensors of pressure. The sensor array is fabricated directly on a 25μm thick aluminum-metalized polarized PVDF film by means of an excimer laser micro-machining technique. Eleven sensing units each of active area of 0.4×0.4 mm2 are constructed and are accompanied with one-to-one well-designed charge amplifiers. The sensor array is calibrated by the method of pencil lead breaking. The bandwidth of the sensor is determined using a gas dynamic shock tube. Equipped with a high speed CCD camera and a synchronization trigger system, the sensor array is then used to measure the impulsive signal generated by the collapse of a cavitation bubble near a solid boundary.

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