簡易檢索 / 詳目顯示

研究生: 杜祥光
Du, Siang-Guang
論文名稱: 氮化鋁填充高導熱複合材料之開發研究
The Development and Research of High Thermal Conductive Composites Filled with Aluminum Nitride
指導教授: 鍾賢龍
Chung, Shyan-Lung
學位類別: 碩士
Master
系所名稱: 工學院 - 化學工程學系
Department of Chemical Engineering
論文出版年: 2004
畢業學年度: 92
語文別: 中文
論文頁數: 84
中文關鍵詞: 熱傳導值氮化鋁環氧樹脂封裝材料
外文關鍵詞: thermal conductivity, epoxy molding compound, aluminum nitride
相關次數: 點閱:132下載:13
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  •   以陶瓷粉體為填充劑的複合材料,被廣泛的使用在各種高效能電子元件散熱的研發上,例如EMC封裝材料、散熱片、散熱膏、相轉移材料等。本研究即使用實驗室自行合成之氮化鋁陶瓷粉體作為複合材料的填充劑,希望藉由氮化鋁優秀的性質,更有效地增進複合材料的熱傳導性質。吾人以兩種製程:滲透與混煉製程,比較對EMC材料熱傳導的影響,並利用低黏度的矽酮樹脂製作相同條件的導熱片做為對照。主要的操作變因有促進劑的種類、熱壓與否、高分子基材的改變、兩種填充劑粒徑混合、粒徑分佈以及溶劑的使用。滲透製程上,目前以使用26.19μm氮化鋁粉體,添加液態硬化促進劑再經由熱壓可以得到熱傳導值最高為4.8 W/m-K。混煉製程方面,以兩種粒徑填充劑混合的EMC試片,在大、小粒徑填充劑粉體粒徑分佈集中的條件下,其熱傳導值能大幅超越使用單一粒徑填充劑的試片;而使用溶劑混合製作的EMC試片,有利於填充劑粉體的分散以及環氧樹脂填補粉體間的空隙,熱傳導值較未使用溶劑的試片高,但溶劑殘留形成氣泡也降低了熱傳導提升的程度。兩種粒徑填充劑混合製作的EMC試片,其熱傳導值的大幅提升,展現了本實驗室自行合成的氮化鋁粉體具有優越的導熱性,應用於高導熱複合材料的製作上,對於材料的熱傳導性質將更能有所突破。

      The composites filled with ceramic powders are widely used for the development of thermal dissipation in variety of high efficient electronic devices . For example, epoxy molding compound, thermal pads, thermal grease and phase change materials, etc. In this research, we use AlN (aluminum nitride) powders synthesized by our lab as the filler, and hope to enhance thermal conductive properties effectively by excellent thermal properties of aluminum nitride. By two manufacturing processes : impregnation and hot mixing to compare the influence on EMC, and utilizing silicone which is with low viscosity to make thermal pads in the same conditions for comparison. The main variables are kinds of catalysts, hot pressing, change of polymer matrix, mixing of fillers with two kinds of particle size, particle size distribution and using of the solvents. For impregnation manufacturing processes, the highest thermal conductivity of the EMC samples made by using 26.19μm aluminum nitride powders, adding liquid catalyst and hot pressing is to reach 4.8W/m-K at present. For mixing manufacturing processes, the thermal conductivity of the EMC samples filled with two kinds of size of particles can be higher than those filled with one size of particles in the condition of the particle size distribution of larger and smaller particles are concentrated. Adding solvent to mixing epoxy and fillers is advantageous to disperse fillers and fill the space between particles with epoxy. The thermal conductivity of the EMC samples made by this way is higher than those made without adding solvent. But the solvent is hard to be exclude, and the exist solvent will make bubbles inside the sample to limit the enhancement of thermal conductivity. The large enhancement of thermal conductivity of the EMC samples filled with two kinds of particle size of fllers shows excellent thermal conductive properties of Aluminum nitride powders synthesized by our lab. . When using the powders to make high thermal conductive composites, the thermal conductive properties will be better than before.

    摘要………………………………………………………………………I Abstract…………………………………………………………………I 總目錄………………………………………………………………… IV 表目錄…………………………………………………………………VII 圖目錄……………………………………………………………… VIII 符號………………………………………………………………………X 第一章 緒 論……………………………………………………………1 1-1引言………………………………………………………………… 1 1-2半導體封裝材料…………………………………………………… 2 1-2-1 封裝的目的………………………………………………………2 1-2-2半導體封裝材料的配方………………………………………… 3 1-2-3 半導體封裝材的製作流程………………………………………3 1-3 導熱片………………………………………………………………4 1-3-1導熱的目的 …………………………………………………4 1-3-2導熱片之配方 ………………………………………………4 第二章 半導體封裝材料的要求………………………………………11 2-1 封裝材料的主劑--環氧樹脂…………………………………… 11 2-1-1 環氧樹脂的種類 …………………………………………11 2-2 導熱片主劑-矽酮樹脂……………………………………………12 2-2-1矽酮樹脂的硬化機制 …………………………………… 13 2-3 填充劑 ………………………………………………………… 13 2-3-1 填充劑的比較…………………………………………… 14 2-4 封裝用偶合劑…………………………………………………… 15 2-5 現今半導體封裝材料的要求…………………………………… 16 2-6 研究動機 ……………………………………………………… 21 第三章 實驗部分………………………………………………………29 3-1藥品與分析儀器設備………………………………………………29 3-2試片製作……………………………………………………………30 3-2-1 傳統混煉製程…………………………………………… 31 3-2-2 滲透製程……………………………………………………… 32 3-3 試片測試………………………………………………………… 32 3-3-1熱傳導性……………………………………………………32 3-3-2掃描式電子顯微鏡觀察……………………………………33 3-3-3 試片密度量測…………………………………………… 33 3-3-4 機械強度量測…………………………………………… 34 3-4儀器分析……………………………………………………………34 3-4-1 氮氧分析儀……………………………………………… 34 3-4-2濕磨機………………………………………………………35 3-4-3粒徑分析……………………………………………………35 3-4-4 X光繞射儀分析……………………………………………35 第四章 結果與討論…………………………………………… 42 4-1 滲透製程---熱傳導測試…………………………………………42 4-1-1 硬化促進劑種類………………………………………… 42 4-1-2 熱壓與否………………………………………………… 43 4-1-3 改變環氧樹脂種類……………………………………… 44 4-2混煉製程---填充劑分佈熱傳導值的影響……………………… 45 4-2-1 兩粒徑填充劑混合的影響……………………………… 46 4-2-2 粒徑分佈與兩粒徑粉體混合EMC之影響………………………48 4-2-3 使用溶劑對EMC試片之影響………………………………50 第五章 結論……………………………………………………………78 參考文獻……………………………………………………………… 80 自述…………………………………………………………………… 84

    1. 林唯芳,〝有機無機攙合材料〞,國立台灣大學材料系(1997)。
    2. G. A . Slack, R. A. Tanzilli, R. O. Pohl, and J. W. Vandersande, and J. Phys. Chem. Solids, 48(7), 641 (1987).
    3. T. J. Mroz and Jr., Ceram. Bull., 71(5), 782 (1992).
    4. 林光隆,〝電子構裝材料〞,國立成功大學材料工程學系(2000)。
    5. 王春山,〝Polymers for Microelectronics〞,國立成功大學化工所(1999)。
    6. C. S. Wang and T. H. Ho,〝Meta-Bromobiphenol and Its Epoxy Resin in Electronic Application〞, Chinese J. Master. Sci., 24(2), 123 (1992).
    7. C. S. Wang and A. Mendoza,〝2, 6-Dibromo-3, 5-Dimethyl-4-Hydroxy-Benzyl Enter and Epoxy Systems〞, Polym .Bull., 25, 279(1991).
    8. W. Kim, J. W. Bae, I. D. Choi and Y. S. Kim
    〝Thermally conductive EMC (Epoxy Molding Compound) for Microelectronic Encapsulation〞, Polym. Engin. And Sci.,39(4),756 (1999).
    9. 導熱片產品介紹, 翰興科技。
    10. F. D. Buyl,〝Silicone sealants and structural adhesives〞, International Journal of Adhesion & Adhesive,21,411(2001).
    11. H. Lee and K. Neville, Handbook of Epoxy Resins, McGrwHill Inc., New York, 1(1997).
    12. R. R. LeVIER,M. C. Harrison,and R. R. Cook,〝WHAT IS SILICONE?〞,J Clin Epidemiol,48(4),513(1995).
    13. A. A. Gallo, C. S. Bischof, K. E. Howard, and S. A. Anderson, 〝Moisture Resistant Aluminum Nitride Filler for High Conductivity Microelectronic Molding Compounds〞,1996 Electronic components and Technology Conference, 335(1996).
    14. E. P. Plueddemann, Silane Coupline Agent, 2nd Editin, Plenum Press, New York, 1(1991).
    15. E. P. Plueddemann, Silane Coupline Agent, 2nd Editin, Plenum Press, New York, 154(1991).
    16. T. K. Chen and Y. H. Jan,〝Effect of Rubber/Matrix Interfacial Modifications on the Properties of a Rubber-Toughened Epoxy Resin〞, Polym. Int., 31(3), 275(1993).
    17. A. Matsumoto, K. Hasegawa, and A. Fukuda,〝Properties of Epoxy Resins Cures by Phenol Novolac/4-Hydroxyphenyl-maleimide Polymer Blend Hardeners〞, Polym. Int., 31(3),275(1993).
    18. C. S. Wang, H. J. Hwang, and T. H. Ho,〝Syntheses of Novel Metabromophenolic Compounds and Its Epoxy Resin for Electric Packaging〞, Proc. Natl. Counc. ROC, A7(5), 347(1993).
    19. 森田博美,〝Development Direction of Epoxy Resins〞,日本接著學會誌,9(27),24(1991)。
    20. 鈴木宏,浦也孝志,幸島博起,市村茂樹,尾形正次,〝半導體封止用低壓成形材料〞,電子材料,53(1990)。
    21. Y. Nakamura, S. Uenishi, T. Kunishi, K. Miki, H. Tabata, K. Kuwada, h. Suzuki, and T. Matsumoto, 〝New Profile of Ultra Low Stress Resin Encapsulations for Large Chip Semiconductor Devices〞, IEEE Trans. Comp. Hybrids Manuf. Technol., CHMT-12 (4), 502(1987).
    21. A. K. St. Clair, T. L. St. Clair, and W. P. Winfree,〝Low Dielectric Polyimides for Electronic Application〞, Polym.Mater. Sci. Eng., 59, 28(1988).
    23. H. Kimura, S. Ohizumi, T. Nishioka, and M. Nakao,〝New Analytical Study for Popcorn Phenomenon〞, IEEE, 1035(1992).
    24. W. G. Kim, and J/ H. Ryu,〝Physcial Properties of Epoxy Molding Compound for Semiconductor Encapsulation According to the Coupling Treatment Process Change of Silica〞, Inc. J. Appl. Polym. Sci., 65, 1975(1997).
    25.謝承佑, “氮化鋁粉體水解性質探討與抗濕技術開發”, 成功大學碩士論文, 民91年畢 業。
    26.陳惠軍, “氮化鋁粉體表面披覆無機物之抗濕處理研究”, 成功大學碩士論文, 民91年畢業。
    27.劉世量,“提升氮化鋁/環氧樹脂複合材料熱傳導性質研究”,成功大學碩士論文﹐民92年畢業。
    28. M. B. NAWAZ and L. J. NEERGAARD,〝Rheology of silicone
    -coated ceramic powders〞,J. Mater. Sci.,16,870(1997).
    29. A. C.-M. Yang,〝Filler-induced softening effect in thermally aged polydimethylsiloxane elastomers〞,Polymer,35(15),3206(1994).
    30. M. N. R. Dimaano,and T.Watanabe,〝The capric-lauric acid and pentadecane combination as phase change material for cooling applications〞,Applied Thermal Engineering,Vol.22,365(2002).
    31. N. Tsutsumi, N. Takeuchi, and T. Kitotsukuri,〝Measurement of Thermal Diffusivity of Filler-Polyimide Composites by Flash Radiometry〞, J. Polym. Sci. : Part B: Polym. Physics, 29, 1085 (1991).
    32. X. Lu and G. Xu,〝Thermal Conductive Polymer Composites For Electronic Packaging〞, J. Appl. Polym. Sci., 656, 2733(1997).
    33. P. Bujard, G. Kuhnlein, S. Ino, and T. Shiobara, 〝Thermal Conductivity of Molding Compounds for Plastic Packaging〞,IEEE, 159(1994).
    34. P. Procter and J. Solc,〝Improved Thermal Conductivity in Microelectronic Encapsulations〞, IEEE, 835(1991).
    35. D. Tracy, L. Nguyen, R Giberti, A. Gallo, C. Bischof, C. J. Jonczak, and J. Wohlin,〝Plastic Packaging Consortium:Plastic Package Thermal Dissipation〞, IEMT/IMC Proceeing, 290(1997).
    36. Y. Nakamura, M. Yamaguchi, A. Tanaka, and M. Okubo,〝Thermal Shock Test of Integrated Circuit Packages Sealed with Epoxy Molding Compounds Filled with Spherical Silica Particles〞, Polymer, 34(15), (1993).
    37. Y. Nakamura, M. Yamaguchi, M. Okubo, and T. Matsumoto, 〝Effects of Particle Size on Mechanical and Impact Properties of Epoxy Resin Filled with Spherical Silica Particles〞, J. Appl. Polym. Sci., 45, 1281(1992).
    38. Y. Nakamura, M. Yamaguchi, A. Tanaka, and M. Okubo,〝Thermal Shock Test of Integrated Circuit Packages Sealed with Epoxy Molding Compounds Filled with Spherical Silica Particles〞, J. Appl. Polym. Sci., , 49, 331(1993).
    39.X. Py,R. Olives,and S. Mauran,〝Paraffin/porous-graphite-matrix composite as a high and constant power thermal storage material〞,International Journal of Heat and Mass Transfer,44,2727(2001).
    40.劉克群, “使用氮化鋁粉體提升半導體封裝材料熱傳導性質之研究”, 成功大學碩士論 文, 民89年畢業。
    41. L. LIN and D.D.L. CHUNG,〝Thermally Conducting Polymer-
    Matrix Composites Containing Both AlN particles and SiC
    Whiskers〞,Journal of Electronic Materials,23(6),557(1994).
    42. Y. Xu,D.D.L. Chung,and C.Mroz,〝Thermally condocting aluminim nitride polymer-matrix composites〞,Composite : PartA,32,1749(2001).

    下載圖示 校內:立即公開
    校外:2004-07-07公開
    QR CODE