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研究生：	蔡獲列 Tsai, Huo-Lieh
論文名稱：	氮砷化銦鎵光檢測器之研製與電性分析 Electrical Properties and Fabrication of GaInNAs PIN Photodetectors
指導教授：	蘇炎坤 Su, Yan-Kuin
學位類別：	碩士 Master
系所名稱：	理學院 - 光電科學與工程研究所 Institute of Electro-Optical Science and Engineering
論文出版年：	2006
畢業學年度：	94
語文別：	英文
論文頁數：	95
中文關鍵詞：	氮砷化銦鎵、光檢測器
外文關鍵詞：	photodetectors, GaInNAs
相關次數：	點閱：63 下載：1
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在本論文中，我們利用有機金屬氣相沉積的方式將新穎的氮砷化銦鎵多重量子井成長在砷化鎵基板上，做為光檢測器的光吸收層。由於在砷化鎵中摻雜適量的銦與氮可以使得氮砷化銦鎵晶格匹配於砷化鎵上，因此可以降低因為晶格不匹配所產生的缺陷，而磊晶品質佳的元件則可以得到比較低的暗電流和雜訊。
在本論文中的第一部份，我們討論的有無鋁砷化鎵覆蓋層之光檢測器的電特性，有覆蓋層的光檢器在能帶表現上，會有一個能帶的不連續性出現，如此一來將使得元件的暗電流與光電流皆有下降的趨勢，然而暗電流下降的趨勢比光電流更強烈，因此我們可以利用有覆蓋層的光檢測器來得到比較好的光暗電流比與光響應度比。
在本論文中的第二部份，我們比較氮砷化銦鎵與砷化銦鎵多重量子井的電特性，之後我們也比較三對與五對氮砷化銦鎵多重量子井電特性上的差異，最後我們可以發現具有覆蓋層的三對氮砷化銦鎵多重量子井元件電特性會在最佳，其光暗電流比為100000倍，同時其光響應比有200倍而理想因子為1.407。

In this thesis, we used the novel multiple quantum wells (MQWs) laser structure as our photodetector structure. The GaInNAs/GaAs MQWs was used as the absorption layer of photodetectors by metal organic vapor phase epitaxy (MOVPE). Lattice-mismatch between GaInNAs and GaAs can be reduced by incorporating proper amount of indium and nitrogen and thus the defects due to lattice mismatch can be reduced. Also, the photodetectors with excellent quality demonstrate lower dark current and noise.
In the first part, we discuss the electric characteristics of photodetectors with and without cladding layer”AlGaAs”. The cladding layer”AlGaAs” in our photodetector structure will form a double heterostructure, than the valence band discontinuity (∆Ev) and conduction band discontinuity (∆Ec) will occurs. Although the band discontinuities will suppress both the dark current and photocurrent, the decrease of photocurrent is less significantly compared to that of dark current. Consequently, the photodetectors with cladding layer will has the higher photo/dark current contrast ratio and responsivity rejection ratio.
In the next part, we compare the electric characteristics between the GaInNAs/GaAs and InGaAs/GaAs multiple quantum well laser structure. Also, we compare the difference between 3 and 5 periods of GaInNAs/GaAs multiple quantum well. The best choice is the 3 periods of GaInNAs/GaAs multiple quantum well laser structure with cladding layer”AlGaAs” which the photo/dark current contrast ratio and responsivity are 100000 and two orders at -2V and its ideal factor is 1.417.

Contents                                         

Abstract                                                                  I

Acknowledgement                                                           V

Contents                                                                 VI

Figure Captions                                                          Ⅸ
 
Table Captions                                                           XI

Chapter 1  Introduction                                                   1

           1-1 Background                                                 1

Chapter 2  Fabrication Systems and device process                        10

           2-1 Metal Organic Vapor Phase Epitaxy System                  10

           2-2 Photoluminescence (PL) Spectroscopy                       12

           2-3 HR-HRD characterization                                   14

           2-4 Hall Measurement                                          15

           2-5 Responsivity Measurement Systems and Other                

               Measurement Systems                                       17

           2-6 Device Process                                            18

Chapter 3 Theoretic foundation of the photodetectors                     30

           3-1 Mechanism of the current transport for 
               junction photodiodes                                      30
           3-2 Mechanisms of p-i-n photodiodes                           32
                                  
           3-3 Electrical Characteristics of MQW Mesa 
               p-i-n  photodetectors                                     33

Chapter 4  GaInNAs/GaAs MQW P-I-N Photodetectors                         45
     
           4-1-1 Electric characteristics of GaInNAs/GaAs 
                multiple quantum well photodetectors                     46
           4-1-2 The Advantages of GaInNAs/GaAs MQW 
                p-i-n Photodetectors with Cladding Layer AlGaAs          48
           4-1-3 Summary                                                 53
           4-2 The electric characteristics of photodetectors 
               with different MQW fabraiction                            54
           4-2-1 Dislocation issues                                      54
           4-2-2 Characterization of HR-XRD and                            
               photoluminescence (PL) Spectroscopy                       57
           4-2-3 Discussion of the electric characteristics              58    
           4-2-4 Junction breakdown voltage                              61
           4-2-5 Forward I- V Characteristics                            62
           4-2-6 The noise characteristics discussion                    63
           4-2-7 The detail discussion of sample 281                     66
           4-2-8 Summary                                                 66

Chapter 5 Conclusions and Future Works

           5-1 Conclusions                                               89 
           5-2 Future Works                                              91

References                                                               92

                                    

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校內：2009-06-29公開
校外：2009-06-29公開

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